Every Tokyo Electron part ESCT Fab Support currently lists, with OEM and ESCT part numbers. Parts are supplied new and OEM-compatible from second sources; rows marked Repair can also be repaired or exchanged.
233 parts in this catalogue. If the part you need is not listed, get in touch with the OEM part number and we will source it through our supplier network.
| Part | OEM P/N | ESCT P/N | Service |
|---|---|---|---|
| (C2)CEL, OUTER(TE-349-LABY-GND FLAT) | 3D10-202375-21 | ES7099-010 | — |
| (C2)CEL,INNER(PH-MG)V2 | 2L10-250820-11 | ES7099-015 | — |
| (C2)CEL,INNER(SH-OX1.75) | 3D10-250316-11 | ES7099-012 | — |
| (C2)CEL,OUTER,SH-OX,RP470-02 | 3D10-250317-21 | ES7099-013 | — |
| (C2)FOCUS RING,AD360-3.4-298.1 | 3D10-250318-11 | ES7099-014 | — |
| (C2)SI FOCUS RING(2.6T) | 3D10-201448-21K1 | ES7099-011 | — |
| (C2)SILICON CEL INNER(TE-T10-P-LABY) | 3D10-202364-12 | ES7099-009 | — |
| (SI-SHIN)RING PROTECTION(TE-RP470) | 3D10-350067-11 | ES7099-068 | — |
| (SI-SHIN)RING PROTECTION(TE-RP470) | 3D10-350067-11 | ES7099-066 | — |
| (SI-SHIN)RING PROTECTION(TE-RP470) | 3D10-350067-11 | ES7099-053 | — |
| (SI-SHIN)RING PROTECTION(TE-RP470) | 3D10-350067-11 | ES7099-043 | — |
| 12"FOCUS RING 8.55T(NEST) | 3D10-350401-11 | ES7099-204 | — |
| 3D10-250576-21 RING FOCUS 8/MIN/CL for Lam Research Systems | 3D10-250576-21 | ES7099-007 | — |
| ADDWORK,RING-FOCUS 360-315-5.5 | 2L02-250063-11 | ES7099-228 | — |
| CATHODE,SI,777H,5T | — | ES7099-027 | — |
| CATHODE,SI,777H,6T | 1810-225148-11(U2) | ES7099-034 | — |
| CEL | 3D10-250871-11 | ES7099-159 | — |
| CEL | 3D10-250266-11(S) | ES7099-017 | — |
| CEL BODY ASSY.SCCM-OX(SE) | 3D87-003411-14 | ES7099-026 | — |
| CEL, INNER S-FTS(NEST)V2 | 2L10-250984-11 | ES7099-018 | — |
| CEL, INNER SS-1LESS V2 | 2L10-252653-11 | ES7099-201 | — |
| CEL, OUTER, SH-OX,RP470-0.2 | 3D10-250317-21 | ES7099-020 | — |
| CEL, OUTER, SH-OX,RP470-0.2 | 3D10-250317-21 | ES7099-006 | — |
| CEL, OUTER(TE-349-LABY FLAT) | 3D10-202375-21(S) | ES7099-021 | — |
| CEL, OUTER(TE-349-LABY-GND FLAT) | 3D10-202375-21 | ES7099-078 | — |
| CEL, OUTER(TE349-LABY-GNDFLAT) | 3D10-202375-12 | ES7099-102 | — |
| CEL, OUTER(TE349-LABY-GNDFLAT) | 3D10-202375-12 | ES7099-003 | — |
| CEL,CL380-364-0.5(PH)V2 | 2L10-250520-11 | ES7099-109 | — |
| CEL,CL380-364-0.5(PH)V2 | 2L10-250520-11 | ES7099-059 | — |
| CEL,INNER ST(NEST)V2 | 2L10-251342-11 | ES7099-055 | — |
| CEL,INNER ST(NEST)V2 | 2L10-251342-11 | ES7099-040 | — |
| CEL,INNER TP(NEST)V2 | 2L10-251316-11 | ES7099-149 | — |
| CEL,INNER TP(NEST)V2 | 2L10-251316-11 | ES7099-125 | — |
