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Every part ESCT Fab Support holds, listed by catalogue and OEM part number. 854 parts in total across Applied Materials, Lam Research and Tokyo Electron platforms, 200mm and 300mm. Use your browser’s find function to search a part number, or send it to us and we will quote.
300MM – ES10
331 parts331 parts for 300mm platforms. Mostly Tokyo Electron (233), with Lam Research (58) and Applied Materials (27). Predominantly chamber consumables — focus rings, CEL inner and outer sections, upper and lower electrodes and edge rings.
- 0190-35208 MCVD Chamber Interface PCB – 0190-35208
- 0200-01239 INSERT RING TG,SUPER-e
- 0200-02301 TOP RING,NM POLY, STEPPED,300MM EMAX
- 0200-03233 L-COLLAR.,COLUMNAR Si 1.5mm STEP(P)
- 0200-03233 L-COLLAR.,COLUMNAR Si 1.5mm STEP(POLY)
- 0200-03233 L-COLLAR.,COLUMNAR Si 1.5mm STEP
- 0200-03233 L-COLLAR.,COLUMNAR Si 1.5mm
- 0200-03555K (A)SI INSERT RING
- 0200-03555K-SI (A)SI INSERT RING(G)
- 0200-03555K-SI (A)SI INSERT RING(G)
- 0200-03555K-SI (A)SI INSERT RING(P)
- 0200-03559K SI TOP RING(G)
- 0200-03559K (C2)SI TOP RING(G)
- 0200-03559K (C2)SI TOP RING(MID)
- 0200-03559K SI TOP RING
- 0200-03559K (C2)SI TOP RING
- 0200-03559K SI TOP RING
- 0200-03576K SI TOP RING(PRO)
- 0200-03576K (C2)SI TOP RING(PRO)
- 0200-03576K SI TOP RING(PRO)
- 0200-03736K SI INSERT RING(PRO)
- 0200-03736K SI INSERT RING(PRO)
- 0200-03736K (C2)SI INSERT RING(PRO)
- 0200-03736K SI INSERT RING(PRO)
- 0200-05032 INSERT RING
- 0200-10446 INSERT RING 8
- 0200-10446 INSERT RING 8′
- 0200-35623 SILICON FOCUS RING
- 136-951-0 SILICON RING
- 136-951-1 Flex Wide
- 1810-121988-11 Electrode, Upper (LD-777)
- 1810-224852-12 ELECTRODE,UPPER PLATE
- 1810-225123-M1 RING,FOCUS N(LLD)
- 1810-225148-11(U2) CATHODE,SI,777H,6T
- 1810-250082-11 RING,FOCUS N (LLD-HT)
- 1810-329156-11 SI FOCUS RING
- 1810-329156-11 SI FOCUS RING
- 1810-329523-11 SI FOCUS RING
- 1810-329523-M1 RING,FOCUS N (MTBW250)
- 1810-329535-11 HYNIX SI FOCUS RING (LLDX) 0.02
- 1810-350062-M1 FOCUS RING, UP(TYPE L-205)
- 1D10-302208-13 DRM FOCUS RING
- 1D10-302208-13 DRM FOCUS RING
- 1D10-302209-14 SI FOCUS RING(notch)
- 1D10-302209-14 SI FOCUS RING(notch)
- 1D10-309946-M1 RING,F-8SO-SI-260-3.4A
- 1D10-310019-M3 RING, F-8SO-SI-260-4A
- 1D10-311775-M2 RING,F-6S-SI-240-3.4A
- 1D10-350647-11 RING,F-8S0-SI-260-3.4A
- 1D10-350647-21 RING,F-8SO-SI-260-3.4A(325-22.5)
- 1D10-350647-31 RING,F-8SO-SI-260-3.4A
- 1D10-350647-M2 RING,F-8SO-SI-260-3.4A(325-10)
- 1D10-350647-M3 RING,F-8SO-SI-260-3.4A(325-22.5)
- 1D10-350650-11 RING, F-8S0-SI-260-4A
- 1D10-350653-11 RING,F-6S-SI-240-3.4A
- 1D10-350674-11 RING,FOCUS N(LLD)
- 1D10-350680-11 RING,FOCUS N (MTBWC250)
- 1D10-350687-11 FOCUS RING, UP(TYPE L-205)
- 2010-150775-11 SHIN CEL(R&D)
- 2010-251671-11 FOCUS RING,LAB 360-T4-306
- 2010-251679-11 FOCUS RING,LAB 360-T4-306
- 2010-251681-11 FOCUS RING,LAB 360-T4.5-310
- 2010-251838-11 RING,FOCUS SH T3.3
- 2010-251839-11 RING,FOCUS SH T3.4-TAPER304
- 2010-259999-11 RING(LR),FOCUS ATC-BSP 7.5-360
- 2L02-250063-11 ADDWORK,RING-FOCUS 360-315-5.5
- 2L02-250067-11 REWORK,RING-FOCUS 360-318-5.5
- 2L10-250520-11 CEL,CL380-364-0.5(PH)V2
- 2L10-250520-11 CEL,CL380-364-0.5(PH)V2
- 2L10-250701-11 RING(L),SI GND STEP V2
- 2L10-250803-11 CEL,OUTER 10-40F(PH-MG)V2
- 2L10-250803-11 CEL,OUTER 10-40F(PH-MG)V2
- 2L10-250820-11 CEL,INNER(PH-MG)V2
- 2L10-250820-11 (C2)CEL,INNER(PH-MG)V2
- 2L10-250984-11 CEL, INNER S-FTS(NEST)V2
- 2L10-251061-21 FOCUS RING(LAB),360-T4(320)
- 2L10-251316-11 CEL,INNER TP(NEST)V2 (TEST)
- 2L10-251316-11 CEL,INNER TP(NEST)V2
- 2L10-251316-11 CEL,INNER TP(NEST)V2
- 2L10-251342-11 CEL,INNER ST(NEST)V2
- 2L10-251342-11 CEL,INNER ST(NEST)V2
- 2L10-251343-21 CEL,OUTER ST(NEST)V2(POLY)
- 2L10-251343-21 CEL,OUTER ST(NEST)V2
- 2L10-251343-21 CEL,OUTER ST(NEST)V2
- 2L10-251409-11 FOCUS RING(LAB),360-T4(320)HS
- 2L10-251409-11 FOCUS RING(LAB),360-T4(320)HS
- 2L10-251482-11 RING,F-SI-D380D297.0-T3.4 S-MF
- 2L10-251483-11 RING,F-SI-D380D297.0-T2.8 S-MF
- 2L10-251497-11 RING,FOCUS LAB 360-06-4
- 2L10-251509-11 RING,FOCUS T4.3 S700
- 2L10-251514-11 FOCUS RING,LAB 360-T4.5-306
- 2L10-251538-11 FOCUS RING,LAB 360-06-4.5 PL
- 2L10-251708-11 RING,FOCUS LAB 360-320-5
- 2L10-251708-11 RING,FOCUS LAB 360-320-5
- 2L10-251717-11 RING,FOCUS LAB 360-5T SA
- 2L10-251728-11 RING,FOCUS LAB 360-320-5-400H
- 2L10-251729-11 RING,UNDER SI 340.5-8.2( C )
- 2L10-251765-11 RING,FOCUS 360-298.1-T12.1
- 2L10-251765-11 RING,FOCUS 360-298.1-T12.1
- 2L10-251847-11 RING,FOCUS 330-298.1-T12.1
- 2L10-251854-11 REWORK,FOCUS RING 330
- 2L10-251855-11 REWORK,FOCUS RING 344.5
- 2L10-251875-11 FOCUS RING,360-T3.8(314.4)
