0010-09823
VESSEL ASSY, SINGLE, H2O VDSII

0010-09823 Vessel: VDS-II single H2O vessel assembly (water vapor delivery)

Precision vapor generation for advanced oxidation processes

The 0010-09823 VESSEL ASSY, SINGLE, H2O VDSII is a high-precision fluid containment and vaporization module engineered for Applied Materials (AMAT) semiconductor processing systems. Specifically designed for the VDS-II (Vapor Delivery System II) architecture, this vessel assembly is the critical heart of “wet” process applications, including In-Situ Steam Generation (ISSG), Wet Rapid Thermal Oxidation (Wet RTO), and various annealing steps requiring ultra-pure water vapor. In semiconductor fabrication, the quality of the oxide layer is non-negotiable. Whether growing a gate oxide, a liner oxide, or performing a sacrificial oxidation, the stoichiometry and uniformity of the film depend entirely on the stability of the steam delivery. The 0010-09823 keeps Ultra-Pure Water (UPW) contained, monitored, and delivered to the vaporizer unit with absolute consistency, free from metallic or particulate contamination.

AMAT 0010-09823 vessel technical architecture and VDS-II integration

The VDS-II represents a substantial evolution in vapor delivery technology over legacy bubbler systems. The 0010-09823 Single Vessel Assembly is designed to meet these advanced specifications.

1. 0010-09823 Vessel material purity and chemical resistance

The vessel is constructed from high-grade, electropolished 316L Stainless Steel (or specific chemically inert alloys depending on the exact revision). This material choice is central for two reasons:

• Corrosion Resistance: Even ultra-pure water becomes aggressive at elevated temperatures or when interacting with process gases. The passivated surface prevents ionic leaching that could poison the wafer lattice.
• Surface Finish: The electropolished interior minimizes surface area and eliminates microscopic crevices where bacteria or particles could accumulate, which protects the integrity of the UPW supply.

2. Integrated level sensing capability

The 0010-09823 assembly typically includes ports and interfaces for high-precision capacitive or optical level sensors such as the 3D10-250281-11. The VDS-II logic cannot function without accurate liquid level monitoring.

• Refill Logic: The system must know exactly when to trigger the refill cycle from the bulk UPW supply without interrupting the process flow.
• Safety Interlocks: If the liquid level drops too low (running dry) or too high (flooding the gas lines), the vessel assembly acts as the physical control point to trigger system EMO (Emergency Off) or process interrupts, protecting downstream mass flow controllers (MFCs) and the process chamber.

3. Thermal stability design

While the vaporization often happens in a separate downstream unit (the vaporizer), the vessel itself acts as a temperature-stabilised reservoir. It is designed to interface with heater jackets or temperature control units such as the 0020-83227 to maintain the UPW reservoir at a stable operating temperature, giving a smooth flow rate into the vaporization injector.

Role of the 0010-09823 vessel in oxidation processes

To appreciate the importance of the 0010-09823, it is necessary to understand the physics of the process it supports.

In-situ steam generation (ISSG)

In ISSG processes (often found on Centura or Vantage Radiance RTP chambers), hydrogen and oxygen are reacted at low pressure on the hot wafer surface. However, many recipes use a direct steam delivery or catalytic steam generation where the water source is critical. The 0010-09823 holds the fuel (H2O) for these reactions.

• Growth Rate Control: Stable water delivery is also required to maintain process control within RTP subsystems and associated electronics such as the 1D10-310019-M3. A fluctuating water supply from a faulty vessel assembly leads to varying oxide thicknesses across the wafer (within-wafer non-uniformity) and from wafer to wafer.
• Interface Quality: High-quality steam generation reduces interface trap density ($D_{it}$), resulting in higher performance transistors with better mobility and reliability.

Common failure modes in 0010-09823 vessel and related parts

The water delivery system is often the most maintenance-intensive subsystem in an RTP or CVD tool due to the nature of handling liquids in a vacuum/gas environment.

1. Contamination and bio-film build-up

Even with UPW, stagnant zones can lead to bacterial growth or silica residue build-up over years of operation.

• Symptom: Particle excursions on the wafer or “haze” defects seen during surface inspection.
• Diagnosis: If flushing the lines does not resolve particle counts, the interior surface of the 0010-09823 vessel may be compromised or fouled, requiring replacement.

2. Leak integrity issues

The vessel operates under specific pressure conditions. The O-ring seals, VCR fittings, and top-plate sealing components such as the 0100-90025 are subject to repeated thermal cycling.