| CEL,INNER TP(NEST)V2 (TEST) | 2L10-251316-11 | ES7099-219 | — |
| CEL,INNER(1.75-WITH PIN) | 3D10-250316-11-M | ES7099-075 | — |
| CEL,INNER(PH-MG)V2 | 2L10-250820-11 | ES7099-049 | — |
| CEL,INNER(SH-OX1.75) | 3D10-250316-11 | ES7099-005 | — |
| CEL,OUTER 10-40F(PH-MG)V2 | 2L10-250803-11 | ES7099-050 | — |
| CEL,OUTER 10-40F(PH-MG)V2 | 2L10-250803-11 | ES7099-045 | — |
| CEL,OUTER GAP30 | 3D10-251042-11 | ES7099-096 | — |
| CEL,OUTER SS-L V2 | 2L10-355755-11 | ES7099-126 | — |
| CEL,OUTER SS-L V2(POLY) | 2L10-355755-11 | ES7099-127 | — |
| CEL,OUTER SS-LP V2 | 2L10-355763-11 | ES7099-150 | — |
| CEL,OUTER SS-LP V2 | 2L10-355763-11 | ES7099-129 | — |
| CEL,OUTER SS-V2 | 2L10-355078-11 | ES7099-122 | — |
| CEL,OUTER SS-V2(POLY) | 2L10-355078-11 | ES7099-123 | — |
| CEL,OUTER ST-P(NEST)V2 | 2L10-251992-11 | ES7099-128 | — |
| CEL,OUTER ST(NEST)V2 | 2L10-251343-21 | ES7099-056 | — |
| CEL,OUTER ST(NEST)V2 | 2L10-251343-21 | ES7099-042 | — |
| CEL,OUTER ST(NEST)V2(POLY) | 2L10-251343-21 | ES7099-124 | — |
| CEL,OX T10-75-C912(COC-N) | 3D10-302020-11 | ES7099-073 | — |
| CLE INNER | 3D10-202364-12 | ES7099-168 | — |
| DRM FOCUS RING | 1D10-302208-13 | ES7099-215 | — |
| DRM FOCUS RING | 1D10-302208-13 | ES7099-185 | — |
| ELECTRODE | 3D10-250316-11(S) | ES7099-016 | — |
| ELECTRODE UPPER (LD-777) [SCCM] | DB-1810-121988-11-H | ES7099-145 | — |
| ELECTRODE UPPER (LD-777) [SCCM] | DB-1810-121988-11-H | ES7099-103 | — |
| ELECTRODE UPPER LD777 | DEB-1810-121988-11W | ES7099-023 | — |
| ELECTRODE UPPER,OUTER SST-2 V2E | 2L10-356318-11 | ES7099-151 | — |
| ELECTRODE UPPER,OUTER SST-T V2E | 2L10-356319-11 | ES7099-152 | — |
| ELECTRODE, PLATE CEN(5K)S-DRM | 3D10-351315-12 | ES7099-189 | — |
| Electrode, Upper (LD-777) | 1810-121988-11 | ES7099-001 | — |
| ELECTRODE,IN ST(NEST-1LESS)V2 | 2L10-252609-11 | ES7099-191 | — |
| ELECTRODE,IN ST(NEST-CEN)V2 | 2L10-252608-11 | ES7099-192 | — |
| ELECTRODE,IN ST(NEST-CHASE)V2 | 2L10-252612-11 | ES7099-193 | — |
| ELECTRODE,UPPER PLATE | 1810-224852-12 | ES7099-217 | — |
| ELECTRODE(With Pin) | 3D10-250316-11(U1) | ES7099-110 | — |
| FOCUS RING | 3D10-250899-11 | ES7099-167 | — |
| FOCUS RING 2.6T | 3D10-201448-21(M) | ES7099-065 | — |
| FOCUS RING 2.6T | 3D10-201448-21(M) | ES7099-063 | — |
| FOCUS RING 360-302-C | 3D10-201448-21 | ES7099-037 | — |
| FOCUS RING 360-302-C | 3D10-201448-21 | ES7099-025 | — |
| FOCUS RING PM4.0-380 | 3D10-200997-11 | ES7099-024 | — |
| FOCUS RING, 360-302-C | 3D10-201448-13 | ES7099-090 | — |
| FOCUS RING, 360-310-T3.4 | 2L10-357010-11 | ES7099-203 | — |
