| INSERT RING TG,SUPER-e |
0200-01239 |
ES1099-024 |
— |
| INSERT, NEUTRAL, FLIGHT TUBE, 10045339 |
0020-98879 |
ES227-0009 |
— |
| INSULATOR, PORCELAIN, SM7, 3420-90042 |
0021-90020 |
ES227-0026 |
— |
| Ionizer Aero Bar |
— |
ES3033-054 |
— |
| Isolation Valve O/H（Source） |
— |
ES3033-207 |
Repair |
| JUNCTION BOX ASSY, COMMON CH. AC POWER, ETCH C-II |
0190-06329 |
ES1044-016 |
— |
| KIT, REFURBISH, PENNINE, AIM TUBE |
— |
ES227-0141 |
— |
| L-COLLAR.,COLUMNAR Si 1.5mm |
0200-03233 |
ES1099-018 |
— |
| L-COLLAR.,COLUMNAR Si 1.5mm STEP |
0200-03233 |
ES1099-019 |
— |
| L-COLLAR.,COLUMNAR Si 1.5mm STEP(P) |
0200-03233 |
ES1099-021 |
— |
| L-COLLAR.,COLUMNAR Si 1.5mm STEP(POLY) |
0200-03233 |
ES1099-020 |
— |
| LAMP MODULE BASIC ASSY P5000(Silver type) |
0010-09237 |
ES1044-014 |
— |
| LAMP MODULE,1000W DELTA,ASP,MXP CENTURA |
0010-10453 |
ES1011-008 |
— |
| LC BEAM STOP, GRAPHITE, SHIELDING 1 |
0020-83786 |
ES227-0006 |
— |
| Leadscrew 300mm with Nut and Coupling |
0045-90049 0690-90107 |
ES3033-057 |
— |
| Leadscrew 312mm with Nut and Coupling |
3710-90010 0690-90107 |
ES3033-058 |
— |
| LEADSCREW, INDEXER, 300LG C/W NUT |
0045-90049 |
ES227-0310 |
— |
| LED, Status Lamp, Green |
— |
ES3033-059 |
— |
| LED, Status Lamp, Red |
— |
ES3033-061 |
— |
| LED, Status Lamp, White |
— |
ES3033-060 |
— |
| LID ASSY,CLAMP,KALREZ,SLIT LINER DOOR |
0010-39736 |
ES1011-012 |
— |
| Lift Pin Adjustable MxP+ – CERAMIC ajustable |
0021-09105 – EQUIV |
ES1011-029 |
— |
| Lift Pin Short – MxP+ – CERAMIC non ajustable |
0020-34040 – EQUIV |
ES1011-028 |
— |
| Light Pen |
1120-00830 |
ES3033-062 |
— |
| Limit Switch |
— |
ES3033-080 |
— |
| LINER END, ANTI CATHODE, SOURCE, 0020-86740 |
0020-86740 |
ES227-0018 |
— |
| LINER, INNER, FLIGHT TUBE, 10044806, 0020-98878 |
0020-98878 |
ES227-0099 |
— |
| Lock Nut, Scan Drive Shaft Ball Screw, Upper |
3500-90027 |
ES3033-002 |
— |
| Low Power Supply |
— |
ES3033-105 |
Repair |
| M.F. AUXILIARY BOX, CENTURA |
0010-13033 |
ES1044-013 |
— |
| Magnet Power Supply |
0090-90353 |
ES3033-139 |
Repair |
| MCVD Chamber Interface PCB |
0190-35208 |
ES1044-044 |
— |
| METAL R1 DTCU ASSY REPAIR |
0010-30125 |
R-ES1011-032 |
Repair |
| MFC, BF3 5SCCM, GF120, MASS FLOW CONTROLLOR |
— |
ES227-0536 |
— |
| MODULE, 9500XR GAS SYSTEM, BF3 HIGH PRESSURE GAS, 0010-91412 |
0010-91412 |
ES227-0464 |
— |
| Motor electric to AM spec |
1080-90047 |
— |
— |
| Motor, 9500XR, MRS Drive |
1080-90078 |
ES227-0493 |
— |
| MOUNTING, ELECTRODE, SUPPRESSION, 0020-83974 |
0020-83974 |