- 2L10-251875-11 FOCUS RING,360-T3.8(314.4)
- 2L10-251876-11 FOCUS RING,306-T3.6(308.6)
- 2L10-251877-11 FOCUS RING,360-T3.4-FLAT
- 2L10-251877-11 FOCUS RING,360-T3.6 FLAT
- 2L10-251881-11 RING(297B),FOCUS 7.5-360 V3
- 2L10-251884-11 FOCUS RING,360-T3.6(320)
- 2L10-251925-11 RING,FOCUS 360-298.1-T12.1
- 2L10-251992-11 CEL,OUTER ST-P(NEST)V2
- 2L10-252052-11 RING,FOCUS LAB 360-315-5.5
- 2L10-252056-11 RING,FOCUS LAB 360-315-6
- 2L10-252059-11 RING,FOCUS LAB 360-320-4.6
- 2L10-252110-11 RING,FOCUS LAB 360-306-5
- 2L10-252181-11 RING,FOCUS LAB 360-310-5
- 2L10-252181-11 RING,FOCUS LAB 360-310-5
- 2L10-252182-11 RING,FOCUS LAB 360-307.6-5
- 2L10-252318-11 RING,FOCUS LAB 360-315-5
- 2L10-252318-11 RING,FOCUS LAB 360-315-5
- 2L10-252319-11 RING,FOCUS LAB 360-312-5
- 2L10-252346-11 RING,FOCUS 360-298.1-T13.1D
- 2L10-252373-11 RING,FOCUS LAB 360-313.5-5
- 2L10-252373-11 RING,FOCUS LAB 360-313.5-5
- 2L10-252397-11 RING, FOCUS LAB 360-314.2-5
- 2L10-252397-11 RING, FOCUS LAB 360-314.2-5
- 2L10-252407-11 RING,FOCUS 360-298.1-T12.6D
- 2L10-252427-11 RING,FOCUS BSP 305-80-T5.5 297
- 2L10-252482-11 RING,F-SI-D380D297.0-T3.4S-MF
- 2L10-252485-11 RING,FOCUS BSP 302-80-T7.5-297
- 2L10-252512-11 RING,FOCUS BSP 305-70-T7.5
- 2L10-252514-11 RING,FOCUS BSP 305-70-T7.5 297
- 2L10-252586-11 RING,FOCUS BSP 305-75-T7.0-297
- 2L10-252587-11 RING,FOCUS BSP 305-70-T6.5-297
- 2L10-252588-11 RING,FOCUS BSP 305-80-T7.0-297
- 2L10-252608-11 ELECTRODE,IN ST(NEST-CEN)V2
- 2L10-252609-11 ELECTRODE,IN ST(NEST-1LESS)V2
- 2L10-252612-11 ELECTRODE,IN ST(NEST-CHASE)V2
- 2L10-252614-11 RING,FOCUS 298.1-T3.6(302.2)
- 2L10-252644-11 RING,FOCUS 305-T5G50L LAB(FLT)
- 2L10-252645-11 RING,FOCUS 306-T6G50L LAB (FLT)
- 2L10-252646-11 RING,FOCUS 314-T5G50L LAB SHAL
- 2L10-252647-11 RING,FOCUS 318-T5.5G50L LAB
- 2L10-252653-11 CEL, INNER SS-1LESS V2
- 2L10-252671-11 RING,FOCUS LAB 360-322-4.5
- 2L10-252672-11 RING,FOCUS LAB 360-327-4.5
- 2L10-252673-11 RING,FOCUS LAB 360-333-4.5
- 2L10-252691-11 RING,FOCUS 311-T5.5G50L LAB 2S
- 2L10-252692-11 RING,FOCUS 312-T6G50L LAB 2S
- 2L10-252693-11 RING,FOCUS 306-T5 FLAT LAB
- 2L10-252694-11 RING,FOCUS 306-T5 STEP LAB
- 2L10-252695-11 RING,FOCUS 318-T5.5G76 LAB
- 2L10-252696-11 RING,FOCUS 314-T5G78 LAB
- 2L10-252700-11 RING,FOCUS 306-T6.5 STEP LAB
- 2L10-252701-11 RING,GND(L) SI STEP V2
- 2L10-252701-12 RING,GND(L) SI STEP V2
- 2L10-252706-11 RING.FOCUS 360-298.1-T12.1S
- 2L10-252745-11 RING,FOCUS 298.1-T3.6(303.5)
- 2L10-252758-11 RING,FOCUS 311-T5.5G50L WIDE
- 2L10-252759-11 RING,FOCUS 312-T6 G50L WIDE
- 2L10-252760-11 RING,FOCUS 324-T5.5G50L WIDE
- 2L10-252761-11 RING,FOCUS 308-T4.5G50L WIDE
- 2L10-252764-11 RING,FOCUS LAB 360-318-5.5
- 2L10-252796-11 RING,FOCUS 360-318-5.5 WIDE
- 2L10-255881-21 SI GND RING RK5
- 2L10-354003-11 FOCUS RING,T3.4 NO HOLE
- 2L10-355078-11 CEL,OUTER SS-V2(POLY)
- 2L10-355078-11 CEL,OUTER SS-V2
- 2L10-355557-11 RING,INNER COVER 330.3 SI V2
- 2L10-355558-11 RING,INNER COVER 344.8 SI V2
- 2L10-355755-11 CEL,OUTER SS-L V2(POLY)
- 2L10-355755-11 CEL,OUTER SS-L V2
- 2L10-355763-11 CEL,OUTER SS-LP V2
- 2L10-355763-11 CEL,OUTER SS-LP V2
- 2L10-355763-11-07 OUTER CEL, 4x
- 2L10-356318-11 ELECTRODE UPPER,OUTER SST-2 V2E
- 2L10-356319-11 ELECTRODE UPPER,OUTER SST-T V2E
- 2L10-357010-11 FOCUS RING, 360-310-T3.4
- 2L10-516313-21 SI GND RING MODIFY
- 3D10-200330-12 FOCUS RING,380-T6.5
- 3D10-200997-11 FOCUS RING PM4.0-380
- 3D10-201448-11 FOCUS RING,TE-MODIFY
- 3D10-201448-11 SILICON FOCUS RING TE-MODIFY REV.1
- 3D10-201448-11(U2) SI FOCUS RING (TE Modify)Rev.1 (4t)
- 3D10-201448-13 FOCUS RING, 360-302-C
- 3D10-201448-21 FOCUS RING 360-302-C
- 3D10-201448-21 FOCUS RING 360-302-C
- 3D10-201448-21 FOCUS RING 360-302-C
- 3D10-201448-21(M) FOCUS RING 2.6T
- 3D10-201448-21(M) FOCUS RING 2.6T
- 3D10-201448-21K1 (C2)SI FOCUS RING(2.6T)
- 3D10-202364-12 CLE INNER
- 3D10-202364-12 (C2)SILICON CEL INNER(TE-T10-P-LABY)
- 3D10-202364-12 SILICON CEL INNER (TE-T10-P-LABY)
- 3D10-202375-12 CEL, OUTER(TE349-LABY-GNDFLAT)
- 3D10-202375-12 CEL, OUTER(TE349-LABY-GNDFLAT)
- 3D10-202375-21 CEL, OUTER(TE-349-LABY-GND FLAT)
- 3D10-202375-21 (C2)CEL, OUTER(TE-349-LABY-GND FLAT)
- 3D10-202375-21(S) CEL, OUTER(TE-349-LABY FLAT)
- 3D10-250157-11 FOCUS RING,380-T6.5(CP)
- 3D10-250158-11 FOCUS RING,380-T6.5,IN303(CP)
- 3D10-250177-12 FOCUS RING,380-T4.0(CP)
- 3D10-250266-11(S) CEL
- 3D10-250281-11 FOCUS RING,J302-303-8.3-298.2
- 3D10-250316-11 (C2)CEL,INNER(SH-OX1.75)
- 3D10-250316-11 CEL,INNER(SH-OX1.75)
- 3D10-250316-11-M CEL,INNER(1.75-WITH PIN)
- 3D10-250316-11(S) ELECTRODE (TEST)
- 3D10-250316-11(S) ELECTRODE
- 3D10-250316-11(U1) ELECTRODE(With Pin)