| FOCUS RING, UP(TYPE L-205) | 1D10-350687-11 | ES7099-173 | — |
| FOCUS RING, UP(TYPE L-205) | 1810-350062-M1 | ES7099-165 | — |
| FOCUS RING,306-T3.6(308.6) | 2L10-251876-11 | ES7099-112 | — |
| FOCUS RING,360-302 T3.4 | 3D10-251033-V1 | ES7099-100 | — |
| FOCUS RING,360-T3.4-FLAT | 2L10-251877-11 | ES7099-190 | — |
| FOCUS RING,360-T3.6 FLAT | 2L10-251877-11 | ES7099-114 | — |
| FOCUS RING,360-T3.6(320) | 2L10-251884-11 | ES7099-113 | — |
| FOCUS RING,360-T3.8(314.4) | 2L10-251875-11 | ES7099-138 | — |
| FOCUS RING,360-T3.8(314.4) | 2L10-251875-11 | ES7099-115 | — |
| FOCUS RING,380-T4.0(CP) | 3D10-250177-12 | ES7099-039 | — |
| FOCUS RING,380-T4.O,E | 3D10-250442-31 | ES7099-038 | — |
| FOCUS RING,380-T4.O,E | 3D10-250442-31 | ES7099-036 | — |
| FOCUS RING,380-T6.5 | 3D10-200330-12 | ES7099-084 | — |
| FOCUS RING,380-T6.5,IN303(CP) | 3D10-250158-11 | ES7099-083 | — |
| FOCUS RING,380-T6.5(CP) | 3D10-250157-11 | ES7099-082 | — |
| FOCUS RING,J302-303-8.3-298.2 | 3D10-250281-11 | ES7099-074 | — |
| FOCUS RING,LAB 360-06-4.5 PL | 2L10-251538-11 | ES7099-072 | — |
| FOCUS RING,LAB 360-T4-306 | 2010-251679-11 | ES7099-046 | — |
| FOCUS RING,LAB 360-T4-306 | 2010-251671-11 | ES7099-041 | — |
| FOCUS RING,LAB 360-T4.5-306 | 2L10-251514-11 | ES7099-047 | — |
| FOCUS RING,LAB 360-T4.5-310 | 2010-251681-11 | ES7099-048 | — |
| FOCUS RING,PM 380-303 T4 | 3D10-251187-V1 | ES7099-182 | — |
| FOCUS RING,PM 380-303 T4 | 3D10-251187-V1 | ES7099-147 | — |
| FOCUS RING,PM380-303 T8 VA | 3D10-251037-V1 | ES7099-098 | — |
| FOCUS RING,T3.4 NO HOLE | 2L10-354003-11 | ES7099-202 | — |
| FOCUS RING,TE-MODIFY | 3D10-201448-11 | ES7099-019 | — |
| FOCUS RING(LAB),360-T4(320) | 2L10-251061-21 | ES7099-060 | — |
| FOCUS RING(LAB),360-T4(320)HS | 2L10-251409-11 | ES7099-108 | — |
| FOCUS RING(LAB),360-T4(320)HS | 2L10-251409-11 | ES7099-061 | — |
| HYNIX SI FOCUS RING (LLDX) 0.02 | 1810-329535-11 | ES7099-028 | — |
| HYNIX TEL Focus Ring 360-302-T4 TAP | 3D10-250369-11 | ES7099-031 | — |
| REWORK,FOCUS RING 330 | 2L10-251854-11 | ES7099-117 | — |
| REWORK,FOCUS RING 344.5 | 2L10-251855-11 | ES7099-111 | — |
| REWORK,RING-FOCUS 360-318-5.5 | 2L02-250067-11 | ES7099-230 | — |
| RING FOCUS 8/MIN/CL | 3D10-250576-21 | ES7099-070 | — |
| RING FOCUS 8/MIN/CL | 3D10-250576-21 | ES7099-033 | — |
| RING, F-8S0-SI-260-4A | 1D10-350650-11 | ES7099-172 | — |
| RING, F-8SO-SI-260-4A | 1D10-310019-M3 | ES7099-164 | — |
| RING, FOCUS LAB 360-314.2-5 | 2L10-252397-11 | ES7099-179 | — |
| RING, FOCUS LAB 360-314.2-5 | 2L10-252397-11 | ES7099-160 | — |
