| (A)SI INSERT RING |
0200-03555K |
ES1099-001 |
— |
| (A)SI INSERT RING(G) |
0200-03555K-SI |
ES1099-013 |
— |
| (A)SI INSERT RING(G) |
0200-03555K-SI |
ES1099-009 |
— |
| (A)SI INSERT RING(P) |
0200-03555K-SI |
ES1099-005 |
— |
| (C2)SI INSERT RING(PRO) |
0200-03736K |
ES1099-007 |
— |
| (C2)SI TOP RING |
0200-03559K |
ES1099-006 |
— |
| (C2)SI TOP RING(G) |
0200-03559K |
ES1099-012 |
— |
| (C2)SI TOP RING(MID) |
0200-03559K |
ES1099-011 |
— |
| (C2)SI TOP RING(PRO) |
0200-03576K |
ES1099-008 |
— |
| 0010-70264 Assy HP/HP+ Upgrade Robot Driver Lower for AMAT |
0010-70264 |
ES1044-003 |
— |
| 0020-83582 SHIELD GUIDE TUBE, GRAPHITE, TOP – AMAT Applied Materials Spare Parts |
0020-83582 |
ES227-0177 |
— |
| 0020-84222 GRIPPER FINGER, LONG, SLOTTED, CONDUCTIVE AMAT APPLIED MATERIALS SPARE PARTS |
0020-84222 |
ES227-0076 |
— |
| 10045514 MOUNTING GROUND ELECTRODE, 0020-84522 |
0020-84522 |
ES227-0080 |
— |
| 10049588 – POST MRS SLIT, 0020-83925 |
0020-83925 |
ES227-0081 |
— |
| 10081164 – LINER SIDE, 0020-86738 |
0020-86738 |
ES227-0083 |
— |
| 14 Channel Array PCB |
— |
ES3033-194 |
Repair |
| 2 Centura Buffer Lid Modification(Original → Clear Type) |
AMAT OTHER |
ES1044-020 |
Upgrade |
| 24V 1A PSU |
0100-90025 |
ES3033-153 |
Repair |
| 3 200mm ASP+ CH Wafer Lift Assy (Motor type → Cylinder type) |
AMAT ETCH |
ES1011-027 |
Repair, Upgrade |
| 4 Upgrade Items:: HP/HP+ Robot Assy → VHP Robot Assy |
AMAT OTHER |
ES1044-021 |
Upgrade |
| 90264 – FILAMENT CLAMP – RIGHT HAND |
0020-86733 |
ES227-0130 |
— |
| ACTURATOR ASSY-SLIT LINER DOOR |
0010-01412 |
ES1011-009 |
— |
| AMP 100A-300VDC |
0540-90014 |
ES3033-160 |
Repair |
| Analog IO PCB |
0100-20100 |
ES1044-043 |
— |
| ANTI-CATHODE, MODIFIED SHAFT, 10078193, 0020-81482 |
0020-81482 |
ES227-0020 |
— |
| APERTURE, PRE-DEFINING, GRAPHITE |
0020-83923 |
ES227-0082 |
— |
| Applied Materials Monochromator Module Assy, P5000 |
0010-09935 |
ES1044-030 |
Repair |
| ARC CHAMBER, REMOTE INSULATED PFS |
0020-82054 |
ES227-0155 |
— |
| ARC Module |
0090-91049 |
ES3033-130 |
Repair |
| ARC Module |
0090-90557 |
ES3033-129 |
Repair |
| ARC Power Supply |
0090-91649 |
ES3033-135 |
Repair |
| ARC Power Supply |
１140-00181 |
ES3033-134 |
Repair |
| ARC Power Supply |
1140-00151 |
ES3033-133 |
Repair |
| ARC Power Supply |
1140-00056 |
ES3033-132 |
Repair |
| ARC Power Supply |
1140-00153 |
ES3033-131 |
Repair |
| ARC PSU Control PCB |
0100-90688 |
ES3033-180 |
Repair |
| ARM SERVO PCB |
0100-90773 |
ES3033-174 |
Repair |
| Arm Servo PSU |
0090-90250 |
ES3033-154 |
Repair |
| ASSEMBLY MAG. COUPLED ROTATION 200MM HTF/EPI (NEW) |
0010-33856 |
ES6066-005 |
— |
| ASSEMBLY, 9500XR SPIN, MERCURY SHAFT & SEAL ASSY. |