• Symptom: The system fails leak checks (helium leak detection) or struggles to maintain base pressure in the delivery line.
• Risk: A leak in the VDS is catastrophic. It can allow ambient air into the process (ruining the oxide) or allow hydrogen to escape (a major safety hazard).

3. Sensor float/probe stiction

If the assembly uses internal mechanical floats or specific probes, mineral deposits or mechanical wear can cause them to stick.

• Symptom: “VDS Level High” or “VDS Level Low” alarms that do not match the actual fluid level. This halts production immediately.

Installation and maintenance best practices for 0010-09823 vessel

Replacing the 0010-09823 is a critical maintenance task that requires strict adherence to safety and cleanliness protocols.

• De-Ionized (DI) Water Safety: Confirm the UPW lines are fully isolated and drained before removal. Although water is not toxic, the system pressure and potential for residual heat pose risks.
• Leak Testing is Mandatory: After installing the new vessel, a full Helium Leak Check of all VCR connections, seals, and associated fittings such as the 716-069688-005 is non-negotiable.
• Priming the System: Once installed, the vessel must be flushed and primed to remove any trapped air bubbles in the delivery lines. Air bubbles trapped within delivery tubing or connectors such as the 716-040738-120 can cause sputtering in the vaporizer and lead to wafer defects

Why choose ESCT Fab Support for 0010-09823 sales and parts

When your VDS-II system goes down, you cannot wait weeks for an OEM replacement. ESCT Fab Support provides a reliable supply chain solution.

• Cleanroom Compliant: Our 0010-09823 assemblies are handled, inspected, and packaged in a cleanroom environment so they arrive at your dock free of organic or metallic contaminants.
• Technical Knowledge: We don’t just sell part numbers; we understand the fluid dynamics of the VDS-II system.
• Inventory Availability: We aim to stock critical wet-side spares to minimize your Mean Time To Repair (MTTR).

Frequently asked questions

1. What is the difference between VDS-I and VDS-II?

VDS-I (legacy) often used a bubbling system where a carrier gas (like N2 or He) was bubbled through heated water. VDS-II typically uses a direct liquid injection or more advanced vaporization technique. The amat 0010-09823 vessel is specifically designed for the VDS-II architecture, meaning it is built to handle the specific pressures and flow rates of modern equipment chamber environments. These systems are not interchangeable due to differences in chamber design and process requirements.

2. Does this assembly come with the level sensors included?

The part number 0010-09823 generally refers to the mechanical vessel assembly itself (the tank, ports, and structural housing). Level sensors (capacitive or optical) are often separate line items and considered additional spare parts that mount onto this vessel. These sensors are part of a broader set of chamber parts required for full VDS-II functionality.

3. Can I use this vessel for chemicals other than H2O?

No. This vessel is specifically engineered and designated for Ultra-Pure Water (H2O). The internal materials spare components, including seals and surface treatments, are selected specifically for water compatibility. Using other chemicals can damage these materials spare elements and compromise the integrity of the system.

4. How often should the H2O vessel be replaced?

There is no fixed “hour meter” for the static vessel, but it is recommended to inspect it during major annual PMs. If the system shows contamination or performance issues, replacing the vessel and related spare parts within the equipment chamber assembly is recommended to maintain process stability.

5. Is this part compatible with 300mm tools?

The amat-applied materials 0010-09823 vessel is most commonly found on 200mm (Centura/Endura) and some 300mm (Producer/Vantage) platforms using the VDS-II system. Compatibility depends on the specific gas box and chamber parts configuration of your tool.

6. Why is there a “single” designation in the name?

“Single” typically refers to the configuration of the ampoule/vessel within the VDS cabinet. Some high-throughput systems use dual-vessel setups for continuous processing. In these cases, the amat 0010-09823 is used as an individual unit within a larger system of chamber parts and supporting spare parts.

7. What O-rings should I use when installing this?

You must use OEM-specified O-ring materials such as Viton or Kalrez equivalents. These are critical materials spare components within the system. Using incorrect materials can introduce contamination into the equipment chamber and compromise process integrity across amat-applied materials platforms.

Related parts

• 0010-10970, ASSY, VDS, 750 SCCM, CENTURA (Vessel 2nd)
• 0020-82832, Graphite, 9AP95002 Beamstop, Single Position

Disclaimer: This part is supplied by ESCT Fab Support as an OEM-compatible replacement component, verified to the form, fit and function of Applied Materials part number 0010-09823. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.