| RING, GND GROOVE FG8-N | 3D10-251300-V1 | ES7099-222 | — |
| RING,F-6S-SI-240-3.4A | 1D10-350653-11 | ES7099-169 | — |
| RING,F-6S-SI-240-3.4A | 1D10-311775-M2 | ES7099-161 | — |
| RING,F-8S0-SI-260-3.4A | 1D10-350647-11 | ES7099-174 | — |
| RING,F-8SO-SI-260-3.4A | 1D10-350647-31 | ES7099-156 | — |
| RING,F-8SO-SI-260-3.4A | 1D10-309946-M1 | ES7099-148 | — |
| RING,F-8SO-SI-260-3.4A(325-10) | 1D10-350647-M2 | ES7099-194 | — |
| RING,F-8SO-SI-260-3.4A(325-22.5) | 1D10-350647-21 | ES7099-218 | — |
| RING,F-8SO-SI-260-3.4A(325-22.5) | 1D10-350647-M3 | ES7099-195 | — |
| RING,F-SI-D380D297.0-T2.8 S-MF | 2L10-251483-11 | ES7099-087 | — |
| RING,F-SI-D380D297.0-T3.4 S-MF | 2L10-251482-11 | ES7099-086 | — |
| RING,F-SI-D380D297.0-T3.4S-MF | 2L10-252482-11 | ES7099-121 | — |
| RING,FOCUS 298.1-T3.6(302.2) | 2L10-252614-11 | ES7099-196 | — |
| RING,FOCUS 298.1-T3.6(303.5) | 2L10-252745-11 | ES7099-225 | — |
| RING,FOCUS 305-T5G50L LAB(FLT) | 2L10-252644-11 | ES7099-197 | — |
| RING,FOCUS 306-T5 FLAT LAB | 2L10-252693-11 | ES7099-207 | — |
| RING,FOCUS 306-T5 STEP LAB | 2L10-252694-11 | ES7099-208 | — |
| RING,FOCUS 306-T6.5 STEP LAB | 2L10-252700-11 | ES7099-211 | — |
| RING,FOCUS 306-T6G50L LAB (FLT) | 2L10-252645-11 | ES7099-198 | — |
| RING,FOCUS 308-T4.5G50L WIDE | 2L10-252761-11 | ES7099-226 | — |
| RING,FOCUS 311-T5.5G50L LAB 2S | 2L10-252691-11 | ES7099-205 | — |
| RING,FOCUS 311-T5.5G50L WIDE | 2L10-252758-11 | ES7099-223 | — |
| RING,FOCUS 312-T6 G50L WIDE | 2L10-252759-11 | ES7099-224 | — |
| RING,FOCUS 312-T6G50L LAB 2S | 2L10-252692-11 | ES7099-206 | — |
| RING,FOCUS 314-T5G50L LAB SHAL | 2L10-252646-11 | ES7099-199 | — |
| RING,FOCUS 314-T5G78 LAB | 2L10-252696-11 | ES7099-210 | — |
| RING,FOCUS 318-T5.5G50L LAB | 2L10-252647-11 | ES7099-200 | — |
| RING,FOCUS 318-T5.5G76 LAB | 2L10-252695-11 | ES7099-209 | — |
| RING,FOCUS 324-T5.5G50L WIDE | 2L10-252760-11 | ES7099-227 | — |
| RING,FOCUS 330-298.1-T12.1 | 2L10-251847-11 | ES7099-131 | — |
| RING,FOCUS 360-298.1-3.4(VU) | K-PU-000077-11 | ES7099-184 | — |
| RING,FOCUS 360-298.1-T12.1 | 2L10-251925-11 | ES7099-132 | — |
| RING,FOCUS 360-298.1-T12.1 | 2L10-251765-11 | ES7099-130 | — |
| RING,FOCUS 360-298.1-T12.1 | 2L10-251765-11 | ES7099-097 | — |
| RING,FOCUS 360-298.1-T12.6D | 2L10-252407-11 | ES7099-166 | — |
| RING,FOCUS 360-298.1-T13.1D | 2L10-252346-11 | ES7099-155 | — |
| RING,FOCUS 360-302-C | 3D10-251155-V1 | ES7099-146 | — |
| RING,FOCUS 360-302-C | 3D10-251155-V1 | ES7099-133 | — |
