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ESCT P/N:
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The 2L10-251765-11 RING, FOCUS 360-298.1-T12.1 is a precision-engineered plasma-facing chamber component used in Tokyo Electron (TEL) semiconductor equipment to support plasma confinement, wafer edge conditioning, and process uniformity during advanced semiconductor manufacturing processes.
Installed around the wafer process zone, the focus ring helps shape and stabilize plasma behavior near the wafer perimeter, supporting controlled edge effects, improved process repeatability, and stable chamber operating conditions. In semiconductor applications where plasma distribution directly influences etch profiles, deposition uniformity, critical dimension control, and yield performance, maintain a properly functioning focus ring.
Because focus rings operate under continuous plasma exposure, ion bombardment, thermal cycling, and reactive process chemistries, erosion, dimensional wear, surface degradation, or contamination buildup can contribute to plasma instability, edge non-uniformity, particle generation, and increased maintenance frequency. The 2L10-251765-11 is engineered to support reliable chamber performance under demanding fab production environments.
The ESCT equivalent part number for this component is ES7099-097, supplied as a 2nd Source NEW OEM-compatible replacement designed to meet form, fit, and functional requirements aligned with the original TEL component.
The 2L10-251765-11 functions as a critical plasma-conditioning and chamber-stability component.
Core functions include:
In many TEL process platforms, this focus ring operates alongside ground rings, ESC assemblies, chamber shields, silicon consumables, and other plasma-facing hardware that collectively support process stability and chamber reliability.
The focus ring helps maintain controlled plasma behavior.
Key performance characteristics include:
Stable plasma conditions are critical to maintaining process repeatability and yield.
Material integrity directly affects chamber stability.
Performance attributes may include:
Surface condition directly influences contamination control and process consistency.
The 360-298.1-T12.1 profile supports consistent chamber operation.
Durability characteristics may include:
Mechanical consistency helps preserve chamber qualification and process repeatability.
The 2L10-251765-11 may operate alongside related chamber components including:
Together these components support broader chamber stability and process control.
The 2L10-251765-11 can directly influence chamber performance and equipment availability.
Potential impacts of wear or degradation include:
Replacing a worn focus ring can help restore chamber stability and improve process repeatability.
Continuous plasma exposure may gradually affect ring performance.
Indicators include:
Long-term process exposure may affect ring geometry.
Symptoms may include:
Surface degradation may influence contamination control.
Indicators include:
Wear in the 2L10-251765-11 may also increase stress on adjacent chamber consumables and plasma-facing hardware.
To support best performance:
The 2L10-251765-11 Focus Ring 360-298.1-T12.1 is an OEM-referenced TEL component.
Key considerations:
OEM P/N: 2L10-251765-11 ESCT P/N: ES7099-097 Part Type: 2nd Source NEW OEM: TEL
Maintaining inventory of the ES7099-097 / 2L10-251765-11 can reduce downtime exposure and improve maintenance readiness.
It helps control plasma behavior around the wafer edge, supporting process uniformity, plasma stability, and repeatable chamber performance.
Focus rings influence plasma confinement and edge conditions, which directly affect process repeatability, critical dimensions, and yield.
It identifies a specific focus ring geometry and thickness configuration designed for compatible TEL chamber applications.
4. What are signs the focus ring may need replacement?
Common indicators include:
Yes. Changes in ring geometry or surface condition can alter plasma behavior and impact wafer processing consistency.
Yes. Surface degradation may increase particle generation and contamination risks.
Yes. Plasma instability and contamination-related issues can directly impact wafer quality and production yield.
Issues are commonly identified through PM inspections, chamber qualification results, particle trend analysis, plasma diagnostics, or visual wear assessment.
Yes. Chamber qualification and process verification should be performed after replacement.
Incorrect dimensions or material characteristics may affect plasma behavior, chamber performance, and process outcomes.
No. This product is supplied as ESCT P/N ES7099-097, a 2nd Source NEW OEM-compatible replacement aligned with the original TEL component requirements.
Yes. Chamber configuration, dimensions, and process compatibility should always be confirmed.
Yes. ESCT supports compatibility verification based on equipment and application requirements.
Depending on availability, associated ground rings, focus rings, shields, silicon consumables, and other plasma-facing chamber components may also be supported.
Replacing focus rings before severe erosion occurs helps maintain chamber stability, reduce particle-related defects, and minimize unplanned production interruptions.
The 2L10-251765-11 Focus Ring 360-298.1-T12.1 is a critical plasma-facing chamber consumable supporting plasma confinement, edge uniformity, and repeatable semiconductor process performance in TEL systems.
Its condition can directly influence process stability, contamination control, equipment uptime, and wafer yield.
Sourcing through ESCT Fab Support as ES7099-097 provides a verified 2nd Source NEW OEM-compatible replacement backed by semiconductor-focused expertise, quality verification, and responsive supply support.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Tokyo Electron part number 2L10-251765-11. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Tokyo Electron, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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