0010-92438 |
ES227-0332 |
— |
| ASSEMBLY, DISTRIBUTION & FILTERING BOX |
0010-76277 |
ES1044-010 |
— |
| ASSEMBLY, MCE 208VAC DISTRIBUTION DPS CHAMBER |
0010-28258 |
ES1011-015 |
— |
| ASSEMBLY, POWER SUPPLY 15V for Endura5500 |
0010-20000 |
ES1044-007 |
— |
| ASSEMBLY, POWER SUPPLY 24V for Endura5500 (Same as 0010-20001) |
0010-93145 |
ES1044-008 |
— |
| ASSEMBLY,WAFER PIN (Polyimide ESC Type) – CERAMIC |
0010-36202 |
ES1011-020 |
— |
| ASSY +/- 15V POWER SUPPLY GEN RACK |
0010-20498 |
ES1044-011 |
— |
| ASSY 8" DEGAS LAMP 350C |
0010-20317 |
ES1044-015 |
— |
| ASSY HP+ ROBOT DRIVER LOWER/UPPER |
0010-70264-HD |
ES6066-003 |
— |
| ASSY PID CONTROLLER R2 CHAMBER CENTURA |
0010-35511 |
ES1011-016 |
— |
| ASSY WAFER LIFT PIN 200MM DPS CERAMIC ESC |
0010-23726 |
ES1011-019 |
— |
| ASSY, ORIENTER 650NM LASER OPTICS |
0010-08185 |
ES1044-019 |
— |
| ASSY, PREFIRE P/S ASP+ |
0010-01032 |
ES1011-017 |
— |
| ASSY, SUPER-E CATHODE, 200MM, IS, 5200 (Exclude ESC) |
0010-31575 0010-39852 |
ES1011-025 |
— |
| ASSY, Throttle Valve, 200MM, Etch |
0010-75226 |
ES1011-014 |
— |
| ASSY, XFMR ENCLOSURE 208V |
0010-35249 |
ES1044-009 |
— |
| ASSY,CATHODE, 200MM REV2, EMAX (Exclude ESC) |
0010-06573 0010-06572 |
ES1011-023 |
— |
| ASSY,THROTTLE VALVE |
0010-39883 |
ES1011-013 |
— |
| ASSY,VDS,750 SCCM,CENTURA (Vessel 2nd) – Include Level Sensors, MFC |
0010-10970 |
ES1011-001 |
— |
| ASSY,WAFER,LIFT,ASP+,CENTURAⅡ |
0010-26058 |
ES1011-010 |
— |
| Balls for ISO Valves, 10 |
— |
ES3033-056 |
— |
| BASIC INDEXER ASSY, NON-ENP CORROS. RESISTANT |
0010-76800 |
ES1044-002 |
— |
| Beam Profiler Interface |
0100-90286 |
ES3033-183 |
Repair |
| BEARING, 9500Xr Blade Assembly, Blade Guide, OPEN |
3060-00229 |
ES227-0210 |
— |
| Bearing, Left and Right, Scan Drive Shaft Ball screw |
3060-90120 |
ES3033-025 |
— |
| Bearing, Mercury Shaft |
3060-90084 |
ES3033-019 |
— |
| Bearing, Scan Arm Bottom |
3060-90292 |
ES3033-018 |
— |
| Bearing, Scan Arm Tension Roller |
3060-90246 |
ES3033-011 |
— |
| Bearing, Scan Arm Tension, Horizontal Groove Belt |
3060-90057 |
ES3033-020 |
— |
| Bearing, Scan Arm TOP |
3060-90254 |
ES3033-012 |
— |
| Bearing, Scan Arm V BELT Centre Tension Roller |
3060-90287 |
ES3033-013 |
— |
| Bearing, Scan Arm V BELT Encorder |
3060-90291 |
ES3033-017 |
— |
| Bearing, Scan Arm V BELT Left Tension Roller |
3060-90290 |
ES3033-016 |
— |
| Bearing, Scan Arm V BELT Light Tension Roller |
3060-90289 |
ES3033-015 |
— |
| Bearing, Scan Arm V BELT Light Tension Roller |
3060-90288 |
ES3033-014 |
— |
| Bearing, Scan Arm V BELT TOP |
3060-90286 |
ES3033-021 |
— |
| Bearing, Scan Drive Shaft Ball Screw, Lower |
3060-90076 |
ES3033-004 |
— |
