OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Throttle Valve Assembly carrying Applied Materials part number 0010-75226 is the pressure-control element that sits in the foreline path between a 200 mm etch process chamber and its vacuum pumping stack. In an AMAT etch platform the throttle valve is the actuator the chamber relies on to hold a stable, repeatable process pressure while gas flows, plasma power and pumping speed all change during a recipe. It is not a simple on/off isolation valve; it is a modulating assembly whose pendulum or butterfly plate is driven continuously by a controller to throttle conductance between the chamber and the turbomolecular or dry pump.
Physically the assembly comprises the valve body and flange that bolt into the chamber-to-pump duct, the moving plate that occludes the bore, a stepper or servo drive and gear train, position feedback hardware, and the seals and bearings that allow the plate to rotate under high vacuum without leaking to atmosphere. Because it lives directly in the etch effluent stream, the valve is exposed to process by-products, polymer deposition and corrosive halogen chemistries, which is precisely why it is one of the more service-intensive mechanical assemblies on a 200 mm etch tool.
When the throttle valve drifts, sticks or loses calibration, the chamber can no longer servo to its pressure set-point cleanly, and etch rate, profile and uniformity all suffer. A correctly functioning, properly calibrated throttle valve assembly is therefore central to keeping a legacy 200 mm etch chamber inside its process window.
The throttle valve is the final control element in the closed-loop pressure system of a 200 mm etch chamber. A capacitance manometer reports chamber pressure, the controller compares it against the recipe set-point, and the valve plate is repositioned to adjust pumping conductance until error is driven to zero. Its core responsibilities include the following.
The valve plate, its shaft bearings and the gear or belt drive define how smoothly and repeatably the assembly can position itself. Performance depends on low-friction, low-particle bearings, a backlash-free drive train and a plate that seats consistently against its stop. Key mechanical characteristics include the following.
The assembly must hold the vacuum boundary while still allowing the plate to move. Shaft seals, body O-rings and the flange faces all contribute to leak-tight operation. Sealing performance is judged on the following.
Because the throttle valve sets chamber pressure, its condition propagates directly into etch results. A degraded valve undermines the process window in ways that are often mistaken for chemistry or hardware faults elsewhere.
Polymer and etch by-product accumulating on the plate, bore and seal area increases friction and changes effective conductance. Over time this causes the plate to bind, hunt or fail to reach commanded positions, and is the most common reason a 200 mm etch throttle valve is pulled for service.
Wear or contamination in the position sensor and drive train causes the reported plate angle to diverge from true conductance. The controller then servos to the wrong aperture, producing pressure error, set-point offsets and intermittent control faults that recur until the valve is recalibrated or rebuilt.
The dynamic shaft seal and shaft bearings degrade with cycling and chemical attack. This shows up as a rising leak rate, increased drive torque, audible roughness or particle generation, all of which compromise both vacuum integrity and clean operation.
Replacement should follow Applied Materials service procedures for the specific 200 mm etch platform and be carried out by trained personnel observing lock-out/tag-out and vacuum-safety practice. A typical sequence is outlined below.
Throttle valves are wear-driven assemblies, so fabs running legacy 200 mm etch tools benefit from holding a serviceable spare against the day a valve sticks or drifts out of calibration. ESCT Fab Support helps maintain uptime on ageing platforms where OEM lead times and pricing can be prohibitive.
It is the modulating pressure-control valve between a 200 mm etch chamber and its vacuum pump. By rotating its plate to throttle pumping conductance, it lets the chamber controller hold the recipe pressure set-point accurately throughout each process step.
No. This item is supplied as a refurbished, reconditioned assembly that is cross-referenced to AMAT OEM part number 0010-75226 and verified to form, fit and function. It is not an original OEM part and is not sold as new factory stock.
The current lead time is approximately four weeks. We recommend ordering ahead of need so a calibrated spare is on the shelf before your installed valve drifts or sticks.
Symptoms such as pressure overshoot, set-point offsets, control hunting, position-feedback faults or a rising leak rate frequently point to throttle-valve deposition, calibration drift or seal wear. Confirming against manometer and controller logs helps distinguish the valve from other elements of the pressure loop.
Yes. After mechanical installation and leak-checking, the valve home and calibration routine must be run so that reported plate position maps correctly to conductance, and closed-loop pressure control should be verified before production resumes.
Regular chamber and foreline cleaning, scheduled valve inspection and timely seal service all slow deposition build-up and bearing wear, helping the assembly hold calibration and reducing the risk of an unplanned sticking failure.
The Throttle Valve Assembly (AMAT 0010-75226, ESCT ES1011-014) is the closed-loop pressure-control actuator for 200 mm Applied Materials etch chambers, modulating conductance between chamber and pump to hold recipe pressure with the precision that etch rate, profile and uniformity demand. As a wetted, cycling mechanical assembly it is prone to deposition-driven sticking, calibration drift and seal or bearing wear, making a verified refurbished spare a sensible stock item for legacy 200 mm etch fleets. Supplied with a four-week lead time and checked to form, fit and function, this assembly helps fabs restore stable pressure control and protect yield on ageing tools.
Disclaimer: This part is supplied by ESCT Fab Support as a reconditioned, OEM-compatible component, verified to the form, fit and function of Applied Materials part number 0010-75226. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
We use cookies We use analytics cookies to see how visitors use this site, so we can improve it. They are set only if you accept. Read our Cookie Policy.
