Every Lam Research part ESCT Fab Support currently lists, with OEM and ESCT part numbers. Parts are supplied new and OEM-compatible from second sources; rows marked Repair can also be repaired or exchanged.
209 parts in this catalogue. If the part you need is not listed, get in touch with the OEM part number and we will source it through our supplier network.
| Part | OEM P/N | ESCT P/N | Service |
|---|---|---|---|
| (C2)HOT EDGE RING FLEX45 | 716-040738-120 | ES2099-003 | — |
| (C2)HOT EDGE RING FLEX45(CP22.5um) | 716-040738-120 | ES2099-038 | — |
| (C2)HOT EDGE RING FLEX45(MID) | 716-040738-120 | ES2099-015 | — |
| (C2)HOT EDGE RING, HE,38X ESC,RND | 716-023013-027 | ES2099-004 | — |
| 48RA CONTROL BOARD | 810-005843-001 | ES2022-069 | — |
| 48RA INDEXER ASSY | 05309-023 | ES2022-115 | — |
| 8” Upper Electrode, 0, 84d | 839-011907-100 | ES2022-164 | — |
| AC-2 | 796-006238-001 | ES2022-106 | Repair |
| ADDRESS BOARD | 810-017388-003 | R-ES2022-144 | Repair |
| ADIO 8번 BOARD | 810-017050-004 | ES2022-078 | Repair |
| ADIO BOARD | 810-017031-004 | R-ES2022-136 | Repair |
| ADIO BOARD | 810-017031-001 | ES2022-088 | Repair |
| ADIO BOARD | 810-017031-002 | ES2022-087 | Repair |
| ADIO BOARD | 810-017031-003 | ES2022-086 | Repair |
| ADIO BOARD | 810-017031-004 | ES2022-085 | Repair |
| ADIO BOARD | 810-017052-009 | ES2022-077 | Repair |
| ALIGNER CONTROLLER | 011-4130-03 | ES2022-117 | Repair |
| AMP INTERLOCK BOARD | 810-017013-001 | ES2022-090 | — |
| ANAFAZE BOARD | 778-091827-011 | R-ES2022-147 | Repair |
| ANAFAZE CONTROLLER | 88-11320-300 | ES2022-005 | Repair |
| ARM HOUSING ASSY | 853-012100-003 | ES2022-064 | Repair |
| ARM HOUSING ASSY | 853-021819-001 | ES2022-045 | Repair |
| ARM HOUSING ASSY | 853-021819-001 | ES2022-044 | Repair |
| ARM HOUSING ASSY | 853-021819-002 | ES2022-043 | Repair |
| ASSY,CAPACITORS, TCP MNW 8" | 839-031687-003 | ES2022-125 | — |
| ASSY,HTD PDL,FDTHRU,STPR,8" | 853-347146-008 | ES2022-128 | — |
| AUTO TUNE BOARD | 810-015987-101 | R-ES2022-135 | Repair |
| AUTOTUNE BOARD | 810-015932-001 | ES2022-101 | Repair |
| AUTOTUNE BOARD | 810-015932-002 | ES2022-100 | Repair |
| AUTOTUNE BOARD | 810-015987-001 | ES2022-099 | Repair |
| AUTOTUNE BOARD | 810-015987-003 | ES2022-098 | Repair |
| AUTOTUNE BOARD | 810-015987-101 | ES2022-097 | Repair |
| BAFFLE | 716-140125-100(U1) | ES2099-010 | — |
| BOTTOM MATCH | 853-015130-002 | ES2022-050 | Repair |
| BOTTOM MATCH | 853-015130-102 | ES2022-049 | Repair |
| BOTTOM MATCH | 853-025083-001 | ES2022-038 | Repair |
| BOTTOM MATCH | 853-025083-003 | ES2022-037 | Repair |