- 3D10-250317-21 CEL, OUTER, SH-OX,RP470-0.2
- 3D10-250317-21 (C2)CEL,OUTER,SH-OX,RP470-02
- 3D10-250317-21 CEL, OUTER, SH-OX,RP470-0.2
- 3D10-250318-11 RING,FOCUS,AD360-298.1
- 3D10-250318-11 (C2)FOCUS RING,AD360-3.4-298.1
- 3D10-250322-11 FOCUS RING(8.5T)
- 3D10-250369-11 HYNIX TEL Focus Ring 360-302-T4 TAP
- 3D10-250442-31 FOCUS RING,380-T4.O,E
- 3D10-250442-31 FOCUS RING,380-T4.O,E
- 3D10-250576-21 RING FOCUS 8/MIN/CL
- 3D10-250576-21 RING FOCUS 8/MIN/CL
- 3D10-250576-21 RING FOCUS 8/MIN/CL
- 3D10-250755-11 RING,FOCUS T4G100-MF
- 3D10-250755-21 SHIN COOLING FOCUS RING,360-T4.5-29
- 3D10-250755-21 SHIN COOLING FOCUS RING,360-T4-298
- 3D10-250807-21 RING,FOCUS T4G50L-G2TMF
- 3D10-250807-21 RING,FOCUS T4G50L-G2TMF
- 3D10-250825-11 RING,FOCUS 360-305-LT298.4-1.0
- 3D10-250871-11 CEL
- 3D10-250899-11 FOCUS RING
- 3D10-250946-11 RING,FOCUS JI ATCC-BSP8.3-75LR
- 3D10-250968-11 RING,FOCUS SH T4.0-2TAPER306
- 3D10-250970-11 RING,FOCUS SH T4.5-2TAPER306
- 3D10-250971-11 RING,FOCUS SH T4.5-TAPER306
- 3D10-250971-11 RING,FOCUS SH T4.5-TAPER306
- 3D10-251033-V1 FOCUS RING,360-302 T3.4
- 3D10-251036-V1 RING,FOCUS 360-T6.5
- 3D10-251036-V1 RING,FOCUS 360-T6.5
- 3D10-251037-V1 FOCUS RING,PM380-303 T8 VA
- 3D10-251042-11 CEL,OUTER GAP30
- 3D10-251043-11 RING,PROTECTION GAP30
- 3D10-251155-V1 RING,FOCUS 360-302-C
- 3D10-251155-V1 RING,FOCUS 360-302-C
- 3D10-251187-V1 FOCUS RING,PM 380-303 T4
- 3D10-251187-V1 FOCUS RING,PM 380-303 T4
- 3D10-251300-V1 RING, GND GROOVE FG8-N
- 3D10-251946-11 RING,FOCUS JI ATCC-BSP8.3-75LR
- 3D10-253182-11 RING,SI GND FBI
- 3D10-302020-11 CEL,OX T10-75-C912(COC-N)
- 3D10-350067-11 SHIN PROTECTION RING(GRINDING)
- 3D10-350067-11 SHIN PROTECTION RING(POLISHING)
- 3D10-350067-11 (SI-SHIN)RING PROTECTION(TE-RP470)
- 3D10-350067-11 (SI-SHIN)RING PROTECTION(TE-RP470)
- 3D10-350067-11 (SI-SHIN)RING PROTECTION(TE-RP470)
- 3D10-350067-11 (SI-SHIN)RING PROTECTION(TE-RP470)
- 3D10-350401-11 12″FOCUS RING 8.55T(NEST)
- 3D10-351315-12 ELECTRODE, PLATE CEN(5K)S-DRM
- 3D87-003411-14 CEL BODY ASSY.SCCM-OX(SE)
- 3D87-052882-12 SILICON RING , PROTECTION(TE GND FLAT)
- 3D87-052882-12 SI RING,PROTECTION(TE GND FLAT)
- 3D87-052882-12 SILICON RING , PROTECTION(TE GND FLAT)
- 3D87-052882-12 SI RING,PROTECTION(TE GND FLAT)
- 716-007136-002(S) UPPER RING HPT
- 716-007136-002(U1) RING, UPPER Si EXELAN(LSI)
- 716-007136-002(U1) RING, UPPER Si EXELAN
- 716-017544-001 Hynix 200mm Hot Edge Ring
- 716-023013-004(U1) EDGE RING(385ESC)
- 716-023013-007 HOT EDGE RING
- 716-023013-020 SI HOT EDGE RING
- 716-023013-027 (C2)HOT EDGE RING, HE,38X ESC,RND
- 716-040738-120 (C2)HOT EDGE RING FLEX45(CP22.5um)
- 716-040738-120 HOT EDGE RING FLEX45(4.5T GRINDING)
- 716-040738-120 HOT EDGE RING FLEX45(LAPPING)
- 716-040738-120 HOT EDGE RING FLEX45(GRINDING)
- 716-040738-120 (C2)HOT EDGE RING FLEX45(MID)
- 716-040738-120 HOT EDGE RING FLEX45(L)
- 716-040738-120 HOT EDGE RING FLEX45(POLISHING)
- 716-040738-120 (C2)HOT EDGE RING FLEX45
- 716-040738-120 HOT EDGE RING FLEX45
- 716-040738-413 R,HE,4XX, W/FLAT
- 716-040738-427(S1) HOT EDGE RING FLEX45
- 716-040738-471 HOT EDGE RING(FOR FLEX3X)-POLISHING
- 716-040738-471 HOT EDGE RING(FOR FLEX3X)
- 716-044668-435 HOT EDGE RING
- 716-044863-001(U1) EDGE RING(400ESC)
- 716-069688-005 CORE_INNER ELECTRODE (TEST)
- 716-069688-005 Electrode Inner 18step,300mm
- 716-069688-005 CORE_INNER ELECTRODE
- 716-069688-005 CORE_INNER ELECTRODE
- 716-069688-005 CORE_INNER ELECTRODE
- 716-069688-005 TALON INNER 전극
- 716-069688-005(S) ELECTRODE
- 716-069688-789 WAVE INNER ELECTRODE
- 716-069688-822 Shaped inner UE
- 716-073979-032 ELCTD, MONO TALON+, CZ, 18 STEP
- 716-077916-001 Electrode Outer 18step,300mm
- 716-077916-001 ELECTD,OUTER,18 STEP300M
- 716-081665-251 RING,C-SECTION,.10 SLOT, FLEX HX_MODIFY
- 716-081665-252 RING, SECTION, TAPER, POLY SI
- 716-081665-601 RING,C-SECTION,.10 SLOT,POLY SI
- 716-081665-842 RING,C-SECTION10 SLOT, POLY SI
- 716-140125-100(U1) BAFFLE
- 716-443090-202(U3) UPPER RING
- 839-020965-005 OUTER ELECTRODE FLEX45(SI)
- 839-020965-005 OUTER ELECTRODE FLEX45(SIC)
- 839-020965-005 OUTER ELECTRODE FLEX45(HG)
- 839-020965-007 OUTER ELECTRODE FLEX45(SI)
- 839-020965-007 OUTER ELECTRODE FLEX45(SIC)
- 839-020965-007 OUTER ELECTRODE FLEX45(HG)
- 839-021113-002 SI INNER ELECTRODE
- 839-021113-002 SI INNER ELECTRODE
- 839-044157-031 FLEX45 INNER ELECTRODE
- 839-044157-031 FLEX45 INNER ELECTRODE(CARBON)
- 839-044157-031 FLEX45 INNER ELECTRODE(SCREW REV01)
- 839-044157-031 FLEX45 INNER ELECTRODE(0.635)
- 839-044157-031 INNER ELECTRODE FLEX45
- 839-044157-031 INNER ELECTRODE FLEX45
- 839-044157-031 INNER ELECTRODE FLEX45
