0040-96352
SUPPORT BAR,CATHODE, TUNGSTEN

0040-96352 Tungsten cathode support bar for Applied Materials ion sources

The 0040-96352 Support Bar, Cathode, Tungsten is a precision tungsten component in the ion source of Applied Materials ion implantation equipment. It mechanically supports the cathode within the source’s hot zone, holding its position and alignment while enduring extreme temperature and electrical stress for every hour the beam runs.

Ion source hardware lives in one of the harshest environments in the fab. Support components like this bar are engineered from tungsten because ordinary materials simply cannot survive the duty.

Functional role in the ion source

• Cathode support holds the cathode in its precise operating position within the source.
• Thermal endurance retains strength and geometry at the source’s operating temperatures.
• Electrical duty serves within the source’s electrical environment without degradation.
• Alignment stability keeps source geometry consistent, supporting stable beam extraction.

Wear and replacement indicators

• Erosion, pitting or deformation observed at source rebuild.
• Embrittlement or cracking after accumulated thermal cycles.
• Beam instability or declining source performance between rebuilds.

Maintenance best practices

• Inspect and replace during scheduled source rebuilds alongside cathodes and other hot-zone parts.
• Handle cleanly; contamination on hot-zone hardware shortens source life.
• Verify correct positioning and alignment at rebuild before returning the source to service.

Why source the 0040-96352 from ESCT Fab Support

ESCT Fab Support supplies the 0040-96352 as a verified 2nd New OEM-compatible tungsten source component for Applied Materials ion implanters, keeping source rebuild kits complete without OEM lead times.

Frequently asked questions

What is the 0040-96352 tungsten cathode support bar used for?

It is a tungsten support bar for the cathode in the ion source of Applied Materials ion implantation equipment, mechanically supporting the cathode while withstanding the source’s extreme thermal and electrical environment.

Why tungsten?

The ion source region runs at very high temperatures under electrical load. Tungsten’s exceptional melting point, strength at temperature and low vapour pressure make it the standard material for source hot-zone hardware.

Is this a consumable?

Yes. Source hot-zone components erode and degrade with beam hours and are replaced during routine source rebuilds.

What are signs it needs replacement?

Erosion, deformation or embrittlement found at source rebuild, beam instability or source performance drift, and shortened source life between rebuilds.

Can its condition affect the beam?

Yes. Degraded source hardware changes the cathode’s geometry and stability, contributing to beam current instability and tune-up difficulty.

Is compatibility verification important before ordering?

Yes. Configuration and fitment should be confirmed against OEM part number 0040-96352 and your tool configuration before installation.

Can ESCT verify compatibility before shipment?

Yes. ESCT supports form, fit and functional verification aligned with OEM requirements before the part ships.

Is this an original OEM part?

This product is supplied as a 2nd New OEM-compatible part, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.

Summary

The 0040-96352 tungsten cathode support bar holds the cathode stable in the punishing hot zone of Applied Materials ion sources. Replacing it at rebuild protects source stability and beam performance. Sourcing it from ESCT Fab Support gets you verified quality, reduced lead times, and expert technical support, keeping your equipment stable, efficient, and production-ready.

Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0040-96352. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.

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