ESCT Fab Support delivers component-level repair and refurbishment for legacy and current semiconductor wafer-fab equipment — improving uptime, defeating obsolescence and reducing your reliance on costly OEM replacements. We repair and test parts for Applied Materials (AMAT), LAM Research and Tokyo Electron (TEL) tools across both 200mm and 300mm equipment.
From a single board to a complete assembly, our engineers diagnose and restore the high-value components that keep your installed base in production.
Repair and recalibration of RF power delivery and matching components used across etch and deposition platforms.
Bench-tested repair of switching supplies, high-voltage units and power distribution assemblies, including discontinued modules.
Refurbishment of wafer-handling robots, arms and end-effectors to restore accurate, repeatable transfer.
Component-level board repair, re-capping and rework for controllers, interface and I/O boards.
Repair and reconditioning of heater assemblies, electrodes and chamber components to recover process performance.
Servicing of valves, controllers and related vacuum and gas-flow hardware that drive tool stability.
A clear, four-step route from failed part to qualified return — with a quote before any work begins.
Send us the part number or symptom. We evaluate the failure and confirm whether repair is the right route.
You receive a fixed repair quote and lead time up front — no work starts without your approval.
Our engineers carry out the repair and functionally test the part to its operating specification.
The qualified part is returned ready to install, backed by our repair warranty.
Repair support across legacy and current AMAT etch, CVD and PVD platforms.
Component and board repair for LAM etch and clean systems and their subassemblies.
Refurbishment of TEL track, etch and deposition hardware and controllers.
Supporting both 200mm and 300mm fabs. Don’t see your tool? Ask us →
For legacy 200mm and mature 300mm tools, a new OEM part is often expensive, long-lead or simply no longer available. Repairing the part you already own is frequently faster and far more cost-effective — and it keeps proven, qualified hardware in your line rather than introducing an unknown.
Our repair-first approach extends the service life of your installed base, consolidates your supply chain and helps you plan around end-of-life components. Where a part is genuinely beyond economical repair, we can source a qualified new or second-source replacement through our parts supply service, or help you address it permanently through upgrades and retrofits. For end-of-life components, see our obsolete parts support.
We repair high-value components and assemblies for Applied Materials (AMAT), LAM Research and Tokyo Electron (TEL) wafer-fab tools, across both 200mm and 300mm equipment — including RF generators and match networks, power supplies, robotics and end-effectors, controllers and circuit boards, heaters and chamber hardware, and vacuum and flow components. If you are unsure whether a part is repairable, send us the part number and we will advise.
Turnaround depends on the part and the failure, and we confirm an exact lead time with your quote before any work begins. Where uptime is critical, ask us about expedited handling.
Yes. Repaired parts are functionally tested to their operating specification and returned backed by our repair warranty. Contact us for the warranty terms that apply to a specific repair.
In many cases, yes — repairing the part you already own is often the best route when an OEM replacement is discontinued or long-lead. Where a component is beyond economical repair, we can source a qualified replacement or recommend a retrofit. See our obsolete replacement parts support.
Every repair is functionally tested against the part’s operating specification before it is returned, so it is qualified to perform reliably in your tool. Keeping proven hardware in your line also avoids the risk of introducing an unverified replacement.
Send us the part number, tool and a description of the issue through our contact page, or search our catalogue and request a quote. We will diagnose the failure and come back to you with repair options, a price and a lead time.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
