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The Graphite Extraction Assembly Spacer (AMAT OEM P/N 0020-83227) is a precision-machined, high-purity graphite standoff that sets and maintains the dimensional relationship between elements of the extraction electrode assembly on Applied Materials XR80 ion implanters. As its designation makes clear, this spacer is configured for the XR80 source only: the electrode geometry, gap dimensions and mounting features differ across implanter source families, so the spacer is tailored to that specific platform rather than being a universal part.
In an ion source, ions are formed inside the arc chamber and then drawn out through the extraction aperture by a set of biased electrodes. The extraction assembly holds those electrodes, typically a puller or suppression electrode and ground electrode, at carefully defined separations and alignments. The spacer is the structural element that establishes those separations, holding the electrodes apart by a fixed distance while tolerating the heat, sputtered material and high electric fields present at the source exit. Although it carries no signal itself, the spacer’s dimensional stability directly governs the extraction field profile that shapes the emerging ion beam.
Graphite is chosen for this role because it offers excellent thermal stability, low outgassing under high vacuum, resistance to ion bombardment and predictable machinability, and it does not introduce metallic contamination that would otherwise be sputtered into the beam. As a consumable that sits directly in the harshest part of the source, the extraction spacer is a routine maintenance item, and keeping serviceable replacements on the shelf is central to minimising source rebuild downtime.
Within the XR80 extraction optics, the spacer performs several interlocking jobs that together determine whether the source can deliver a stable, well-defined beam:
The spacer is produced from fine-grain, high-purity graphite selected for low ash content and minimal trapped volatiles. In an extraction region operating under high vacuum and intense ion flux, that purity matters: low outgassing helps the source reach and hold base pressure, while low metallic impurity keeps the spacer from becoming a sputter source of contaminants that could be drawn into the beam and implanted into the wafer. The material’s high sublimation temperature lets it sit close to the hottest part of the source without melting or creeping out of dimension.
The value of the spacer lies in how faithfully it reproduces the designed electrode geometry. Because the extraction gap sets the field gradient that pulls ions from the plasma, even small changes in spacer thickness or flatness shift the perveance limit, the beam divergence and the achievable extracted current. A spacer machined to XR80 dimensions keeps the source at its intended extraction voltage and current envelope, and that beam profile and emittance match what the implanter’s tuning algorithms expect.
A worn, contaminated or out-of-tolerance extraction spacer rarely fails dramatically; instead it degrades source behaviour in ways that eat into uptime and process margin:
Continuous exposure to energetic ions and stray beam strike erodes graphite surfaces over time. As the spacer thins or develops eroded faces, the extraction gap opens up and the field profile changes, gradually moving the source away from its tuned operating point. This is the expected end-of-life mechanism that makes the spacer a planned consumable.
Sputtered material and dopant species redeposit on the spacer as films and flakes. These deposits can become conductive, providing leakage paths that promote high-voltage arcing, and when they spall they release particulate into the source. Both effects undermine beam stability and contamination control, and they are a primary reason for scheduled spacer replacement.
Repeated heating and cooling, combined with the inherent brittleness of graphite, can lead to micro-cracking, edge chipping or fracture, particularly if the part is over-torqued or mishandled during a rebuild. A cracked spacer loses dimensional integrity and can shed debris, so any visible cracking warrants immediate replacement rather than reuse.
The spacer is replaced during a source rebuild or preventive-maintenance cycle on the XR80 source. Always follow the implanter’s documented service procedures and lockout requirements; the steps below summarise good practice:
Because the extraction spacer is a wear item tied directly to source-life intervals, holding qualified stock prevents a single consumable from stalling a rebuild and idling an implanter. ESCT Fab Support supplies this XR80 spacer as a cost-effective, fit-and-function alternative to single-source OEM procurement:
It sets and maintains the fixed separation and alignment between extraction electrodes at the source exit. That spacing defines the extraction field that pulls ions from the plasma, so the spacer’s dimensions directly influence beam current, focus and stability while also acting as a high-temperature, low-contamination standoff.
No. This is supplied as a new OEM-compatible part, verified to the form, fit and function of AMAT OEM P/N 0020-83227. It is not an original OEM-branded component and is offered as an independent alternative to single-source procurement.
It is configured for the XR80 source only. Extraction electrode geometry and spacer dimensions vary between source families, so this part should be used only in the XR80 configuration it is specified for. If you are unsure which source variant you are servicing, confirm against your tool documentation before ordering.
It is a consumable and is typically changed at scheduled source rebuilds or preventive-maintenance intervals, or sooner if inspection reveals substantial erosion, cracking, heavy deposition or particle shedding. Replacement frequency depends on beam current, species and duty cycle, so follow your site’s source-life data.
High-purity graphite combines high-temperature tolerance, low outgassing and good sputter resistance without introducing metallic contamination into the beam. It machines to tight tolerances and behaves predictably under thermal cycling, which suits the demanding extraction environment far better than most metals.
The part carries ESCT P/N ES227-0552 against AMAT OEM P/N 0020-83227, with a typical lead time of about 2.5 weeks. Quoting the ESCT part number speeds reordering and keeps your spares records consistent.
The Graphite Extraction Assembly Spacer (AMAT OEM P/N 0020-83227, ESCT P/N ES227-0552) is a high-purity graphite consumable that fixes the electrode spacing and alignment within the extraction assembly of the AMAT XR80 ion source. By holding the extraction gap to specification while resisting heat, sputtering and contamination, it underpins stable beam current, clean beam profiles and repeatable source rebuilds. As a wear item subject to erosion, deposition and thermal stress, it is best held as planned spare stock so that a low-cost consumable never becomes the bottleneck in a source rebuild. ESCT Fab Support offers it as a fit-and-function alternative with a short, predictable lead time.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0020-83227. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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