- CX10-350909-11 WAFER, TEACHING TACTRAS
- CX10-352390-11 WAFER,305.4 TEACHING TACTRAS
- D100-04275S-G06 FOCUS RING 360
- D100-04489A-03 INNER CEL, 4x
- D103-23554A SH Inner Cell
- D103-24221A FOCUS RING
- DB-1810-121988-11-H ELECTRODE UPPER (LD-777) [SCCM]
- DB-1810-121988-11-H ELECTRODE UPPER (LD-777) [SCCM]
- DB-716-443086-401-H HOT EDGE RING
- DB-716-443086-401-H HOT EDGE RING
- DEB-1810-121988-11W ELECTRODE UPPER LD777
- K-PU-000077-11 RING,FOCUS 360-298.1-3.4(VU)
- CATHODE,SI,777H,5T
AMAT – ES30
236 parts236 Applied Materials parts, weighted towards power supplies, scan arms, bearings, drives and motors.
- 0020-05764 U Shape Cover, Hollow Gripper, 200mm A-Type
- 0020-81151 Washer Lock
- 0020-83142 Spring Drive
- 0020-83302 U Shape Cover, Hollow Gripper, 200mm A-Type
- 0020-83729 U-Shape Housing, Hollow Gripper, 200mm
- 0020-83961 Roller Spring
- 0020-84222 Finger, Hollow Gripper, Black
- 0020-85167 Finger, Hollow Gripper, White
- 0020-90421 Wheel Insulator 1
- 0020-94191 Resin Bracket to fix std Gripper Cylinder
- 0020-96167 Vibration Sensor
- 0020-96466 Finger, std Gripper, 125mm, White
- 0020-98985 Finger, std Gripper, 125mm, Black
- 0021-90783 Finger, Gripper, Quantum
- 0040-92366 Bottom Shaft for Vertical Groove Belt
- 0040-94358 Flight Tube Leakage Repair
- 0040-95199 Hollow Gripper, Y-arm, 200mm
- 0040-95466 Cooling Tube Leakage Repair
- 0040-96829A Extraction Bellows
- 0040-97186 Shoe Pick Up 150mm 3mm EDGE 30 Degree PEEK
- 0040-97187 Shoe Pick Up 200mm 3mm EDGE 30 degree PEEK
- 0041-35673 Shoe Pick Up 200mm 1.5mm EDGE Semitron, Black
- 0045-90049 0690-90107 Leadscrew 300mm with Nut and Coupling
- 0090-08621 Extension Board
- 0090-90164 PreAccel Power Supply
- 0090-90167 wCHAS ASY PWR UNIT FOCUS
- 0090-90215 wCHAS WRD INVERTER FOCUS
- 0090-90216 PreAccel Inverter
- 0090-90217 Focus Resistor Unit
- 0090-90250 Arm Servo PSU
- 0090-90352 Post Accel Stack
- 0090-90353 Magnet Power Supply
- 0090-90364 Supressionn Power Supply
- 0090-90388 PRE-ACCEL STACK
- 0090-90388 HV STACK(60KV)
- 0090-90461 Supressionn Power Supply
- 0090-90500 CHASSIS WRD MAG FILTER
- 0090-90500 CHASSIS WRD MAG FILTER
- 0090-90557 ARC Module
- 0090-90589 Post Accel Converter
- 0090-90966 DAQ TYPE “B”
- 0090-90967 DAQ TYPE “H”
- 0090-91049 ARC Module
- 0090-91122 SPIN PSU
- 0090-91124 SPIN AMP
- 0090-91130 HV STACK(60KV)
- 0090-91131 PreAccel Power Supply
- 0090-91192 Source Extraction Assy Repair
- 0090-91246 Converter
- 0090-91415 FOCUS Power Supply
- 0090-91444 Source MAG PSU
- 0090-91596 SPIN/SCAN PPower Supply Motech MP80
- 0090-91597 SCAN AMP
- 0090-91640 Power Supply, Multi Purpose, 45W 4Outputs
- 0090-91641 Power Supply, Multi Purpose, 65W 4Outputs
- 0090-91649 ARC Power Supply
- 0090-91917 PerAccel Stack
- 0090-91917 HV STACK
- 0090-91917 HV STACK(60KV)LEAP Q2
- 0090-93023 Supressionn Power Supply
- 0100-00958, 94054, 91035 I/V Convertor Wheel
- 0100-00991 GAP SERVO(0100-00991、0100-91055)
- 0100-90025 24V 1A PSU
- 0100-90071 Cryo Pump Temperature Monitor PCB
- 0100-90077 Thermistor Gauge Controller
- 0100-90172 Stepper Controller 5-Phase
- 0100-90177 Vacuum Control Drive
- 0100-90237 Wafer Arm Interlock
- 0100-90254 Serial Communication I/F Driver
- 0100-90286 Beam Profiler Interface
- 0100-90385 Contactor Drive
- 0100-90453 PWBA,ARC MOD PSU
- 0100-90590 Gas Interlock PCB(0100-90590)
- 0100-90688 ARC PSU Control PCB
- 0100-90773 Wafer Arm Servo
- 0100-90773 ARM SERVO PCB
- 0100-90872 Source Magnet Control PCB
- 0100-90994 Temp Control PCB
- 0100-90998 Tilt interlock
- 0100-91019 PWB ASSY CASSETTE INDEXER
- 0100-91042 Tilt Drive Card
- 0100-91086 Plasma Arc Current PCB
- 0100-91105 I/V Convertor Power Supply
- 0100-94089 Vendor Interface pre-accel PCB
- 0100-99008 Gas Interlock PCB(0100-99008、0100-99011)
- 0150-91172 0150-91191 Fiber Cable with NO Spring, Plastic and Metal SMA Plug
- 0150-91172 0150-91191 Fiber Cable with Spring, Plastic and Metal SMA Plug
- 0150-91741 0150-91745 0150-91748 Fiber Cables, SMA Plug on Both Ends
- 0150-93094 TILT Cable
- 0190-18278 Pump Motor
- 0540-90014 AMP 100A-300VDC
- 0660-00074 F/O INTERFACE CARD
- 0660-00633 DAQ Universal Type
- 0660-90060 CARD VIDEO CNTL HI-RES
- 0720-90443 Rotary Connector, Mercury tip
- 0760-90018 Coupling, Arm Motor
- 0760-90020 Coupling, Tilt Motor
- 1040-90039 Vibration Sensor
- 1080-01483 Extraction Drive Motor for xR
- 1080-90009 SPIN MOTOR
- 1080-90021 SCAN MOTOR
- 1080-90047 TRANSFER ARM MOTOR
- 1080-90078 MRS Mini Motor
- 1120-00830 Light Pen
- 1140-00039 Bias Power Supply
- 1140-00056 ARC Power Supply
- 1140-00057 Filament Power Supply
- 1140-00151 ARC Power Supply
- 1140-00153 ARC Power Supply
- 1140-00154 Filament Power Supply