| Bearing, Scan Drive Shaft Ball Screw, Lower, Inner |
3060-90077 |
ES3033-005 |
— |
| Bearing, Scan Drive Shaft Ball Screw, Upper |
3060-90075 |
ES3033-003 |
— |
| Bias Power Supply |
1140-00039 |
ES3033-145 |
Repair |
| Bias Power Supply |
1140-90158 |
ES3033-144 |
Repair |
| Blade Rail, Speedy Roller |
— |
ES3033-230 |
Upgrade |
| BLADE, CERAMIC 125-150MM |
0020-82890 |
ES227-0147 |
— |
| BLOWER, 208/480 VOLT +/-10% 3PH, 60HZ – MOTOR |
0190-76172-HD |
ES6066-001 |
— |
| BLOWER, 480 VOLT +/-10% 3PH, 60HZ – MOTOR |
0190-76172 |
ES6066-002 |
— |
| Bottom Shaft for Vertical Groove Belt |
0040-92366 |
ES3033-081 |
— |
| BRACKET, GROUND ELECTRODE, 0020-83963 |
0020-83963 |
ES227-0012 |
— |
| Bushing Repair |
— |
ES3033-214 |
Repair |
| CARD VIDEO CNTL HI-RES |
0660-90060 |
ES3033-179 |
Repair |
| Carousel Control Drive PCB（inside Wafer Loader） |
— |
ES3033-193 |
Repair |
| Cassette Indexer Bar Idler Side, Adjustment Bearing |
3060-00233 |
ES3033-010 |
— |
| Cassette Indexer DriveTube Side, Adjustment Bearing |
3060-00232 |
ES3033-009 |
— |
| CATHODE, BUTTON , SOURCE, TUNGSTEN, 3MM, 0040-96830 |
0040-96830 |
ES227-0036 |
— |
| CATHODE, LINER END, SOURCE, DIA 16, 0020-89586 |
0020-89586 |
ES227-0091 |
— |
| CHASSIS WRD MAG FILTER |
0090-90500 |
ES3033-161 |
Repair |
| CHASSIS WRD MAG FILTER |
0090-90500 |
ES3033-152 |
Repair |
| Contactor Drive |
0100-90385 |
ES3033-185 |
Repair |
| Contactor Relay in Main PDU (K2/K16） |
— |
ES3033-089 |
— |
| Converter |
0090-91246 |
ES3033-117 |
Repair |
| Converter |
— |
ES3033-107 |
Repair |
| Cooling Tube Leakage Repair |
0040-95466 |
ES3033-215 |
Repair |
| Cooling Water Line, Upgrade |
— |
ES3033-228 |
Upgrade |
| Coupling Adapter, Tilt Motor |
— |
ES3033-032 |
— |
| Coupling, Arm Motor |
0760-90018 |
ES3033-033 |
— |
| Coupling, Tilt Motor |
0760-90020 |
ES3033-031 |
— |
| COVER, COLUMN, FLIGHT TUBE, XR80 ONLY |
0020-99490 |
ES227-0567 |
— |
| Cryo Gate Valve |
— |
ES3033-206 |
Repair |
| Cryo Pump |
— |
ES3033-203 |
Repair |
| Cryo Pump Temperature Monitor PCB |
0100-90071 |
ES3033-172 |
Repair |
| DAQ MKII |
9090-00093 |
ES3033-164 |
Repair |
| DAQ TYPE "B" |
0090-90966 |
ES3033-165 |
Repair |
| DAQ TYPE "H" |
0090-90967 |
ES3033-166 |
Repair |
| DAQ Universal Type |
0660-00633 |
ES3033-167 |
Repair |
| DC Power Supply |
1140-90159 |
ES3033-128 |
Repair |
| DC POWER SUPPLY CENTURAII CONT (Same as 0190-25423) |
0190-03358 |
ES1044-006 |
— |
| DD MOTOR |
9010-01143 |
ES3033-195 |
Repair |
| DD Motor Tilt Assy Repair |
DD |
ES3033-217 |
Repair |
| Digital IO PCB |
0100-01321 |
ES1044-042 |
— |
| DPS CATH, 200MM, CESC (DPS Poly Tyep) |
0010-17221 |
ES1011-004 |
— |
| DPS Metal Assy, Enhanced DTCU |
0010-06121 |
