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The 716-023013-004(U1) (EDGE RING(385ESC)) is a plasma-facing edge ring used in Lam Research etch equipment. Positioned around the wafer at the electrostatic chuck, it manages the thermal, electrical and geometric environment at the wafer edge, supports etch uniformity into the outermost dies, and protects the chuck surface from plasma exposure. The 385ESC designation ties this variant to its chuck configuration.
Edge rings are consumables in the truest sense: they absorb the plasma exposure the wafer edge and chuck would otherwise see, and they erode doing it. Their condition is process-relevant long before they fail mechanically.
ESCT Fab Support supplies the 716-023013-004(U1) edge ring as a verified 2nd New OEM-compatible consumable for Lam Research etch systems, helping fabs manage consumable cost and availability on current and legacy chambers. Our engineers can confirm the correct variant against your chamber configuration before you order.
It is a plasma-facing edge ring used in Lam Research etch equipment, fitted around the wafer to manage conditions at the wafer edge and protect the electrostatic chuck and surrounding hardware.
It defines the thermal, electrical and geometric environment immediately beyond the wafer edge, keeping etch conditions consistent in the outermost dies and shielding the chuck from plasma exposure.
Yes. It erodes under plasma exposure and is replaced at a scheduled interval or measured wear limit as part of chamber consumable management.
Edge-die yield loss, drift in edge etch rate or profile, visible erosion or surface texturing of the ring, and rising particle counts associated with the wafer edge.
Yes. Ring erosion changes the sheath and thermal environment at the wafer edge, which shows up as etch non-uniformity in the outer zone before any mechanical failure occurs.
It identifies this specific ring variant and fitment configuration in the catalogue. Compatibility should be confirmed against part number 716-023013-004(U1) and your chamber configuration.
Yes. Focus rings, cover rings and the chuck seating surfaces wear in the same environment and are best checked in the same intervention.
Yes. Material, dimensions and configuration should be confirmed against OEM part number 716-023013-004(U1) and your tool configuration before installation.
Yes. ESCT supports form, fit and functional verification aligned with OEM requirements before the part ships.
This product is supplied as a 2nd New OEM-compatible part, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.
The 716-023013-004(U1) (EDGE RING(385ESC)) is a plasma-facing edge ring consumable for Lam Research etch equipment. Its condition directly affects edge etch uniformity, edge-die yield and chuck protection. Sourcing it from ESCT Fab Support gets you verified quality, reduced lead times, and expert technical support, keeping your equipment stable, efficient, and production-ready.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Lam Research part number 716-023013-004(U1). It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Lam Research, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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