ES227-0028 |
— |
| MOVING CLIP ASSY, 9500XR WHEEL, NEW, 150MM 0 DEG |
0010-99165 |
ES227-0265 |
— |
| Moving Clips Actuator Repair |
— |
ES3033-220 |
Repair |
| Moving Clips, Actuator Speed Adjuster |
— |
ES3033-227 |
Upgrade |
| Moving Clips, Pin Improvement 125, 150mm |
— |
ES3033-224 |
Upgrade |
| Moving Clips, Pin Improvement 200mm |
— |
ES3033-225 |
Upgrade |
| Moving Clips, Pin Improvement 300mm |
— |
ES3033-226 |
Upgrade |
| MRS Mini Motor |
1080-90078 |
ES3033-064 |
— |
| MxP+ SIMPLE CATHODE, SUP, 200MM, POS B/C (Exclude ESC, HV Module) |
0010-04489 0010-04487 |
ES1011-024 |
— |
| PCB Assembly, PWBA Blade control |
0100-94036 |
— |
— |
| PerAccel Stack |
0090-91917 |
ES3033-109 |
Repair |
| Plasma Arc Current PCB |
0100-91086 |
ES3033-191 |
Repair |
| PMAC CARD |
— |
ES3033-192 |
Repair |
| Post Accel Converter |
0090-90589 |
ES3033-119 |
Repair |
| Post Accel Stack |
0090-90352 |
ES3033-118 |
Repair |
| Post-Accel Inverter Unit |
— |
ES3033-115 |
Repair |
| Potentiometer, Arm |
1210-90737 D |
ES3033-066 |
— |
| Potentiometer, Blade |
1210-90731 |
ES3033-067 |
— |
| Power Supply OL400 / 602 / 19 |
— |
ES3033-108 |
Repair |
| Power Supply, Multi Purpose, 45W 4Outputs |
0090-91640 |
ES3033-071 |
— |
| Power Supply, Multi Purpose, 65W 4Outputs |
0090-91641 |
ES3033-070 |
— |
| PRE-ACCEL STACK |
0090-90388 |
ES3033-120 |
Repair |
| PreAccel Inverter |
0090-90216 |
ES3033-113 |
Repair |
| PreAccel Power SET |
9090-00398 |
ES3033-121 |
Repair |
| PreAccel Power Supply |
0090-90164 |
ES3033-112 |
Repair |
| PreAccel Power Supply |
— |
ES3033-102 |
Repair |
| PreAccel Power Supply |
0090-91131 |
ES3033-101 |
Repair |
| PSU G2 |
1140-90164 |
ES3033-149 |
Repair |
| Pump Motor |
0190-18278 |
ES3033-205 |
Repair |
| PWB ASSY CASSETTE INDEXER |
0100-91019 |
ES3033-169 |
Repair |
| PWBA I to V converter |
0100-90192 |
— |
— |
| PWBA,ARC MOD PSU |
0100-90453 |
ES3033-181 |
Repair |
| QUANTUM X MASTER PC |
9090-00969 |
ES3033-208 |
Repair |
| REGULATOR, BF3 HIGH PRESSURE, SS TIED DIAPHRAGM |
— |
ES227-0368 |
— |
| REPAIR – Asp Wafer Lift Control |
0190-22326 |
R-ES1044-037 |
Repair |
| Resin Bracket to fix std Gripper Cylinder |
0020-94191 |
ES3033-063 |
— |
| RESISTOR POT, ARM FEEDBACK |
1210-90737 |
ES227-0087 |
— |
| RETAINER, HOOK, IHC, 9AP95002, A39180, 0021-90036 |
0021-90036 |
ES227-0409 |
— |
| RETROFIT KIT, 5 PH DRIVER HP/HP+ ROBOT, CENTURA |
0241-09149-HD |
ES6066-004 |
— |
| Ring for ISO Valves |
— |
ES3033-055 |
— |
| Roller Spring |
0020-83961 |
ES3033-072 |
— |
