OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The 3D10-250316-11 (U1) ELECTRODE (With Pin) is a precision-engineered plasma-facing electrode assembly used in Tokyo Electron (TEL) semiconductor equipment to support RF energy transfer, plasma generation, and repeatable wafer processing performance in advanced semiconductor manufacturing environments.
Installed within the process chamber, the electrode serves as a critical electrical interface responsible for delivering RF power into the plasma environment while maintaining controlled electrical characteristics throughout the process cycle. The integrated pin configuration supports electrical connectivity, assembly positioning, and reliable integration with associated chamber hardware.
In semiconductor applications where plasma uniformity, ion distribution, process repeatability, and defect control directly influence yield performance, so maintain electrode integrity. Because electrodes operate under continuous plasma exposure, RF electrical loading, ion bombardment, thermal cycling, and aggressive process chemistries, erosion, surface degradation, contamination buildup, or electrical wear can gradually affect chamber performance.
The 3D10-250316-11 (U1) is designed to provide stable plasma generation and reliable electrical performance under demanding fab production conditions.
The ESCT equivalent part number for this component is ES7099-110, supplied as a 2nd Source NEW OEM-compatible replacement designed to meet form, fit, and functional requirements aligned with the original TEL component.
The 3D10-250316-11 functions as a critical plasma-generation and RF distribution component.
Core functions include:
In many TEL plasma-processing platforms, the electrode operates alongside focus rings, ground rings, ESC assemblies, inner cells, chamber shields, and other plasma-facing consumables to support overall process stability.
The electrode supports controlled plasma generation.
Key performance characteristics include:
Semiconductor process control rests on stable electrical performance.
The integrated pin design supports reliable chamber integration.
Performance attributes may include:
Reliable connectivity helps maintain chamber stability and uptime.
Material integrity directly affects chamber reliability.
Durability characteristics may include:
Surface condition plays a substantial role in contamination control and process consistency.
The 3D10-250316-11 may operate alongside related chamber components including:
Together these components support chamber stability and process repeatability.
The 3D10-250316-11 can directly influence chamber performance and equipment availability.
Potential impacts of wear or degradation include:
Replacing a worn electrode can help restore plasma stability and improve process repeatability.
Continuous plasma exposure gradually affects electrode performance.
Indicators include:
Long-term RF exposure may affect electrical characteristics.
Symptoms may include:
Wear progression may affect contamination control.
Indicators include:
Failure to replace worn electrodes may contribute to increased wear on associated chamber consumables.
To support best performance:
The 3D10-250316-11 (U1) Electrode with Pin is an OEM-referenced TEL component.
Key considerations:
OEM P/N: 3D10-250316-11 (U1) ESCT P/N: ES7099-110 Part Type: 2nd Source NEW OEM: TEL
Maintaining inventory of the ES7099-110 / 3D10-250316-11 can reduce downtime exposure and improve maintenance readiness.
It transfers RF energy into the process chamber to generate and sustain plasma used in semiconductor manufacturing processes.
The electrode directly influences plasma stability, electrical field distribution, process repeatability, and wafer yield.
The pin supports electrical connectivity and proper integration with associated chamber assemblies.
4. What are signs the electrode may need replacement?
Common indicators include:
Yes. Surface degradation can alter plasma behavior and affect process consistency across the wafer.
Yes. Plasma-facing erosion may increase particle generation and defect risks.
Yes. Plasma instability and contamination-related issues can directly impact wafer quality and production yield.
Issues are commonly identified through PM inspections, RF diagnostics, plasma performance monitoring, particle trend analysis, and chamber qualification results.
Yes. Chamber qualification and process verification should be completed after electrode replacement.
Incorrect electrical or dimensional characteristics may affect plasma performance, chamber compatibility, and process outcomes.
No. This product is supplied as ESCT P/N ES7099-110, a 2nd Source NEW OEM-compatible replacement aligned with the original TEL component requirements.
Yes. Chamber configuration, electrical requirements, dimensions, and process compatibility should always be confirmed.
Yes. ESCT supports compatibility verification based on equipment and application requirements.
Depending on availability, associated focus rings, ground rings, shields, inner cells, and other chamber consumables may also be supported.
Because they directly influence plasma formation and chamber performance, tying them to process control, yield, and equipment uptime.
The 3D10-250316-11 (U1) Electrode with Pin is a mission-critical plasma-facing component that supports RF energy distribution, plasma generation, and repeatable semiconductor process performance in TEL systems.
Its condition can directly influence plasma stability, contamination control, equipment uptime, and wafer yield.
Sourcing through ESCT Fab Support as ES7099-110 provides a verified 2nd Source NEW OEM-compatible replacement backed by semiconductor-focused expertise, quality verification, and responsive supply support.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Tokyo Electron part number 3D10-250316-11(U1). It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Tokyo Electron, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
We use cookies We use analytics cookies to see how visitors use this site, so we can improve it. They are set only if you accept. Read our Cookie Policy.