- 1140-00181 ARC Power Supply
- 1140-00265 HV Unit
- 1140-90022 SPIN AMP
- 1140-90022 wPower Supply, 3PH 220 V I/P
- 1140-90056 Source MAG PSU
- 1140-90066 Filament Power Supply
- 1140-90086 Filament Power Supply
- 1140-90090 Filament Power Supply
- 1140-90115 Supressionn Power Supply
- 1140-90158 Bias Power Supply
- 1140-90159 DC Power Supply
- 1140-90164 PSU G2
- 1140-90182 Filament Power Supply
- 1210-90555 Extraction/MRS Potentiometer
- 1210-90731 Potentiometer, Blade
- 1210-90737 German Potentiometer, Arm
- 1210-90737 D Potentiometer, Arm
- 3060-00229 Guide Bearing, Blade Box Assy
- 3060-00230 Drive Bearing, Blade Box
- 3060-00231 Guide Bearing, Cassette Indexer
- 3060-00232 Cassette Indexer DriveTube Side, Adjustment Bearing
- 3060-00233 Cassette Indexer Bar Idler Side, Adjustment Bearing
- 3060-90057 Bearing, Scan Arm Tension, Horizontal Groove Belt
- 3060-90075 Bearing, Scan Drive Shaft Ball Screw, Upper
- 3060-90076 Bearing, Scan Drive Shaft Ball Screw, Lower
- 3060-90077 Bearing, Scan Drive Shaft Ball Screw, Lower, Inner
- 3060-90084 Bearing, Mercury Shaft
- 3060-90120 Bearing, Left and Right, Scan Drive Shaft Ball screw
- 3060-90246 Bearing, Scan Arm Tension Roller
- 3060-90254 Bearing, Scan Arm TOP
- 3060-90277 Shield Bearing, Cassette Indexer Guide
- 3060-90278 Shield Bearing, Cassette Indexer, Drive Tube Side Adjustment
- 3060-90279 Shield Bearing, Cassette Indexer, Barldler Side Adjustment
- 3060-90286 Bearing, Scan Arm V BELT TOP
- 3060-90287 Bearing, Scan Arm V BELT Centre Tension Roller
- 3060-90288 Bearing, Scan Arm V BELT Light Tension Roller
- 3060-90289 Bearing, Scan Arm V BELT Light Tension Roller
- 3060-90290 Bearing, Scan Arm V BELT Left Tension Roller
- 3060-90291 Bearing, Scan Arm V BELT Encorder
- 3060-90292 Bearing, Scan Arm Bottom
- 3500-90027 Lock Nut, Scan Drive Shaft Ball Screw, Upper
- 3620-90044 wPump,WATER
- 3620-90080 wPump UNIT FOR FREON FREE H/EX
- 3700-90141 Rotary Seal, Non VA-Type
- 3700-90217 Top Ferro (Non-VA type)
- 3700-90270 Ferro Seal Repair
- 3700-90274 Rotary Seal, VA-Type
- 3710-90010 0690-90107 Leadscrew 312mm with Nut and Coupling
- 3870-90121 Solenoid Valve, 3-Way
- 9010-01143 DD MOTOR
- 9090-00046 Source Magnet Power Supply
- 9090-00046 Source MAG PSU
- 9090-00093 DAQ MKII
- 9090-00170 Tetroad G2 Resistor Repair
- 9090-00398 PreAccel Power SET
- 9090-00969 QUANTUM X MASTER PC
- 9090-01267 Source MAG PSU ASSEMBLY
- DD DD Motor Tilt Assy Repair
- 14 Channel Array PCB
- Balls for ISO Valves, 10
- Blade Rail, Speedy Roller
- Bushing Repair
- Carousel Control Drive PCB(inside Wafer Loader)
- Contactor Relay in Main PDU (K2/K16)
- Converter
- Cooling Water Line, Upgrade
- Coupling Adapter, Tilt Motor
- Cryo Gate Valve
- Cryo Pump
- Exhaust Duct, Dry Pump, S Shape for 9500/9500xR
- Exhaust Duct, Dry Pump, Straight for Quantum
- Exhaust Duct, Dry Pump, Straight for xR80, xR120, xR
- Filament Cable
- Flash Memory Drive
- Flight Tube, Inner Graphite
- Flight Tube, Outer Graphite
- Geometry Spacer Upgrade
- Grundfos Pump, Heat Exchange Recirculation Pump (successor)
- Heat Exchange Pump
- Heat Exchanger Core, Female
- Heat Exchanger Core, Male
- Heat Exchanger Filter Ball
- Heat Exchanger Filter Ball, with Pressure Gauge
- Heatsink, Refurbishment
- High Power Supply
- Ionizer Aero Bar
- Isolation Valve O/H(Source)
- LED, Status Lamp, Green
- LED, Status Lamp, Red
- LED, Status Lamp, White
- Limit Switch
- Low Power Supply
- Moving Clips Actuator Repair
- Moving Clips, Actuator Speed Adjuster
- Moving Clips, Pin Improvement 125, 150mm
- Moving Clips, Pin Improvement 200mm
- Moving Clips, Pin Improvement 300mm
- PMAC CARD
- Post-Accel Inverter Unit
- Power Supply OL400 / 602 / 19
- PreAccel Power Supply
- Ring for ISO Valves
- SCAN MOTOR
- Scan Sensor, LM Guide Rail
- Shoe Pick Up 125mm 3mmEDGE PEEK
- Solenoid Valve, 3-Port
- Solenoid Valve, 3/2Way
- Solenoid Valve, 4 Port
- Source FlowMeter, 1000LPH
- Source FlowMeter, 1600LPH
- Source FlowMeter, 160LPH
- Source FlowMeter, 250LPH
- Spring for 8 ” Moving Clips
- Spring, 12 ” Moving Clips
- Spring, 5″ & 6 ” Moving Clips
- Timer Relay Inside DD I/F chasis
- Transfer Arm, Position Shift Detector
- U-Shape Housing, Hollow Gripper, 150mm
- Universal Joint, Horizontal Groove
- Universal Joint, Vertical Groove
- UPGRADES
- Wafer Loader Door, Air-Cylinder Drive
- Wafer Loader Door, Circuit Upgrade
- Wafer Loader Isolation Valve Cylinder Repair
- Weight Balance Large, 154g
- Weight Balance Small, 59g
LAM – ES20
151 parts151 Lam Research parts. Mainly control and power electronics — boards, power supplies and match networks — plus ESC and arm assemblies.
