0021-09625
DPS POLY LOWER CHAMBER BODY - 60 WARRANTY

0021-09625 DPS Poly lower chamber body for Applied Materials etch systems

The 0021-09625 DPS Poly Lower Chamber Body is the structural lower section of the process chamber on Applied Materials DPS polysilicon etch systems. It forms the vacuum vessel around the process region: carrying sealing surfaces and ports, locating the chuck and internal hardware, and providing the envelope inside which the etch process runs.

Functional role in the chamber

• Vacuum envelope forms the lower structural boundary of the process vacuum.
• Sealing and ports carries the sealing faces and ports the chamber’s subsystems connect through.
• Hardware location, precisely locates the chuck assembly, liners and internal components.
• Process environment its internal surfaces participate in chamber conditioning and cleanliness.

Condition indicators

• Vacuum leaks traced to body seals or feedthrough ports.
• Corrosion, erosion or coating degradation on internal surfaces.
• Damaged sealing faces, threads or ports found at maintenance.
• Persistent particle or contamination excursions after standard cleans.

Maintenance and replacement best practices

• Protect sealing faces during any chamber-open maintenance.
• Assess internal surface condition at major cleans; plan refurbishment before leaks force it.
• On replacement, verify seal integrity, leak-tightness and alignment of internal hardware before requalification.

Why source the 0021-09625 from ESCT Fab Support

ESCT Fab Support supplies the 0021-09625 as a verified 2nd New OEM-compatible chamber body for Applied Materials DPS etch systems, supporting major chamber refurbishment on legacy tools without OEM lead times.

Frequently asked questions

What is the 0021-09625 DPS Poly lower chamber body?

It is the lower chamber body for Applied Materials DPS polysilicon etch chambers, the structural vessel section that forms the lower half of the process chamber.

What does the lower chamber body do?

It provides the chamber’s structural and vacuum envelope, carries sealing surfaces and ports, and locates internal hardware such as the chuck assembly and liners.

Is this a wear part?

It is a long-life structural component, but sealing surfaces, coatings and internal surfaces degrade with accumulated process exposure and cleaning cycles, eventually justifying refurbishment or replacement.

What are signs of chamber body problems?

Persistent vacuum leaks at body seals, corrosion or erosion of internal surfaces, damaged sealing faces or ports, and particle or contamination issues that survive normal cleans.

Can its condition affect the process?

Yes. Vacuum integrity, chamber conditioning behaviour and particle performance all depend on the body’s surfaces and seals being in good condition.

Is compatibility verification important before ordering?

Yes. Configuration and fitment should be confirmed against OEM part number 0021-09625 and your tool configuration before installation.

Can ESCT verify compatibility before shipment?

Yes. ESCT supports form, fit and functional verification aligned with OEM requirements before the part ships.

Is this an original OEM part?

This product is supplied as a 2nd New OEM-compatible part, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.

Summary

The 0021-09625 DPS Poly Lower Chamber Body is the structural and vacuum foundation of the DPS polysilicon etch chamber. Its seals and surfaces underpin vacuum integrity, cleanliness and process stability. Sourcing it from ESCT Fab Support gets you verified quality, reduced lead times, and expert technical support, keeping your equipment stable, efficient, and production-ready.

Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0021-09625. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.

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