| Rotary Connector, Mercury tip |
0720-90443 |
ES3033-073 |
— |
| Rotary Seal, Non VA-Type |
3700-90141 |
ES3033-075 |
— |
| Rotary Seal, VA-Type |
3700-90274 |
ES3033-074 |
— |
| SACVD CER HTR ASSY, 200MM PRODUCER |
0010-61428, 0010-25415, 0010-03840 |
ES1044-032 |
— |
| SACVD Heater |
0010-05257 |
ES1044-022 |
— |
| SCAN AMP |
0090-91597 |
ES3033-159 |
Repair |
| SCAN MOTOR |
1080-90021 |
ES3033-198 |
Repair |
| SCAN MOTOR |
— |
ES3033-197 |
Repair |
| Scan Sensor, LM Guide Rail |
— |
ES3033-229 |
Upgrade |
| Serial Communication I/F Driver |
0100-90254 |
ES3033-175 |
Repair |
| SHAFT, DRIVE , ORIENTATOR ,OUTER |
0020-99289 |
ES227-0066 |
— |
| Shield Bearing, Cassette Indexer Guide |
3060-90277 |
ES3033-022 |
— |
| Shield Bearing, Cassette Indexer, Barldler Side Adjustment |
3060-90279 |
ES3033-024 |
— |
| Shield Bearing, Cassette Indexer, Drive Tube Side Adjustment |
3060-90278 |
ES3033-023 |
— |
| SHIELD GUIDE TUBE, GRAPHITE, SIDE FRONT |
0020-83581 |
ES227-0173 |
— |
| SHIELD, GRAPHITE, 55 X 94 |
0020-82474 |
ES227-0084 |
— |
| Shoe Pick Up 125mm 3mmEDGE PEEK |
— |
ES3033-084 |
— |
| Shoe Pick Up 150mm 3mm EDGE 30 Degree PEEK |
0040-97186 |
ES3033-087 |
— |
| Shoe Pick Up 200mm 1.5mm EDGE Semitron, Black |
0041-35673 |
ES3033-086 |
— |
| Shoe Pick Up 200mm 3mm EDGE 30 degree PEEK |
0040-97187 |
ES3033-085 |
— |
| SI INSERT RING(PRO) |
0200-03736K |
ES1099-026 |
— |
| SI INSERT RING(PRO) |
0200-03736K |
ES1099-015 |
— |
| SI INSERT RING(PRO) |
0200-03736K |
ES1099-003 |
— |
| SI TOP RING |
0200-03559K |
ES1099-010 |
— |
| SI TOP RING |
0200-03559K |
ES1099-002 |
— |
| SI TOP RING(G) |
0200-03559K |
ES1099-014 |
— |
| SI TOP RING(PRO) |
0200-03576K |
ES1099-016 |
— |
| SI TOP RING(PRO) |
0200-03576K |
ES1099-004 |
— |
| SLEEVE OVEN NOZZLE, 0020-81226 |
0020-81226 |
ES227-0190 |
— |
| SLEEVE, BLANK, IHC ARC CHAMBER |
0020-85074 |
ES227-0189 |
— |
| SLEEVE, FILTER , 4020-90040 |
4020-90040 |
— |
— |
| SLIT LINER DOOR, ASSEMBLY, EMAX 200MM |
0010-27241 |
ES1011-011 |
— |
| SLIT, PRE MRS, 10049589, 0020-84988 |
0020-84988 |
ES227-0079 |
— |
| SLIT, PRE-MRS, XR80, GRAPHITE |
0020-85069 |
ES227-0551 |
— |
| Solenoid Valve, 3-Port |
— |
ES3033-093 |
— |
| Solenoid Valve, 3-Way |
3870-90121 |
ES3033-092 |
— |
| Solenoid Valve, 3/2Way |
— |
ES3033-095 |
— |
| Solenoid Valve, 4 Port |
— |
ES3033-094 |
— |
| Source Extraction Assy Repair |
0090-91192 |
ES3033-213 |
Repair |
| Source FlowMeter, 1000LPH |
— |
ES3033-078 |
— |
| Source FlowMeter, 1600LPH |
— |
ES3033-079 |
— |