| BOTTOM MATCH | 853-025083-022 | ES2022-036 | Repair |
| BOTTOM MATCH | 853-250001-023 | ES2022-021 | Repair |
| BOTTOM MATCH | 853-250001-024 | ES2022-020 | Repair |
| BOTTOM MATCH | 853-330951-021 | ES2022-016 | Repair |
| BREAK OUT BOARD | 810-370540-002 | R-ES2022-145 | Repair |
| CAPACITOR, HIGH VOLTAGE | 649-007321-004 | ES2022-124 | — |
| CLR, PINNED, ADJ,LIFTER,8" STRIPPER | 715-032760-008 | ES2022-130 | — |
| COIL, EIGHT TURN | 839-031686-001 | ES2022-123 | — |
| CONVECTRON TUBE INTERFACE B/D | 810-017007-001 | ES2022-092 | — |
| CORE_INNER ELECTRODE | 716-069688-005 | ES2099-041 | — |
| CORE_INNER ELECTRODE | 716-069688-005 | ES2099-039 | — |
| CORE_INNER ELECTRODE | 716-069688-005 | ES2099-037 | — |
| CORE_INNER ELECTRODE (TEST) | 716-069688-005 | ES2099-051 | — |
| COVER, BOWL, RINSE, 8 | 715-013705-008 | ES2022-129 | — |
| CPU BOARD | 810-017034-003 | ES2022-084 | Repair |
| CPU BOARD | 810-017034-005 | ES2022-083 | Repair |
| CPU BOARD | 810-017034-300 | ES2022-082 | Repair |
| CPU BOARD | 853-017034-110 | ES2022-048 | — |
| DELTRON POWER SUPPLY PS1 | FM12C6-08-CG | ES2022-003 | Repair |
| DELTRON POWER SUPPLY PS2 | 660-091821-001 | ES2022-110 | Repair |
| DIP BOARD | 810-017003-005 | R-ES2022-134 | Repair |
| DIP BOARD | 810-007003-004 | ES2022-102 | Repair |
| DIP BOARD | 810-017003-001 | ES2022-096 | Repair |
| DIP BOARD | 810-017003-002 | ES2022-095 | Repair |
| DIP BOARD | 810-017003-004 | ES2022-094 | Repair |
| DIP BOARD | 810-017003-005 | ES2022-093 | Repair |
| DSQ DIP BOARD | 810-017057-001 | ES2022-076 | Repair |
| DSQ MATCH | 853-025735-001 | ES2022-035 | Repair |
| DSQ MATCH | 853-025735-004 | ES2022-034 | Repair |
| DSQ MATCH | 853-025735-008 | ES2022-033 | Repair |
| DSQ MATCH | 853-025735R-001 | ES2022-032 | Repair |
| EDGE DETECTOR ASSY | 853-012500-002 | ES2022-055 | Repair |
| EDGE RING(385ESC) | 716-023013-004(U1) | ES2099-006 | — |
| EDGE RING(400ESC) | 716-044863-001(U1) | ES2099-005 | — |
| ELCTD, MONO TALON+, CZ, 18 STEP | 716-073979-032 | ES2099-055 | — |
| ELCTD,CAP,GD RING,ESC,8IN NCH | 718-094756-081 | ES2022-121 | — |
| ELECTD,OUTER,18 STEP300M | 716-077916-001 | ES2099-025 | — |
| ELECTRODE | 716-069688-005(S) | ES2099-029 | — |
| Electrode Inner 18step,300mm | 716-069688-005 | ES2099-047 | — |
| Electrode Outer 18step,300mm | 716-077916-001 | ES2099-048 | — |
| ENGENUITY BOARD | 810-707183-001 | ES2022-068 | — |
| Enhanced Universial Gas Box PCB | 810-803226-001 | R-ES2022-150 | Repair |
| Enhanced Universial Gas Box PCB | 810-803225-001 | R-ES2022-149 | Repair |