- 011-4130-03 ALIGNER CONTROLLER
- 02010-BA24-1001 SLIT DOOR ASSY
- 05309-023 48RA INDEXER ASSY
- 605-012620-001 INDEXER BOARD
- 605-017016-100 STEPPER MOTOR DRIVER BOARD
- 649-007321-004 CAPACITOR, HIGH VOLTAGE
- 660-007612-001 POWER SUPPLY PS1
- 660-024637-026 RF GENERATOR
- 660-024637-028 RF GENERATOR
- 660-091821-001 DELTRON POWER SUPPLY PS2
- 660-091821-003 OMEGA POWER SUPPLY (PS2)
- 660-098040-001 MAGNETEC POWER SUPPLY
- 660-098076-002 MAGNETEC POWER SUPPLY
- 715-011492-008 HOLDER, WAFER,8″ STRIPPER (Without alignment hole)
- 715-013705-008 COVER, BOWL, RINSE, 8
- 715-032759-008 SPRT,ADJ CLR,LFTR,8″
- 715-032760-008 CLR, PINNED, ADJ,LIFTER,8″ STRIPPER
- 715-130081-008 HLDR, WFR 8″, STPR, W/ALIGN HOLE (with alignment hole)
- 716-330504-081 RING,FOC,8″ FLATTED,GD R, ESC
- 718-094756-081 ELCTD,CAP,GD RING,ESC,8IN NCH
- 778-091827-011 ANAFAZE BOARD
- 796-006238-001 AC-2
- 796-098290-002 PM-7 CONTROLLER
- 797-900918-002 UPC
- 799-012600-001 INDEXER ASSY
- 810-005843-001 48RA CONTROL BOARD
- 810-007003-004 DIP BOARD
- 810-015932-001 AUTOTUNE BOARD
- 810-015932-002 AUTOTUNE BOARD
- 810-015987-001 AUTOTUNE BOARD
- 810-015987-003 AUTOTUNE BOARD
- 810-015987-101 AUTO TUNE BOARD
- 810-015987-101 AUTOTUNE BOARD
- 810-017003-001 DIP BOARD
- 810-017003-002 DIP BOARD
- 810-017003-004 DIP BOARD
- 810-017003-005 DIP BOARD
- 810-017003-005 DIP BOARD
- 810-017007-001 CONVECTRON TUBE INTERFACE B/D
- 810-017012-002 HEARTBEAT BOARD
- 810-017013-001 AMP INTERLOCK BOARD
- 810-017018-002 GAP MOTOR CONTROL BOARD
- 810-017021-001 LIFTER FILTER
- 810-017031-001 ADIO BOARD
- 810-017031-002 ADIO BOARD
- 810-017031-003 ADIO BOARD
- 810-017031-004 ADIO BOARD
- 810-017031-004 ADIO BOARD
- 810-017034-003 CPU BOARD
- 810-017034-005 CPU BOARD
- 810-017034-300 CPU BOARD
- 810-017035-001 SASI BOARD
- 810-017038-002 SERIAL BOARD
- 810-017038-002 SERIAL BOARD
- 810-017050-004 ADIO 8번 BOARD
- 810-017052-009 ADIO BOARD
- 810-017057-001 DSQ DIP BOARD
- 810-017082-004 REPAIR – LAM Control PCB Assembly
- 810-017086-002 ESC POWER SUPPLY
- 810-017086-003 ESC POWER SUPPLY
- 810-017086-010 ESC POWER SUPPLY
- 810-017086-018 ESC POWER SUPPLY
- 810-017086-018 ESC POWER SUPPLY
- 810-017093-001 MOTOR CONTROL DRIVER
- 810-017388-003 ADDRESS BOARD
- 810-034806-105 HALO INTERFACE BOARD
- 810-034817-002 ISI INTERFACE BOARD
- 810-034828-011 RF PEK DET HV BOARD
- 810-057059-002 SRAM BOARD
- 810-190082-001 ESC filter board
- 810-190549-003 GFI BOARD
- 810-330490-001 ESC RF FILTER
- 810-370540-002 BREAK OUT BOARD
- 810-370749-101 INTER LOCK BOARD
- 810-707183-001 ENGENUITY BOARD
- 810-803205-001 Enhanced Universial Gas Box PCB
- 810-803225-001 Enhanced Universial Gas Box PCB
- 810-803226-001 Enhanced Universial Gas Box PCB
- 839-011907-100 8” Upper Electrode, 0, 84d
- 839-013901-001 THROTTLE VALVE
- 839-031686-001 COIL, EIGHT TURN
- 839-031687-003 ASSY,CAPACITORS, TCP MNW 8″
- 853-001983-005 EPD
- 853-011094-001 MONOCHROMATOR
- 853-011094-001 Verity Endpoint LAM 4520 – ASSY MONOCHROMATOR
- 853-012100-003 ARM HOUSING ASSY
- 853-012123-001 HARMONIC ARM
- 853-012123-002 HARMONIC ARM
- 853-012123-004 HARMONIC ARM
- 853-012175-001 HARMONIC ARM
- 853-012175-003 HARMONIC ARM
- 853-012175-004 HARMONIC ARM
- 853-012200-002 INNER DOOR
- 853-012261-001 INNERDOOR
- 853-012500-002 EDGE DETECTOR ASSY
- 853-012525-001 LIFTER SPINNER
- 853-012600-002 INDEXER ASSY
- 853-012600-101 INDEXER ASSY
- 853-012875-001 INNERDOOR
- 853-015130-002 BOTTOM MATCH
- 853-015130-102 BOTTOM MATCH
- 853-017034-110 CPU BOARD
- 853-017086-002 ESC POWER SUPPLY
- 853-017086-018 ESC POWER SUPPLY
- 853-021819-001 ARM HOUSING ASSY
- 853-021819-001 ARM HOUSING ASSY
- 853-021819-002 ARM HOUSING ASSY
- 853-025054-001 ESC POWER SUPPLY
- 853-025054-002 ESC POWER SUPPLY
- 853-025054-003 ESC POWER SUPPLY
- 853-025054-018 ESC POWER SUPPLY
- 853-025083-001 BOTTOM MATCH
- 853-025083-003 BOTTOM MATCH
- 853-025083-022 BOTTOM MATCH
- 853-025735-001 DSQ MATCH
- 853-025735-004 DSQ MATCH
- 853-025735-008 DSQ MATCH
- 853-025735R-001 DSQ MATCH
- 853-025903-002 LOFAT
- 853-029295-102 INDEXER ASSY
- 853-029595-101 INDEXER ASSY
- 853-032190-008 TCP9600 T-MATCH
- 853-032294-001 TCP9400 T-MATCH
- 853-032294-002 TCP9400 T-MATCH
- 853-032294-003 TCP9400 T-MATCH
- 853-032776-001 PADDLE LIFTER
- 853-032776-002 PADDLE LIFTER
- 853-044264-003 INNER DOOR
- 853-140013-001 OUT DOOR
- 853-140013-001 OUT DOOR
- 853-140389-001 TCP9600 T-MATCH
- 853-250001-023 BOTTOM MATCH
- 853-250001-024 BOTTOM MATCH