ES1011-30 |
Repair |
| DPS POLY LOWER CHAMBER BODY – 60 WARRANTY |
0021-09625 |
ES1044-023 |
— |
| DPS, METAL, THROTTLE VALVE 5-PHASE, ASSY (Belt Type) |
0010-30135 |
ES1011-005 |
— |
| DPS, METAL, THROTTLE VALVE 5-PHASE, ASSY (Leadscrew Type) |
0010-30135 |
ES1011-006 |
— |
| DPS,CATHODE,200MM,DPS (DPS Metal Type) |
0010-30134 |
ES1011-003 |
— |
| Drive Bearing, Blade Box |
3060-00230 |
ES3033-007 |
— |
| DTCU Hoist (Basic: 2ea 1set / 3ea 1set available) |
AMAT ETCH |
ES1011-026 |
Upgrade |
| ELECTRODE, GROUND, EXTRACTION ASSEMBLY, XR80, GRAPHITE |
0020-85090 |
ES227-0548 |
— |
| ELECTRODE, SUPPRESSION, EXTRACTION ASSEMBLY, XR80, GRAPHITE |
0020-85089 |
ES227-0549 |
— |
| EPD CONTROLLER (exclude Monochromater Module) |
0240-34077 |
ES1044-004 |
— |
| Exhaust Duct, Dry Pump, S Shape for 9500/9500xR |
— |
ES3033-034 |
— |
| Exhaust Duct, Dry Pump, Straight for Quantum |
— |
ES3033-036 |
— |
| Exhaust Duct, Dry Pump, Straight for xR80, xR120, ｘR |
— |
ES3033-035 |
— |
| Extension Board |
0090-08621 |
ES3033-037 |
— |
| Extraction Bellows |
0040-96829A |
ES3033-211 |
Repair |
| Extraction Drive Motor for xR |
1080-01483 |
ES3033-065 |
— |
| Extraction/MRS Potentiometer |
1210-90555 |
ES3033-069 |
— |
| F/O INTERFACE CARD |
0660-00074 |
ES3033-178 |
Repair |
| Ferro Seal Repair |
3700-90270 |
ES3033-212 |
Repair |
| Fiber Cable with NO Spring, Plastic and Metal SMA Plug |
0150-91172 0150-91191 |
ES3033-040 |
— |
| Fiber Cable with Spring, Plastic and Metal SMA Plug |
0150-91172 0150-91191 |
ES3033-039 |
— |
| Fiber Cables, SMA Plug on Both Ends |
0150-91741 0150-91745 0150-91748 |
ES3033-038 |
— |
| FILAMENT – PFS |
0020-82135 |
ES227-0013 |
— |
| Filament Cable |
— |
ES3033-209 |
Repair |
| FILAMENT CLAMP, LEFT HAND, 90263 |
0020-86734 |
ES227-0129 |
— |
| Filament Power Supply |
1140-90090 |
ES3033-127 |
Repair |
| Filament Power Supply |
1140-00154 |
ES3033-126 |
Repair |
| Filament Power Supply |
1140-90182 |
ES3033-125 |
Repair |
| Filament Power Supply |
1140-90086 |
ES3033-124 |
Repair |
| Filament Power Supply |
1140-00057 |
ES3033-123 |
Repair |
| Filament Power Supply |
1140-90066 |
ES3033-122 |
Repair |
| FILTER, CARTRIDGE, DE-IONISING (SCREW THREAD ENDS) |
4020-90026 |
ES227-0001 |
— |
| Finger, Gripper, Quantum |
0021-90783 |
ES3033-045 |
— |
| Finger, Hollow Gripper, Black |
0020-84222 |
ES3033-041 |
— |
| Finger, Hollow Gripper, White |
0020-85167 |
ES3033-042 |
— |
| Finger, std Gripper, 125mm, Black |
0020-98985 |
ES3033-043 |
— |
| Finger, std Gripper, 125mm, White |
0020-96466 |
ES3033-044 |
— |
| FIXED RESTRAINT,9500XR WHEEL, 150MM 0 DEG, SI COATED |
0040-97539 |
ES227-0266 |
— |
| Flash Memory Drive |
— |
ES3033-231 |
