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The LAM C2 Hot Edge Ring FLEX45 (OEM P/N 716-040738-120) is a plasma-facing edge confinement consumable installed in the upper electrode/chamber stack region of LAM-style 300 mm capacitively coupled plasma etch chambers. Designated “C2” and run hot, meaning it is operated at an elevated, actively managed temperature rather than at chamber baseline, this ring sits at the outer boundary of the active plasma volume, where it shapes the electric field, confines the discharge and helps terminate the edge of the process region in a controlled, repeatable way.
In a 300 mm etch chamber the difference between a centre-of-wafer result and an edge result is governed almost entirely by the consumable hardware that rings the wafer and the electrode. A hot edge ring of this type manages the radial transition in temperature, electric field and plasma density between the bulk discharge and the grounded or quartz hardware beyond it. Because it runs hot, it is engineered to remain dimensionally and chemically stable at temperatures that would degrade a passive ambient-temperature part, which in turn keeps polymer deposition, etch by-product condensation and field distortion under control near the chamber edge.
As a direct-contact plasma consumable, the C2 hot edge ring wears continuously and is one of the parts that ultimately sets the preventive-maintenance (PM) interval for the chamber. The ESCT replacement (ES2099-003) is manufactured to match the form, fit and function of OEM P/N 716-040738-120 so that engineers can restore edge performance without holding the cost or lead-time exposure of original-branded spares.
The hot edge ring performs several jobs at once at the chamber periphery, all of which influence how the outermost few millimetres of every wafer are processed. Its core functions include:
Because the C2 ring is run hot and sits in continuous contact with the discharge, its material must hold its properties under sustained ion bombardment, reactive halogen chemistry and elevated temperature. The part is built to deliver:
Edge performance is acutely sensitive to geometry. Small deviations in height, flatness or surface finish translate directly into edge etch-rate shifts, so the ring is held to tight manufacturing tolerances:
Because it governs the outer annulus of the wafer, the condition of the hot edge ring is felt directly in edge yield and in the stability of the whole chamber. A worn, cracked or out-of-spec ring drives the following consequences:
The dominant wear mechanism is gradual erosion of the plasma-facing surfaces by ion bombardment and chemical attack. As the ring thins and its profile recedes, the edge plasma boundary moves and edge etch rate drifts, which is why the part is consumable and is replaced on a defined schedule rather than run to destruction.
Running hot and cycling through repeated heat-up and cool-down exposes the ring to thermal stress. Over time this can initiate micro-cracks or, in severe cases, fracture, particularly around contact points and where geometry changes. A cracked ring distorts the local field and becomes an immediate particle source.
Polymer and etch by-product accumulation on or around the ring, together with wear at its seating and contact surfaces, degrades thermal and RF contact and disturbs gas flow at the edge. The result is creeping non-uniformity and reduced wafer-to-wafer repeatability that often signals the ring needs replacing.
Replacement should follow the tool owner’s approved PM procedure and be carried out by trained personnel under proper contamination control. A typical sequence is:
Edge rings are scheduled consumables, so a reliable supply at a sensible cost has a direct effect on cost-of-ownership and tool availability. Sourcing the C2 hot edge ring (ES2099-003) through ESCT Fab Support gives fabs:
“C2” is the position/configuration designation for this specific ring in the chamber ring set, and “hot” indicates that it is operated at a controlled elevated temperature rather than at chamber baseline. Running it hot stabilises edge surface chemistry and suppresses condensation of polymer and etch by-products near the wafer perimeter.
No. This is a second-source, new OEM-compatible part. It is manufactured to match OEM P/N 716-040738-120 to form, fit and function, but it is not an original LAM-branded component and is supplied as a compatible alternative.
Because it physically sits at the boundary of the active plasma region, its condition controls the radial profile of field, temperature and plasma density in the outer annulus of the wafer. Centre-of-wafer results are largely set by other hardware, so the edge ring is the part that most directly governs edge etch uniformity and edge-die yield.
The usual indicators are drifting edge etch uniformity or critical dimensions, rising particle counts at the wafer edge and visible erosion, thinning or cracking on inspection. Most fabs replace the ring on a defined PM interval based on accumulated RF or process hours rather than waiting for failure.
The typical lead time is 4–5 weeks. Because edge rings are scheduled consumables with predictable replacement cadence, planning orders against your PM calendar helps avoid unplanned tool downtime.
As with any edge consumable, the chamber should be conditioned and re-qualified after replacement, running season/conditioning recipes and checking edge uniformity and particle performance before returning to production. Because the part is built to match the OEM geometry, it is intended to drop into the existing recipe baseline.
The LAM C2 Hot Edge Ring FLEX45 (OEM P/N 716-040738-120, ESCT P/N ES2099-003) is a plasma-facing, hot-operated edge confinement consumable that shapes the discharge, smooths the radial field profile and protects higher-value hardware at the chamber periphery of 300 mm etch tools. Because it directly controls edge etch uniformity, critical dimensions and particle performance, so keeping it in spec drives edge-die yield and chamber repeatability. Supplied as a second-source, OEM-compatible part with a 4–5 week lead time, ES2099-003 lets fabs maintain edge performance while controlling spares cost and lead-time exposure.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Lam Research part number 716-040738-120. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Lam Research, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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