| Enhanced Universial Gas Box PCB | 810-803205-001 | R-ES2022-148 | Repair |
| EPD | 853-001983-005 | ES2022-066 | Repair |
| EPD | 853-540064-001 | ES2022-010 | Repair |
| EPD | 853-540066-001 | ES2022-009 | Repair |
| EPD | 853-540066-005 | ES2022-008 | Repair |
| EPD | 853-540066-011 | ES2022-007 | Repair |
| ESC filter board | 810-190082-001 | ES2022-120 | — |
| ESC POWER SUPPLY | 810-017086-018 | R-ES2022-133 | Repair |
| ESC POWER SUPPLY | 810-017086-002 | ES2022-075 | Repair |
| ESC POWER SUPPLY | 810-017086-003 | ES2022-074 | Repair |
| ESC POWER SUPPLY | 810-017086-010 | ES2022-073 | Repair |
| ESC POWER SUPPLY | 810-017086-018 | ES2022-072 | Repair |
| ESC POWER SUPPLY | 853-017086-002 | ES2022-047 | Repair |
| ESC POWER SUPPLY | 853-017086-018 | ES2022-046 | Repair |
| ESC POWER SUPPLY | 853-025054-001 | ES2022-042 | Repair |
| ESC POWER SUPPLY | 853-025054-002 | ES2022-041 | Repair |
| ESC POWER SUPPLY | 853-025054-003 | ES2022-040 | Repair |
| ESC POWER SUPPLY | 853-025054-018 | ES2022-039 | Repair |
| ESC POWER SUPPLY | 853-330473-001 | ES2022-017 | Repair |
| ESC RF FILTER | 810-330490-001 | R-ES2022-139 | Repair |
| FLEX45 INNER ELECTRODE | 839-044157-031 | ES2099-036 | — |
| FLEX45 INNER ELECTRODE(0.635) | 839-044157-031 | ES2099-031 | — |
| FLEX45 INNER ELECTRODE(CARBON) | 839-044157-031 | ES2099-034 | — |
| FLEX45 INNER ELECTRODE(SCREW REV01) | 839-044157-031 | ES2099-033 | — |
| GAP MOTOR CONTROL BOARD | 810-017018-002 | ES2022-089 | — |
| GFI BOARD | 810-190549-003 | R-ES2022-143 | Repair |
| HALO INTERFACE BOARD | 810-034806-105 | R-ES2022-142 | Repair |
| HARMONIC ARM | 853-012123-001 | ES2022-063 | Repair |
| HARMONIC ARM | 853-012123-002 | ES2022-062 | Repair |
| HARMONIC ARM | 853-012123-004 | ES2022-061 | Repair |
| HARMONIC ARM | 853-012175-001 | ES2022-060 | Repair |
| HARMONIC ARM | 853-012175-003 | ES2022-059 | Repair |
| HARMONIC ARM | 853-012175-004 | ES2022-058 | Repair |
| HEARTBEAT BOARD | 810-017012-002 | ES2022-091 | — |
| HLDR, WFR 8", STPR, W/ALIGN HOLE (with alignment hole) | 715-130081-008 | ES2022-127 | — |
| HOLDER, WAFER,8" STRIPPER (Without alignment hole) | 715-011492-008 | ES2022-126 | — |
| HOT EDGE RING | DB-716-443086-401-H | ES2099-050 | — |
| HOT EDGE RING | 716-044668-435 | ES2099-046 | — |
| HOT EDGE RING | 716-023013-007 | ES2099-028 | — |
| HOT EDGE RING | DB-716-443086-401-H | ES2099-011 | — |
| HOT EDGE RING FLEX45 | 716-040738-427(S1) | ES2099-007 | — |
| HOT EDGE RING FLEX45 | 716-040738-120 | ES2099-002 | — |
| HOT EDGE RING FLEX45(4.5T GRINDING) | 716-040738-120 | ES2099-030 | — |