Upgrade |
| Flight Tube Leakage Repair |
0040-94358 |
ES3033-216 |
Repair |
| Flight Tube, Inner Graphite |
— |
ES3033-234 |
Upgrade |
| Flight Tube, Outer Graphite |
— |
ES3033-233 |
Upgrade |
| FOCUS Power Supply |
0090-91415 |
ES3033-147 |
Repair |
| Focus Resistor UNIT |
0090-90217 |
ES3033-114 |
Repair |
| GAP SERVO(0100-00991、0100-91055) |
0100-00991 |
ES3033-173 |
Repair |
| Gas Interlock PCB(0100-90590) |
0100-90590 |
ES3033-171 |
Repair |
| Gas Interlock PCB(0100-99008、0100-99011) |
0100-99008 |
ES3033-170 |
Repair |
| GEAR ORIENTOR, 0.5 30T 3 BORE. (TOOTHED SPROCKET WHEEL) |
3330-90023 |
ES227-0061 |
— |
| Geometry Spacer Upgrade |
— |
ES3033-232 |
Upgrade |
| German Potentiometer, arm |
1210-90737 |
ES3033-068 |
— |
| GRAPHITE – COOLED TUBE SHIELD (FOR IHC SOURCE MACHINES) |
0020-86842 |
ES227-0220 |
— |
| GRAPHITE – TOP SHIELD |
0020-85053 |
ES227-0180 |
— |
| GRAPHITE , LINER, CLAMP PLATE, GATE VALVE |
0020-83172 |
ES227-0146 |
— |
| Graphite, 9AP95002 Beamstop, Single Position |
0020-82832 |
ES227-0097 |
— |
| GRAPHITE, ARC CHAMBER |
0020-89990 |
ES227-0212 |
— |
| GRAPHITE, SHIELD, COOLED TUBE, XR80 |
0040-02238 |
ES227-0595 |
— |
| GRIPPER FINGER, SHORT, EXTENDED, NON CONDUCTIVE |
0020-85167 |
ES227-0111 |
— |
| Grundfos Pump, Heat Exchange Recirculation Pump (successor) |
— |
ES3033-046 |
— |
| Guide Bearing, Blade Box Assy |
3060-00229 |
ES3033-006 |
— |
| Guide Bearing, Cassette Indexer |
3060-00231 |
ES3033-008 |
— |
| GUIDE, GRAPHITE SHIELD,( TUBE BOTTOM) |
0020-83583 |
ES227-0143 |
— |
| HANDLER, SHOE PICK-UP, 30 DEGREES 3E/EX, 150MM |
0040-97186 |
ES227-0040 |
— |
| Heat Exchange Pump |
— |
ES3033-204 |
Repair |
| Heat Exchanger Core, Female |
— |
ES3033-048 |
— |
| Heat Exchanger Core, Male |
— |
ES3033-047 |
— |
| Heat Exchanger Filter Ball |
— |
ES3033-049 |
— |
| Heat Exchanger Filter Ball, with Pressure Gauge |
— |
ES3033-050 |
— |
| Heatsink, Refurbishment |
— |
ES3033-235 |
Upgrade |
| High Power Supply |
— |
ES3033-104 |
Repair |
| HOLDER, GRAPHITE, PRE DEFINING APERTURE |
0020-85165 |
ES227-0211 |
— |
| Hollow Gripper, Y-arm, 200mm |
0040-95199 |
ES3033-001 |
— |
| HV STACK |
0090-91917 |
ES3033-106 |
Repair |
| HV STACK（60KV） |
0090-90388 |
ES3033-110 |
Repair |
| HV STACK（60KV） |
0090-91130 |
ES3033-100 |
Repair |
| HV STACK（60KV）LEAP Q2 |
0090-91917 |
ES3033-103 |
Repair |
| HV Unit |
1140-00265 |
ES3033-111 |
Repair |
| I/V Convertor Power Supply |
0100-91105 |
ES3033-177 |
Repair |
| I/V Convertor Wheel |
0100-00958, 94054, 91035 |
ES3033-176 |
Repair |
| INSERT RING |
0200-05032 |
ES1099-023 |
— |
| INSERT RING 8 |
0200-10446 |
ES1099-022 |
— |
| INSERT RING 8′ |
0200-10446 |
ES1099-017 |
— |