| RING,FOCUS 360-305-LT298.4-1.0 | 3D10-250825-11 | ES7099-085 | — |
| RING,FOCUS 360-318-5.5 WIDE | 2L10-252796-11 | ES7099-231 | — |
| RING,FOCUS 360-T6.5 | 3D10-251036-V1 | ES7099-183 | — |
| RING,FOCUS 360-T6.5 | 3D10-251036-V1 | ES7099-099 | — |
| RING,FOCUS BSP 302-80-T7.5-297 | 2L10-252485-11 | ES7099-178 | — |
| RING,FOCUS BSP 305-70-T6.5-297 | 2L10-252587-11 | ES7099-186 | — |
| RING,FOCUS BSP 305-70-T7.5 | 2L10-252512-11 | ES7099-177 | — |
| RING,FOCUS BSP 305-70-T7.5 297 | 2L10-252514-11 | ES7099-176 | — |
| RING,FOCUS BSP 305-75-T7.0-297 | 2L10-252586-11 | ES7099-187 | — |
| RING,FOCUS BSP 305-80-T5.5 297 | 2L10-252427-11 | ES7099-175 | — |
| RING,FOCUS BSP 305-80-T7.0-297 | 2L10-252588-11 | ES7099-188 | — |
| RING,FOCUS JI ATCC-BSP8.3-75LR | 3D10-251946-11 | ES7099-140 | — |
| RING,FOCUS JI ATCC-BSP8.3-75LR | 3D10-250946-11 | ES7099-139 | — |
| RING,FOCUS LAB 360-06-4 | 2L10-251497-11 | ES7099-057 | — |
| RING,FOCUS LAB 360-306-5 | 2L10-252110-11 | ES7099-137 | — |
| RING,FOCUS LAB 360-307.6-5 | 2L10-252182-11 | ES7099-144 | — |
| RING,FOCUS LAB 360-310-5 | 2L10-252181-11 | ES7099-153 | — |
| RING,FOCUS LAB 360-310-5 | 2L10-252181-11 | ES7099-143 | — |
| RING,FOCUS LAB 360-312-5 | 2L10-252319-11 | ES7099-154 | — |
| RING,FOCUS LAB 360-313.5-5 | 2L10-252373-11 | ES7099-180 | — |
| RING,FOCUS LAB 360-313.5-5 | 2L10-252373-11 | ES7099-158 | — |
| RING,FOCUS LAB 360-315-5 | 2L10-252318-11 | ES7099-181 | — |
| RING,FOCUS LAB 360-315-5 | 2L10-252318-11 | ES7099-157 | — |
| RING,FOCUS LAB 360-315-5.5 | 2L10-252052-11 | ES7099-135 | — |
| RING,FOCUS LAB 360-315-6 | 2L10-252056-11 | ES7099-134 | — |
| RING,FOCUS LAB 360-318-5.5 | 2L10-252764-11 | ES7099-229 | — |
| RING,FOCUS LAB 360-320-4.6 | 2L10-252059-11 | ES7099-136 | — |
| RING,FOCUS LAB 360-320-5 | 2L10-251708-11 | ES7099-107 | — |
| RING,FOCUS LAB 360-320-5 | 2L10-251708-11 | ES7099-091 | — |
| RING,FOCUS LAB 360-320-5-400H | 2L10-251728-11 | ES7099-093 | — |
| RING,FOCUS LAB 360-322-4.5 | 2L10-252671-11 | ES7099-212 | — |
| RING,FOCUS LAB 360-327-4.5 | 2L10-252672-11 | ES7099-213 | — |
| RING,FOCUS LAB 360-333-4.5 | 2L10-252673-11 | ES7099-214 | — |
| RING,FOCUS LAB 360-5T SA | 2L10-251717-11 | ES7099-104 | — |
| RING,FOCUS N (LLD-HT) | 1810-250082-11 | ES7099-220 | — |
| RING,FOCUS N (MTBW250) | 1810-329523-M1 | ES7099-162 | — |
| RING,FOCUS N (MTBWC250) | 1D10-350680-11 | ES7099-170 | — |
| RING,FOCUS N(LLD) | 1D10-350674-11 | ES7099-171 | — |
| RING,FOCUS N(LLD) | 1810-225123-M1 | ES7099-163 | — |
| RING,FOCUS SH T3.3 | 2010-251838-11 | ES7099-076 | — |