- 853-330281-002 TCP-SENSOR BOX
- 853-330473-001 ESC POWER SUPPLY
- 853-330951-021 BOTTOM MATCH
- 853-347146-008 ASSY,HTD PDL,FDTHRU,STPR,8″
- 853-370871-002 VCI BOARD
- 853-442064-001 INNERDOOR
- 853-442064-002 INNERDOOR
- 853-442064-003 INNERDOOR
- 853-442078-001 INNERDOOR
- 853-540064-001 EPD
- 853-540066-001 EPD
- 853-540066-005 EPD
- 853-540066-011 EPD
- 856-900240-400 LAM IPC
- 88-11320-300 ANAFAZE CONTROLLER
- 97780-005 MATRIX BOARD
- FM12C6-08-CG DELTRON POWER SUPPLY PS1
- PM2675A-1-3 MAGNETICS POWER SUPPLY
ESJTM
71 parts71 Applied Materials parts, weighted towards graphite components, tubes, shields, liners and filaments.
- 0010-91412 MODULE, 9500XR GAS SYSTEM, BF3 HIGH PRESSURE GAS, 0010-91412
- 0010-92438 ASSEMBLY, 9500XR SPIN, MERCURY SHAFT & SEAL ASSY.
- 0010-99165 MOVING CLIP ASSY, 9500XR WHEEL, NEW, 150MM 0 DEG
- 0020-81226 SLEEVE OVEN NOZZLE, 0020-81226
- 0020-81482 ANTI-CATHODE, MODIFIED SHAFT, 10078193, 0020-81482
- 0020-82054 ARC CHAMBER, REMOTE INSULATED PFS
- 0020-82135 FILAMENT – PFS
- 0020-82474 SHIELD, GRAPHITE, 55 X 94
- 0020-82832 Graphite, 9AP95002 Beamstop, Single Position
- 0020-82890 BLADE, CERAMIC 125-150MM
- 0020-83172 GRAPHITE , LINER, CLAMP PLATE, GATE VALVE
- 0020-83227 SPACER, GRAPHITE, EXTRACTION ASSEMBLY, XR80 ONLY
- 0020-83227 SPACER, GRAPHITE, 0020-83227
- 0020-83581 SHIELD GUIDE TUBE, GRAPHITE, SIDE FRONT
- 0020-83582 SHIELD GUIDE TUBE, GRAPHITE, TOP
- 0020-83583 GUIDE, GRAPHITE SHIELD,( TUBE BOTTOM)
- 0020-83786 LC BEAM STOP, GRAPHITE, SHIELDING 1
- 0020-83923 APERTURE, PRE-DEFINING, GRAPHITE
- 0020-83925 10049588 – POST MRS SLIT, 0020-83925
- 0020-83963 BRACKET, GROUND ELECTRODE, 0020-83963
- 0020-83974 MOUNTING, ELECTRODE, SUPPRESSION, 0020-83974
- 0020-84055 SUPPRESSION RING, GRAPHITE, 0020-84055
- 0020-84222 GRIPPER FINGER, LONG, SLOTTED, CONDUCTIVE
- 0020-84522 10045514 MOUNTING GROUND ELECTRODE, 0020-84522
- 0020-84523 SUPPRESSION ELECTRODE, 0020-84523
- 0020-84988 SLIT, PRE MRS, 10049589, 0020-84988
- 0020-85053 GRAPHITE – TOP SHIELD
- 0020-85069 SLIT, PRE-MRS, XR80, GRAPHITE
- 0020-85074 SLEEVE, BLANK, IHC ARC CHAMBER
- 0020-85089 ELECTRODE, SUPPRESSION, EXTRACTION ASSEMBLY, XR80, GRAPHITE
- 0020-85090 ELECTRODE, GROUND, EXTRACTION ASSEMBLY, XR80, GRAPHITE
- 0020-85165 HOLDER, GRAPHITE, PRE DEFINING APERTURE
- 0020-85167 GRIPPER FINGER, SHORT, EXTENDED, NON CONDUCTIVE
- 0020-86731 STRAP FILAMENT
- 0020-86733 90264 – FILAMENT CLAMP – RIGHT HAND
- 0020-86734 FILAMENT CLAMP, LEFT HAND, 90263
- 0020-86737 SOURCE, BASE, LINER
- 0020-86738 10081164 – LINER SIDE, 0020-86738
- 0020-86740 LINER END, ANTI CATHODE, SOURCE, 0020-86740
- 0020-86842 GRAPHITE – COOLED TUBE SHIELD (FOR IHC SOURCE MACHINES)
- 0020-87508 SOURCE, FILAMENT GUIDE, (USED IN 2’S)
- 0020-89586 CATHODE, LINER END, SOURCE, DIA 16, 0020-89586
- 0020-89990 GRAPHITE, ARC CHAMBER
- 0020-98878 LINER, INNER, FLIGHT TUBE, 10044806, 0020-98878
- 0020-98879 INSERT, NEUTRAL, FLIGHT TUBE, 10045339
- 0020-99289 SHAFT, DRIVE , ORIENTATOR ,OUTER
- 0020-99490 COVER, COLUMN, FLIGHT TUBE, XR80 ONLY
- 0020-99710 VANE, MRS, CX2305 (USED IN PAIRS)
- 0021-90020 INSULATOR, PORCELAIN, SM7, 3420-90042
- 0021-90036 RETAINER, HOOK, IHC, 9AP95002, A39180, 0021-90036
- 0040-02238 GRAPHITE, SHIELD, COOLED TUBE, XR80
- 0040-96349 SUPPORT, ARC CHAMBER, UPPER, 0040-96349
- 0040-96352 SUPPORT BAR,CATHODE, TUNGSTEN
- 0040-96830 CATHODE, BUTTON , SOURCE, TUNGSTEN, 3MM, 0040-96830
- 0040-97186 HANDLER, SHOE PICK-UP, 30 DEGREES 3E/EX, 150MM,
- 0040-97539 FIXED RESTRAINT,9500XR WHEEL, 150MM 0 DEG, SI COATED
- 0045-90049 LEADSCREW, INDEXER, 300LG C/W NUT
- 0100-90192 PWBA I to V converter
- 0100-94036 PCB Assembly, PWBA Blade control
- 1080-90047 Motor electric to AM spec
- 1080-90078 Motor, 9500XR, MRS Drive
- 1210-90737 RESISTOR POT, ARM FEEDBACK
- 1350-90008 TRANSDUCER, HP BF3 GAS MODULE, PRESSURE -1 TO 5KG CM2
- 1350-90009 TRANSDUCER, HP BF3 GAS MODULE, PRESSURE 0 TO 2000 KGF/CM2
- 3060-00229 BEARING, 9500Xr Blade Assembly, Blade Guide, OPEN
- 3330-90023 GEAR ORIENTOR, 0.5 30T 3 BORE. (TOOTHED SPROCKET WHEEL)
- 4020-90026 FILTER, CARTRIDGE, DE-IONISING (SCREW THREAD ENDS)
- 4020-90040 SLEEVE, FILTER , 4020-90040
- KIT, REFURBISH, PENNINE, AIM TUBE
- MFC, BF3 5SCCM, GF120, MASS FLOW CONTROLLOR
- REGULATOR, BF3 HIGH PRESSURE, SS TIED DIAPHRAGM
AMAT – ES10
59 parts59 Applied Materials parts covering DPS and Centura platforms, including wafer lift, throttle valve and power assemblies.