| HOT EDGE RING FLEX45(GRINDING) | 716-040738-120 | ES2099-026 | — |
| HOT EDGE RING FLEX45(L) | 716-040738-120 | ES2099-014 | — |
| HOT EDGE RING FLEX45(LAPPING) | 716-040738-120 | ES2099-027 | — |
| HOT EDGE RING FLEX45(POLISHING) | 716-040738-120 | ES2099-013 | — |
| HOT EDGE RING(FOR FLEX3X) | 716-040738-471 | ES2099-019 | — |
| HOT EDGE RING(FOR FLEX3X)-POLISHING | 716-040738-471 | ES2099-040 | — |
| Hynix 200mm Hot Edge Ring | 716-017544-001 | ES2099-012 | — |
| INDEXER ASSY | 799-012600-001 | ES2022-103 | Repair |
| INDEXER ASSY | 853-012600-002 | ES2022-053 | Repair |
| INDEXER ASSY | 853-012600-101 | ES2022-052 | Repair |
| INDEXER ASSY | 853-029595-101 | ES2022-030 | Repair |
| INDEXER ASSY | 853-029295-102 | ES2022-019 | Repair |
| INDEXER BOARD | 605-012620-001 | R-ES2022-132 | Repair |
| INNER DOOR | 853-044264-003 | ES2022-119 | Repair |
| INNER DOOR | 853-012200-002 | ES2022-057 | Repair |
| INNER ELECTRODE FLEX45 | 839-044157-031 | ES2099-022 | — |
| INNER ELECTRODE FLEX45 | 839-044157-031 | ES2099-018 | — |
| INNER ELECTRODE FLEX45 | 839-044157-031 | ES2099-016 | — |
| INNERDOOR | 853-012261-001 | ES2022-056 | Repair |
| INNERDOOR | 853-012875-001 | ES2022-051 | Repair |
| INNERDOOR | 853-442064-001 | ES2022-014 | Repair |
| INNERDOOR | 853-442064-002 | ES2022-013 | Repair |
| INNERDOOR | 853-442064-003 | ES2022-012 | Repair |
| INNERDOOR | 853-442078-001 | ES2022-011 | Repair |
| INTER LOCK BOARD | 810-370749-101 | R-ES2022-141 | Repair |
| ISI INTERFACE BOARD | 810-034817-002 | R-ES2022-140 | Repair |
| LAM IPC | 856-900240-400 | ES2022-006 | Repair |
| LIFTER FILTER | 810-017021-001 | R-ES2022-138 | Repair |
| LIFTER SPINNER | 853-012525-001 | ES2022-054 | Repair |
| LOFAT | 853-025903-002 | ES2022-031 | Repair |
| MAGNETEC POWER SUPPLY | 660-098040-001 | ES2022-108 | Repair |
| MAGNETEC POWER SUPPLY | 660-098076-002 | ES2022-107 | Repair |
| MAGNETICS POWER SUPPLY | PM2675A-1-3 | ES2022-002 | Repair |
| MATRIX BOARD | 97780-005 | ES2022-004 | — |
| MONOCHROMATOR | 853-011094-001 | ES2022-065 | Repair |
| MOTOR CONTROL DRIVER | 810-017093-001 | ES2022-071 | Repair |
| OMEGA POWER SUPPLY (PS2) | 660-091821-003 | ES2022-109 | Repair |
| OUT DOOR | 853-140013-001 | ES2022-118 | Repair |
| OUT DOOR | 853-140013-001 | ES2022-023 | Repair |
| OUTER ELECTRODE FLEX45(HG) | 839-020965-005 | ES2099-042 | — |
| OUTER ELECTRODE FLEX45(HG) | 839-020965-007 | ES2099-017 | — |
| OUTER ELECTRODE FLEX45(SI) | 839-020965-005 | ES2099-044 | — |
| OUTER ELECTRODE FLEX45(SI) | 839-020965-007 | ES2099-021 | — |
