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The 8" Degas Lamp Assembly, rated to 350°C, is the radiant heating module that sits at the heart of the degas (outgas) chamber on Applied Materials 200mm platforms. Built around an array of high-intensity infrared lamps mounted to an 8-inch wafer-format frame, the assembly delivers fast, controllable thermal energy directly to the back or front of the wafer to drive off adsorbed moisture, organic residues and trapped process gases before the substrate moves on to a deposition or etch step. The 350°C designation reflects the controlled set-point band at which the degas operation typically runs, hot enough to liberate volatile contaminants, yet bounded to protect temperature-sensitive films and the underlying device structures.
Within the tool, the degas lamp assembly is one of the most thermally and electrically stressed serviceable components in the transfer sequence. It cycles from ambient to several hundred degrees and back on every wafer, under vacuum, with its emitted radiation feeding into closed-loop temperature control. Because degas quality directly determines how clean and dry a wafer is when it reaches the next chamber, the condition of this assembly has an outsized influence on film adhesion, contact resistance and overall defect performance, far beyond what its modest physical size would suggest.
ESCT Fab Support supplies this assembly under P/N ES1044-015 as a form-, fit- and function-matched alternative to AMAT OEM P/N 0010-20317, giving fabs and refurbishers a dependable source for a wear-prone heating module without the cost and lead-time exposure of single-source OEM procurement.
The degas step is a preparatory thermal treatment carried out in a dedicated vacuum chamber, usually on the transfer or buffer side of a cluster tool. The lamp assembly is the energy source for that step. Rather than relying on a heated pedestal alone, the radiant lamp design allows rapid ramp rates and short residence times, which keeps throughput high while still achieving the required outgassing. Its core responsibilities include:
As a radiant heating assembly, the unit must perform faithfully across two coupled domains at once: the electrical path that powers the lamps and the thermal output those lamps produce. Its value lies in keeping both stable through tens of thousands of heat cycles.
The infrared lamps and their reflector geometry are arranged to project an even radiant field onto the wafer. Consistent emission and clean reflective surfaces keep the across-wafer temperature spread tight, which is what makes a 350°C set-point translate into a repeatable degas result rather than a hot-spotted, partially outgassed surface.
Power is fed to the lamp assembly through terminals and leads that must carry substantial current while withstanding the heat radiating back from the lamps. Sound terminations and intact insulation keep resistance low and prevent localised heating that would otherwise shorten lamp life or trip protection circuits.
Because degas is a gatekeeping step, the health of this lamp assembly propagates through everything that follows it in the cluster. A weak, uneven or unstable lamp bank quietly erodes yield long before it fails outright:
Infrared lamps have a finite filament life, and the constant heat cycling characteristic of degas accelerates ageing. Filaments thin, output drifts downward, and individual lamps eventually open-circuit. Even before a hard failure, gradual emission decay extends ramp times and can leave the wafer short of the intended 350°C band.
Repeated thermal expansion and contraction works terminals and crimps loose over time. The resulting increase in contact resistance generates extra heat at the joint, which discolours and embrittles insulation, can scorch leads and may trip the lamp driver's protection or cause erratic power delivery.
Outgassed species, process by-products and handling residues accumulate on reflective surfaces and any lamp window over many cycles. As these surfaces cloud or stain, radiant efficiency drops and the heat field becomes uneven, so the controller drives the lamps harder to compensate, further shortening their life.
Replacement should be carried out by a qualified technician following the relevant Applied Materials service procedure for the specific platform and degas chamber configuration. The sequence below is a general guide and does not replace the OEM documentation or your site's safety protocols.
Degas lamp assemblies are consumable-grade hardware: they will wear out on a predictable cadence, and holding a spare turns an emergency into a routine swap. Sourcing through ESCT Fab Support gives engineering and procurement teams a practical alternative to relying solely on the OEM supply chain.
It is the radiant heat source in the degas chamber. Its infrared lamps heat the 200mm wafer toward a nominal 350°C set-point to drive off adsorbed moisture, solvents and trapped gases, preparing the surface for clean, well-adhered film growth in the downstream chamber.
No. This is not an original Applied Materials part. It is supplied as a new, OEM-compatible assembly under ESCT P/N ES1044-015, verified to the form, fit and function of AMAT OEM P/N 0010-20317. It is intended as a direct replacement for that reference.
It denotes the controlled temperature band associated with the degas operation this assembly serves. The lamps are capable of driving the wafer to that range while the tool's closed-loop control holds the set-point, balancing effective outgassing against protection of temperature-sensitive films.
Typical indicators include longer ramp times, inability to reach or hold the degas set-point, temperature non-uniformity, lamp-current or lamp-fault alarms, and downstream symptoms such as poor film adhesion. Visible lamp discolouration or a failed lamp in the array is a clear signal.
The current lead time for ES1044-015 is approximately 4 weeks. For planned maintenance we recommend holding a spare on the shelf so the unit is available immediately when degas performance begins to drift.
Yes. Provide your platform and degas chamber details along with the OEM reference, and our technical team can help confirm that ES1044-015 is the correct match for your configuration before you order.
The 8" Degas Lamp Assembly, 350°C (AMAT OEM P/N 0010-20317), is the radiant heating module that performs the critical pre-process degas step on Applied Materials 200mm platforms. By driving moisture and adsorbed gases off the wafer under controlled, uniform heat, it directly underwrites film adhesion, interface quality and defect performance downstream. As a heat-cycled consumable, it is subject to lamp burnout, connection degradation and reflector contamination, making it a sensible item to hold as a spare. Supplied by ESCT Fab Support as ES1044-015, it offers a form-, fit- and function-matched, cost-effective alternative to single-source OEM procurement with a roughly 4-week lead time.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0010-20317. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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