- 0010-01032 ASSY, PREFIRE P/S ASP+
- 0010-01246 VME2 ASSY CONTROL MCE
- 0010-01412 ACTURATOR ASSY-SLIT LINER DOOR
- 0010-04489 0010-04487 MxP+ SIMPLE CATHODE, SUP, 200MM, POS B/C (Exclude ESC, HV Module)
- 0010-05257 SACVD DxZ Heater High Temp
- 0010-06121 DPS Metal Assy, Enhanced DTCU
- 0010-06573 0010-06572 ASSY,CATHODE, 200MM REV2, EMAX (Exclude ESC)
- 0010-08185 ASSY, ORIENTER 650NM LASER OPTICS
- 0010-09237 LAMP MODULE BASIC ASSY P5000(Silver type)
- 0010-09823 VESSEL ASSY, SINGLE, H2O VDSII
- 0010-09935 Applied Materials Monochromator Module Assy
- 0010-10106 VDS FACILITY COMPONENTS INTERFACE UNIT
- 0010-10453 LAMP MODULE,1000W DELTA,ASP,MXP CENTURA
- 0010-10970 ASSY,VDS,750 SCCM,CENTURA (Vessel 2nd)
- 0010-13033 M.F. AUXILIARY BOX, CENTURA
- 0010-17221 DPS CATH, 200MM, CESC (DPS Poly Tyep)
- 0010-20000 ASSEMBLY, POWER SUPPLY 15V for Endura5500
- 0010-20317 ASSY 8″ DEGAS LAMP 350C
- 0010-20498 ASSY +/- 15V POWER SUPPLY GEN RACK
- 0010-23726 ASSY WAFER LIFT PIN 200MM DPS CERAMIC ESC
- 0010-26058 ASSY,WAFER,LIFT,ASP+,CENTURAⅡ
- 0010-27241 SLIT LINER DOOR, ASSEMBLY, EMAX 200MM
- 0010-28258 ASSEMBLY, MCE 208VAC DISTRIBUTION DPS CHAMBER
- 0010-30125 DPS Metal Etch R1 DTCU Assy – Basic Repair
- 0010-30134 DPS,CATHODE,200MM,DPS (DPS Metal Type)
- 0010-30135 DPS, METAL, THROTTLE VALVE 5-PHASE, ASSY (Leadscrew Type)
- 0010-30135 DPS, METAL, THROTTLE VALVE 5-PHASE, ASSY (Belt Type)
- 0010-31575 0010-39852 ASSY, SUPER-E CATHODE, 200MM, IS, 5200 (Exclude ESC)
- 0010-35249 ASSY, XFMR ENCLOSURE 208V
- 0010-35511 ASSY PID CONTROLLER R2 CHAMBER CENTURA
- 0010-36202 ASSEMBLY,WAFER PIN (Polyimide ESC Type) – CERAMIC
- 0010-39736 LID ASSY,CLAMP,KALREZ,SLIT LINER DOOR
- 0010-39883 ASSY,THROTTLE VALVE
- 0010-61428, 0010-25415, 0010-03840 SACVD CER HTR ASSY, 200MM PRODUCER
- 0010-70264 HP,HP+ UPGRADE ROBOT DRIVER
- 0010-75226 ASSY, Throttle Valve, 200MM, Etch
- 0010-76277 ASSEMBLY, DISTRIBUTION & FILTERING BOX
- 0010-76800 BASIC INDEXER ASSY, NON-ENP CORROS. RESISTANT
- 0010-93145 ASSEMBLY, POWER SUPPLY 24V for Endura5500 (Same as 0010-20001)
- 0020-34040 – EQUIV Lift Pin Short – MxP+ – CERAMIC non ajustable
- 0021-09105 – EQUIV Lift Pin Adjustable MxP+ – CERAMIC ajustable
- 0021-09625 DPS POLY LOWER CHAMBER BODY – 60 WARRANTY
- 0090-20004 wMOTOR ASSY, INDEXER
- 0100-01321 Digital IO PCB – 0010-01321
- 0100-20100 Analog IO PCB – 0100-20100
- 0190-03358 DC POWER SUPPLY CENTURAII CONT (Same as 0190-25423)
- 0190-06329 JUNCTION BOX ASSY, COMMON CH. AC POWER, ETCH C-II
- 0190-22326 REPAIR – Asp Wafer Lift Control
- 0190-23117 TABLE POSITIONING 3 POS 2″ TRAVEL 10LBS PAYLOAD
- 0190-35076 VME CENTURA DC POWER SUPPLY for Centura-I
- 0190-70060 wMAGNET DRIVE ASSY (Same as 0190-02703)
- 0240-34077 EPD CONTROLLER (exclude Monochromater Module)
- 0242-76372 Wide Body Loadlock Assy(A/B full set)
- 3870-00150 VALVE GATE PNEU-ACTR PENDULUM 200 ISO-F (for EMAX CH)
- 3870-02018 VALVE GATE BODY MECHANISM W/O SOLENOID W/SRV CABLE (For Super-e CH)
- AMAT ETCH 3 200mm ASP+ CH Wafer Lift Assy (Motor type → Cylinder type)
- AMAT ETCH DTCU Hoist (Basic: 2ea 1set / 3ea 1set available)
- AMAT OTHER 4 Upgrade Items:: HP/HP+ Robot Assy → VHP Robot Assy
- AMAT OTHER 2 Centura Buffer Lid Modification(Original → Clear Type)
AMAT – ES60
5 parts5 Applied Materials parts — robot drivers, blower motors and a magnetically coupled rotation assembly.
ES40
1 partA single part: a TEOS susceptor assembly for 200mm.