| OUTER ELECTRODE FLEX45(SIC) | 839-020965-005 | ES2099-043 | — |
| OUTER ELECTRODE FLEX45(SIC) | 839-020965-007 | ES2099-020 | — |
| PADDLE LIFTER | 853-032776-001 | ES2022-025 | Repair |
| PADDLE LIFTER | 853-032776-002 | ES2022-024 | Repair |
| PM-7 CONTROLLER | 796-098290-002 | ES2022-105 | Repair |
| POWER SUPPLY PS1 | 660-007612-001 | ES2022-113 | Repair |
| R,HE,4XX, W/FLAT | 716-040738-413 | ES2099-045 | — |
| REPAIR – LAM Control PCB Assembly | 810-017082-004 | R-ES2022-146 | Repair |
| RF GENERATOR | 660-024637-026 | ES2022-112 | Repair |
| RF GENERATOR | 660-024637-028 | ES2022-111 | Repair |
| RF PEK DET HV BOARD | 810-034828-011 | R-ES2022-137 | Repair |
| RING, SECTION, TAPER, POLY SI | 716-081665-252 | ES2099-057 | — |
| RING, UPPER Si EXELAN | 716-007136-002(U1) | ES2099-008 | — |
| RING, UPPER Si EXELAN(LSI) | 716-007136-002(U1) | ES2099-049 | — |
| RING,C-SECTION,.10 SLOT, FLEX HX_MODIFY | 716-081665-251 | ES2099-056 | — |
| RING,C-SECTION,.10 SLOT,POLY SI | 716-081665-601 | ES2099-058 | — |
| RING,C-SECTION10 SLOT, POLY SI | 716-081665-842 | ES2099-053 | — |
| RING,FOC,8" FLATTED,GD R, ESC | 716-330504-081 | ES2022-122 | — |
| SASI BOARD | 810-017035-001 | ES2022-081 | Repair |
| SERIAL BOARD | 810-017038-002 | ES2022-080 | Repair |
| SERIAL BOARD | 810-017038-002 | ES2022-079 | Repair |
| Shaped inner UE | 716-069688-822 | ES2099-052 | — |
| SI HOT EDGE RING | 716-023013-020 | ES2099-001 | — |
| SI INNER ELECTRODE | 839-021113-002 | ES2099-035 | — |
| SI INNER ELECTRODE | 839-021113-002 | ES2099-023 | — |
| SLIT DOOR ASSY | 02010-BA24-1001 | ES2022-116 | Repair |
| SPRT,ADJ CLR,LFTR,8" | 715-032759-008 | ES2022-131 | — |
| SRAM BOARD | 810-057059-002 | ES2022-070 | — |
| STEPPER MOTOR DRIVER BOARD | 605-017016-100 | ES2022-114 | Repair |
| TALON INNER 전극 | 716-069688-005 | ES2099-024 | — |
| TCP-SENSOR BOX | 853-330281-002 | ES2022-018 | Repair |
| TCP9400 T-MATCH | 853-032294-001 | ES2022-028 | Repair |
| TCP9400 T-MATCH | 853-032294-002 | ES2022-027 | Repair |
| TCP9400 T-MATCH | 853-032294-003 | ES2022-026 | Repair |
| TCP9600 T-MATCH | 853-032190-008 | ES2022-029 | Repair |
| TCP9600 T-MATCH | 853-140389-001 | ES2022-022 | Repair |
| THROTTLE VALVE | 839-013901-001 | ES2022-067 | Repair |
| UPC | 797-900918-002 | ES2022-104 | Repair |
| UPPER RING | 716-443090-202(U3) | ES2099-009 | — |
| UPPER RING HPT | 716-007136-002(S) | ES2099-032 | — |
| VCI BOARD | 853-370871-002 | ES2022-015 | Repair |
| Verity Endpoint LAM 4520 – ASSY MONOCHROMATOR | 853-011094-001 | ES2022-001 | — |
| WAVE INNER ELECTRODE | 716-069688-789 | ES2099-054 | — |