| RING,FOCUS SH T3.4-TAPER304 | 2010-251839-11 | ES7099-077 | — |
| RING,FOCUS SH T4.0-2TAPER306 | 3D10-250968-11 | ES7099-079 | — |
| RING,FOCUS SH T4.5-2TAPER306 | 3D10-250970-11 | ES7099-080 | — |
| RING,FOCUS SH T4.5-TAPER306 | 3D10-250971-11 | ES7099-089 | — |
| RING,FOCUS SH T4.5-TAPER306 | 3D10-250971-11 | ES7099-081 | — |
| RING,FOCUS T4.3 S700 | 2L10-251509-11 | ES7099-064 | — |
| RING,FOCUS T4G100-MF | 3D10-250755-11 | ES7099-094 | — |
| RING,FOCUS T4G50L-G2TMF | 3D10-250807-21 | ES7099-058 | — |
| RING,FOCUS T4G50L-G2TMF | 3D10-250807-21 | ES7099-052 | — |
| RING,FOCUS,AD360-298.1 | 3D10-250318-11 | ES7099-088 | — |
| RING,GND(L) SI STEP V2 | 2L10-252701-12 | ES7099-221 | — |
| RING,GND(L) SI STEP V2 | 2L10-252701-11 | ES7099-118 | — |
| RING,INNER COVER 330.3 SI V2 | 2L10-355557-11 | ES7099-119 | — |
| RING,INNER COVER 344.8 SI V2 | 2L10-355558-11 | ES7099-120 | — |
| RING,PROTECTION GAP30 | 3D10-251043-11 | ES7099-095 | — |
| RING,SI GND FBI | 3D10-253182-11 | ES7099-141 | — |
| RING,UNDER SI 340.5-8.2( C ) | 2L10-251729-11 | ES7099-092 | — |
| RING.FOCUS 360-298.1-T12.1S | 2L10-252706-11 | ES7099-216 | — |
| RING(297B),FOCUS 7.5-360 V3 | 2L10-251881-11 | ES7099-116 | — |
| RING(L),SI GND STEP V2 | 2L10-250701-11 | ES7099-062 | — |
| RING(LR),FOCUS ATC-BSP 7.5-360 | 2010-259999-11 | ES7099-101 | — |
| SHIN CEL(R&D) | 2010-150775-11 | ES7099-030 | — |
| SHIN COOLING FOCUS RING,360-T4-298 | 3D10-250755-21 | ES7099-008 | — |
| SHIN COOLING FOCUS RING,360-T4.5-29 | 3D10-250755-21 | ES7099-071 | — |
| SHIN PROTECTION RING(GRINDING) | 3D10-350067-11 | ES7099-106 | — |
| SHIN PROTECTION RING(POLISHING) | 3D10-350067-11 | ES7099-105 | — |
| SI FOCUS RING | 1810-329156-11 | ES7099-051 | — |
| SI FOCUS RING | 1810-329156-11 | ES7099-035 | — |
| SI FOCUS RING | 1810-329523-11 | ES7099-022 | — |
| SI FOCUS RING (TE Modify)Rev.1 (4t) | 3D10-201448-11(U2) | ES7099-032 | — |
| SI FOCUS RING(notch) | 1D10-302209-14 | ES7099-142 | — |
| SI FOCUS RING(notch) | 1D10-302209-14 | ES7099-029 | — |
| SI GND RING MODIFY | 2L10-516313-21 | ES7099-233 | — |
| SI GND RING RK5 | 2L10-255881-21 | ES7099-232 | — |
| SI RING,PROTECTION(TE GND FLAT) | 3D87-052882-12 | ES7099-067 | — |
| SI RING,PROTECTION(TE GND FLAT) | 3D87-052882-12 | ES7099-044 | — |
| SILICON CEL INNER (TE-T10-P-LABY) | 3D10-202364-12 | ES7099-002 | — |
| SILICON FOCUS RING TE-MODIFY REV.1 | 3D10-201448-11 | ES7099-004 | — |
| SILICON RING , PROTECTION(TE GND FLAT) | 3D87-052882-12 | ES7099-069 | — |
| SILICON RING , PROTECTION(TE GND FLAT) | 3D87-052882-12 | ES7099-054 | — |
