Parts held against platforms outside Applied Materials, Lam Research and Tokyo Electron, plus records whose OEM platform has not yet been confirmed. Send us the part number and we will confirm the platform.
14 parts in this catalogue. If the part you need is not listed, get in touch with the OEM part number and we will source it through our supplier network.
| Part | OEM P/N | ESCT P/N | Service |
|---|---|---|---|
| ELECTRODE (TEST) | 3D10-250316-11(S) | — | — |
| Flex Wide | 136-951-1 | — | — |
| FOCUS RING | D103-24221A | — | — |
| FOCUS RING 360 | D100-04275S-G06 | — | — |
| FOCUS RING 360-302-C | 3D10-201448-21 | — | — |
| FOCUS RING(8.5T) | 3D10-250322-11 | — | — |
| INNER CEL, 4x | D100-04489A-03 | — | — |
| OUTER CEL, 4x | 2L10-355763-11-07 | — | — |
| SH Inner Cell | D103-23554A | — | — |
| SILICON FOCUS RING | 0200-35623 | — | — |
| SILICON RING | 136-951-0 | — | — |
| SUSCEPTOR ASSY TEOS 200mm | 0010-34321 | ES4044-001 | Repair |
| WAFER, TEACHING TACTRAS | CX10-350909-11 | — | — |
| WAFER,305.4 TEACHING TACTRAS | CX10-352390-11 | — | — |