OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Wide Body Loadlock Assembly is the pressure-isolating chamber that allows wafers to pass between the atmospheric front end of an Applied Materials (AMAT) etch or CVD tool and the high-vacuum transfer module without ever venting the process chambers. Supplied here as a complete A/B full set, this listing covers both loadlock positions, the “wide body” variant denoting the larger-volume chamber casting used on platforms that require faster pump and vent cycling or wider wafer-handling clearance. Each loadlock acts as an airlock: it accepts a wafer or cassette from the factory interface at atmospheric pressure, seals, pumps down to the transfer chamber base pressure, and then opens its inner slit valve so the central robot can collect the wafer.
Mechanically, a wide body loadlock is far more than a hollow box. The assembly integrates the chamber body itself, atmospheric and vacuum-side slit-valve interfaces, O-ring sealing surfaces, pump and vent porting, and the mounting features that carry slit-valve actuators, wafer-position sensors and pressure switches. Because the two loadlocks alternate duty, an A/B set keeps both transfer paths balanced, which sustains wafer throughput on a busy production tool.
As a vacuum boundary that cycles between atmosphere and high vacuum many thousands of times, the loadlock is one of the hardest-worked sealing assemblies in the tool. Its condition directly governs pump-down time, particle generation and the integrity of the vacuum environment the central handler relies upon, making a known-good replacement set a high-value spare for any fab running AMAT equipment.
The loadlock sits at the junction between the equipment front-end module and the vacuum transfer chamber, bridging two worlds that must never meet directly. On a wide body variant the larger internal volume supports faster cassette or single-wafer staging while preserving a clean, repeatable vacuum transition. Within the platform the assembly performs several distinct duties:
The defining performance metric of a loadlock is its ability to hold a leak-tight seal cycle after cycle. The chamber body is typically a precision-machined aluminium casting with finished O-ring grooves on the lid, slit-valve and port interfaces. Surface flatness, groove geometry and the condition of the sealing faces determine whether the lock can reach transfer-chamber base pressure within its specified pump-down window.
Because each lock pumps and vents on every wafer exchange, the assembly must tolerate repeated thermal and pressure cycling without distortion, fastener relaxation or sealing-face wear. Smooth, contaminant-free internal surfaces minimise particle shedding and turbulence during venting, both of which can carry defects onto the wafer.
A degraded loadlock rarely fails outright; instead it slows and contaminates the tool in ways that erode both throughput and yield. Restoring a sound A/B set returns the transfer cycle to its designed behaviour:
The most frequent issue is loss of vacuum integrity. Worn or compressed O-rings, scored or pitted sealing faces, or distortion of the casting around the lid and slit-valve interfaces allow leaks that prevent the lock from reaching base pressure or extend pump-down beyond its specified window.
Repeated valve actuation and venting wear the slit-valve sealing surfaces and can polish or damage internal finishes, leading to elevated particle counts. Debris settling on sealing faces also accelerates leakage and can foul wafer-position sensing.
Years of pressure cycling and thermal movement can relax fasteners, fatigue mounting features and subtly distort the chamber body. This misaligns actuators and sensors, causes intermittent interlock faults and undermines the repeatability the central handler depends upon.
Replacing a loadlock set is a vacuum-system task that must be carried out by qualified personnel following the relevant AMAT service documentation for the specific platform. The outline below describes the typical sequence:
Loadlock assemblies are throughput-critical and long-lead items, so holding a qualified spare set protects against extended tool downtime. ESCT Fab Support helps fabs manage that risk:
It means the listing supplies both loadlock positions, A and B, as a matched pair. AMAT tools commonly run two loadlocks that alternate duty so one can pump down while the other transfers, and a full set keeps both transfer paths balanced and available.
No. This assembly is supplied as a new, OEM-compatible part. It is verified to the form, fit and function of AMAT OEM P/N 0242-76372 but is not an original Applied Materials branded item and is not sold as one.
The wide body variant uses a larger-volume chamber casting than the standard loadlock. This supports the wider handling clearance and pump and vent cycling required on certain AMAT platform configurations, so it must be matched to the tool that originally specified it.
Match the AMAT OEM part number 0242-76372 and the ESCT reference ES1044-001 against your tool documentation and existing installed hardware. Our team can assist with identification and platform fitment if you provide your tool model and configuration.
The typical lead time for this loadlock set is eight weeks. We recommend planning replacement around scheduled maintenance and holding a qualified spare given the throughput-critical role of the loadlock.
Yes. After installation each lock should be leak-checked, verified for pump-down to base pressure within the specified time, and put through particle and transfer-cycle qualification before the tool returns to production, in line with the relevant AMAT service procedures.
The Wide Body Loadlock Assembly (AMAT OEM P/N 0242-76372, ESCT P/N ES1044-001) is the vacuum airlock that lets wafers cross between atmosphere and the high-vacuum transfer chamber of AMAT etch and CVD tools without breaking process vacuum. Supplied as a complete A/B full set, it restores leak-tight sealing, repeatable pump-down and low-particle wafer staging across both loadlock positions. Because loadlock condition directly governs throughput, vacuum integrity and yield, a verified replacement set is a sound investment for any fab seeking to minimise downtime and avoid sole-source OEM lead times.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0242-76372. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
We use cookies We use analytics cookies to see how visitors use this site, so we can improve it. They are set only if you accept. Read our Cookie Policy.
