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The Pinned Adjustable Lifter Collar, supplied under LAM OEM part number 715-032760-008 and ESCT part number ES2022-130, is a precision mechanical clamping component used within the wafer lift assembly of LAM Research 8″ (200 mm) photoresist strip and ash chambers. The collar locks onto the lifter shaft that drives the wafer lift-pin plate, fixing the vertical datum of the pin travel and securing it against rotation. Its “pinned” design uses a dowel or roll pin to key the collar to the shaft, while the “adjustable” feature allows the set height to be trimmed and locked during build or service so that lift-pin protrusion and retraction are repeatable across thousands of wafer cycles.
In a LAM strip platform, the wafer sits on a heated lower electrode or chuck while reactive oxygen-based plasma removes photoresist and post-etch residue. After processing, the lift mechanism raises the wafer clear of the chuck so the transfer end-effector can collect it. The lifter collar sits on the actuator side of this mechanism, typically at the base of the lift shaft below the chamber, where it transfers the axial motion of the actuator to the pin carrier while holding a fixed, calibrated reference position. A collar that has slipped, worn, or been incorrectly set will throw off the entire pin-height envelope, with direct consequences for wafer handoff reliability.
Although it is a small, unglamorous machined part, the adjustable lifter collar is one of those components whose precise condition disproportionately affects tool uptime. Because it defines a mechanical hard reference rather than relying solely on software-set actuator endpoints, its integrity underpins consistent, damage-free wafer presentation cycle after cycle.
The collar performs a deceptively simple but critical set of mechanical duties within the lift sub-assembly, bridging the actuator and the lift-pin carrier on the 8″ strip chamber:
The collar is typically machined from stainless steel or anodised aluminium to balance strength, corrosion resistance and low particle shedding. Its clamping interface, a split bore, pinch screw, or pinned-and-set-screw arrangement, must grip the shaft tightly enough to resist axial slip yet allow controlled adjustment during service.
Because the collar fixes a datum used across every cycle, dimensional stability and a square, concentric bore both matter. The keying pin removes rotational freedom so that, once set, the geometry of the pin travel does not wander.
Though it never contacts the wafer directly, the lifter collar governs the accuracy and reliability of wafer handoff, which in turn affects throughput, defectivity and the avoidance of costly breakage events:
The most common failure is gradual axial slip. Repeated lift loading, vibration and thermal cycling can relax the clamping force, allowing the collar to creep along the shaft. The result is a slow drift in pin height that eventually exceeds the transfer window and triggers handoff faults.
The keying dowel or roll pin and its mating hole wear over time, introducing rotational play. A worn pin allows the collar to twist slightly, which both shifts the datum and accelerates fretting at the bore interface, producing fine metallic particulate that can migrate within the assembly.
Exposure to reactive process by-products and elevated temperatures can corrode the collar or seize its set screw, while over-torquing during prior service can gall the bore. A stripped or seized fastener prevents reliable re-setting and is a frequent reason for replacing the collar outright rather than re-using it.
Replacement should be carried out by a qualified technician with the chamber isolated, vented and the actuator de-energised, following LAM service procedures and your site safety protocols. The following sequence outlines the typical approach:
Because the lifter collar is inexpensive relative to the cost of a dropped wafer or unplanned downtime, holding a qualified spare is sound preventive-maintenance practice. ESCT Fab Support offers this component with the sourcing advantages fabs need:
It clamps onto the wafer lift shaft in a LAM 8″ strip chamber and fixes the calibrated vertical datum for the lift pins. The pinned, adjustable design keys it against rotation and lets a technician set and lock the precise pin-height envelope used for wafer handoff.
No. This is supplied as a new, OEM-compatible part verified to match the form, fit and function of LAM P/N 715-032760-008. It is not an original LAM-branded OEM component, but it is intended as a direct functional equivalent.
It is designed for the wafer lift assembly of LAM Research 8″ (200 mm) photoresist strip and ash chambers that specify OEM P/N 715-032760-008. Always confirm the part number against your tool’s bill of materials before ordering.
The current lead time is approximately 5 weeks. We recommend ordering a spare ahead of need so it is on the shelf for your next scheduled maintenance window.
Signs include recurring wafer handoff or transfer faults, drifting pin-height readings, rotational play in the collar, visible bore wear or galling, and a seized or stripped set screw. Any of these warrants inspection and likely replacement.
Re-use is generally discouraged. Once the clamp interface or keying pin has worn, the collar may no longer hold its datum reliably, and re-torquing a previously galled bore risks slip. Fitting a fresh unit restores predictable performance for the cost of a low-value part.
The Pinned Adjustable Lifter Collar (LAM OEM P/N 715-032760-008, ESCT P/N ES2022-130) is a small but central mechanical component in the wafer lift assembly of LAM 8″ photoresist strip systems. By clamping the lift shaft, keying against rotation and holding an adjustable, locked datum, it gives repeatable lift-pin travel and reliable, damage-free wafer handoff. Wear, slip or fastener failure quickly translates into transfer faults and breakage risk, making a qualified spare a smart, low-cost insurance against downtime. ESCT Fab Support delivers this part verified to OEM form, fit and function on a 5-week lead time.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Lam Research part number 715-032760-008. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Lam Research, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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