| Source FlowMeter, 160LPH |
— |
ES3033-076 |
— |
| Source FlowMeter, 250LPH |
— |
ES3033-077 |
— |
| Source MAG PSU |
1140-90056 |
ES3033-138 |
Repair |
| Source MAG PSU |
0090-91444 |
ES3033-137 |
Repair |
| Source MAG PSU |
9090-00046 |
ES3033-136 |
Repair |
| Source MAG PSU ASSEMBLY |
9090-01267 |
ES3033-162 |
Repair |
| Source Magnet Control PCB |
0100-90872 |
ES3033-163 |
Repair |
| Source Magnet Power Supply |
9090-00046 |
ES3033-146 |
Repair |
| SOURCE, BASE, LINER |
0020-86737 |
ES227-0022 |
— |
| SOURCE, FILAMENT GUIDE, (USED IN 2’S) |
0020-87508 |
ES227-0104 |
— |
| SPACER, GRAPHITE, 0020-83227 |
0020-83227 |
ES227-0101 |
— |
| SPACER, GRAPHITE, EXTRACTION ASSEMBLY, XR80 ONLY |
0020-83227 |
ES227-0552 |
— |
| SPIN AMP |
0090-91124 |
ES3033-158 |
Repair |
| SPIN AMP |
1140-90022 |
ES3033-157 |
Repair |
| SPIN MOTOR |
1080-90009 |
ES3033-201 |
Repair |
| SPIN PSU |
0090-91122 |
ES3033-156 |
Repair |
| SPIN/SCAN PPower Supply Motech MP80 |
0090-91596 |
ES3033-155 |
Repair |
| Spring Drive |
0020-83142 |
ES3033-083 |
— |
| Spring for 8 " Moving Clips |
— |
ES3033-028 |
— |
| Spring, 12 " Moving Clips |
— |
ES3033-026 |
— |
| Spring, 5" & 6 " Moving Clips |
— |
ES3033-027 |
— |
| Stepper Controller 5-Phase |
0100-90172 |
ES3033-188 |
Repair |
| STRAP FILAMENT |
0020-86731 |
ES227-0247 |
— |
| SUPPORT BAR,CATHODE, TUNGSTEN |
0040-96352 |
ES227-0023 |
— |
| SUPPORT, ARC CHAMBER, UPPER, 0040-96349 |
0040-96349 |
ES227-0467 |
— |
| SUPPRESSION ELECTRODE, 0020-84523 |
0020-84523 |
ES227-0115 |
— |
| SUPPRESSION RING, GRAPHITE, 0020-84055 |
0020-84055 |
ES227-0053 |
— |
| Supressionn Power Supply |
0090-93023 |
ES3033-143 |
Repair |
| Supressionn Power Supply |
1140-90115 |
ES3033-142 |
Repair |
| Supressionn Power Supply |
0090-90364 |
ES3033-141 |
Repair |
| Supressionn Power Supply |
0090-90461 |
ES3033-140 |
Repair |
| TABLE POSITIONING 3 POS 2" TRAVEL 10LBS PAYLOAD |
0190-23117 |
ES1011-018 |
— |
| Temp Control PCB |
0100-90994 |
ES3033-187 |
Repair |
| Tetroad G2 Resistor Repair |
9090-00170 |
ES3033-219 |
Repair |
| Thermistor Gauge Controller |
0100-90077 |
ES3033-186 |
Repair |
| TILT Cable |
0150-93094 |
ES3033-210 |
Repair |
| Tilt Drive Card |
0100-91042 |
ES3033-148 |
Repair |
| Tilt interlock |
0100-90998 |
ES3033-182 |
Repair |
| Timer Relay Inside DD I/F chasis |
— |
ES3033-088 |
— |
| Top Ferro (Non-VA type） |
3700-90217 |
ES3033-202 |
Repair |
| TOP RING,NM POLY, STEPPED,300MM EMAX |
0200-02301 |
ES1099-025 |
— |
| TRANSDUCER, HP BF3 GAS MODULE, PRESSURE -1 TO 5KG CM2 |
