OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
Installed within the vacuum exhaust architecture, this pneumatically actuated pendulum gate valve regulates gas flow between the process chamber and vacuum pumping system while maintaining precise chamber pressure control during critical semiconductor manufacturing processes. In applications where vacuum stability directly influences plasma performance, etch uniformity, deposition consistency, and yield, so gate valve operation has to be reliable.
Because pendulum gate valves operate under continuous vacuum cycling, pneumatic actuation, particle-sensitive conditions, and demanding process environments, seal degradation, actuator wear, contamination buildup, positioning drift, or mechanical wear can contribute to pressure instability, vacuum leaks, process variation, or unplanned downtime.
The ESCT equivalent part number for this component is ES1011-022, supplied as a 2nd NEW OEM-compatible replacement designed to meet form, fit, and functional requirements aligned with the original TEL part.
Core functions include:
The valve supports stable chamber pressure management.
Key performance characteristics include:
Stable pressure control is critical to semiconductor process consistency.
The valve uses pneumatic actuation for controlled movement.
Performance attributes may include:
Reliable actuation helps maintain chamber performance and uptime.
Designed for semiconductor production environments.
Durability characteristics may include:
Reliable valve condition helps preserve chamber qualification and throughput.
Together these components support broader vacuum stability and process repeatability.
Potential impacts of wear or degradation include:
Replacing a degraded gate valve can help restore vacuum stability and improve process reliability.
Seal degradation may gradually affect vacuum performance.
Indicators include:
Actuation performance may deteriorate over time.
Symptoms may include:
Process byproducts may affect valve operation.
Indicators include:
To support best performance:
Key considerations:
It regulates vacuum flow and chamber pressure while providing reliable isolation and pressure control within EMAX chamber systems.
Because precise vacuum and pressure control are critical to maintaining stable process conditions and repeatable wafer results.
It generally refers to the ISO-F flange configuration and valve size used for integration into the vacuum exhaust system.
Common indicators include:
Yes. Chamber pressure fluctuations can directly influence plasma stability and process repeatability.
Yes. Vacuum leaks often result in chamber faults, qualification failures, or process interruptions.
Issues may be identified through leak-rate testing, pressure monitoring, pneumatic diagnostics, PM inspections, or fault log analysis.
Yes. Air supply, regulators, solenoids, or control faults may produce symptoms similar to valve degradation.
Yes. Leak testing, pressure verification, and chamber qualification should be completed after replacement.
Incorrect hardware may cause vacuum incompatibility, pressure control issues, fitment problems, or subsystem faults.
No. This is supplied as ESCT P/N ES1011-022, a 2nd NEW OEM-compatible replacement aligned with the original TEL part requirements.
Yes. Vacuum architecture, flange configuration, and subsystem compatibility should always be confirmed.
Yes. ESCT supports compatibility verification aligned with equipment requirements.
Depending on availability, associated throttle valves, vacuum hardware, pressure control assemblies, and chamber exhaust components may also be supported.
Its condition can directly influence process performance, chamber qualification, equipment uptime, and overall production reliability.
Sourcing through ESCT Fab Support as ES1011-022 provides a verified 2nd NEW OEM-compatible replacement with faster availability, semiconductor-focused expertise, and reliable production support.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Tokyo Electron part number 2L10-251343-21. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Tokyo Electron, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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