1350-90008 |
ES227-0446 |
— |
| TRANSDUCER, HP BF3 GAS MODULE, PRESSURE 0 TO 2000 KGF/CM2 |
1350-90009 |
ES227-0447 |
— |
| TRANSFER ARM MOTOR |
1080-90047 |
ES3033-196 |
Repair |
| Transfer Arm, Position Shift Detector |
— |
ES3033-223 |
Upgrade |
| U Shape Cover, Hollow Gripper, 200mm A-Type |
0020-05764 |
ES3033-030 |
— |
| U Shape Cover, Hollow Gripper, 200mm A-Type |
0020-83302 |
ES3033-029 |
— |
| U-Shape Housing, Hollow Gripper, 150mm |
— |
ES3033-052 |
— |
| U-Shape Housing, Hollow Gripper, 200mm |
0020-83729 |
ES3033-051 |
— |
| Universal Joint, Horizontal Groove |
— |
ES3033-091 |
— |
| Universal Joint, Vertical Groove |
— |
ES3033-090 |
— |
| UPGRADES |
— |
— |
Upgrade |
| Vacuum Control Drive |
0100-90177 |
ES3033-184 |
Repair |
| VALVE GATE BODY MECHANISM W/O SOLENOID W/SRV CABLE (For Super-e CH) |
3870-02018 |
ES1011-021 |
— |
| VALVE GATE PNEU-ACTR PENDULUM 200 ISO-F (for EMAX CH) |
3870-00150 |
ES1011-022 |
— |
| VANE, MRS, CX2305 (USED IN PAIRS) |
0020-99710 |
ES227-0010 |
— |
| VDS FACILITY COMPONENTS INTERFACE UNIT |
0010-10106 |
ES1011-007 |
— |
| Vendor Interface pre-accel PCB |
0100-94089 |
ES3033-168 |
Repair |
| VESSEL ASSY, SINGLE, H2O VDSII |
0010-09823 |
ES1011-002 |
— |
| Vibration Sensor |
1040-90039 |
ES3033-096 |
— |
| Vibration Sensor |
0020-96167 |
ES3033-082 |
— |
| VME CENTURA DC POWER SUPPLY for Centura-I |
0190-35076 |
ES1044-005 |
— |
| VME2 ASSY CONTROL MCE |
0010-01246 |
ES1044-017 |
— |
| Wafer Arm Interlock |
0100-90237 |
ES3033-190 |
Repair |
| Wafer Arm Servo |
0100-90773 |
ES3033-189 |
Repair |
| Wafer Loader Door, Air-Cylinder Drive |
— |
ES3033-221 |
Upgrade |
| Wafer Loader Door, Circuit Upgrade |
— |
ES3033-222 |
Upgrade |
| Wafer Loader Isolation Valve Cylinder Repair |
— |
ES3033-218 |
Repair |
| Washer Lock |
0020-81151 |
ES3033-097 |
— |
| wCHAS ASY PWR UNIT FOCUS |
0090-90167 |
ES3033-150 |
Repair |
| wCHAS WRD INVERTER FOCUS |
0090-90215 |
ES3033-151 |
Repair |
| Weight Balance Large, 154g |
— |
ES3033-099 |
— |
| Weight Balance Small, 59g |
— |
ES3033-098 |
— |
| Wheel Insulator 1 |
0020-90421 |
ES3033-053 |
— |
| Wide Body Loadlock Assy(A/B full set) |
0242-76372 |
ES1044-001 |
— |
| wMAGNET DRIVE ASSY (Same as 0190-02703) |
0190-70060 |
ES1044-012 |
— |
| wMOTOR ASSY, INDEXER |
0090-20004 |
ES1044-018 |
— |
| wPower Supply, 3PH 220 V I/P |
1140-90022 |
ES3033-116 |
Repair |
| wPump UNIT FOR FREON FREE H/EX |
3620-90080 |
ES3033-200 |
Repair |
| ｗPump,WATER |
3620-90044 |
ES3033-199 |
Repair |
