OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The 0020-85165 HOLDER, GRAPHITE, PRE DEFINING APERTURE is a precision-engineered process component used in Applied Materials semiconductor equipment to support aperture positioning, beam or process definition control, and stable chamber performance in demanding semiconductor environments.
Installed within process chamber or source-related assemblies, this graphite holder supports secure positioning of the pre-defining aperture while contributing to controlled process geometry, stable process boundaries, and repeatable subsystem performance. In semiconductor applications where aperture definition influences process uniformity, beam shaping, or controlled material interaction, reliable holder integrity is critical to performance and uptime.
Because graphite chamber components operate under sustained thermal loading, particle-sensitive conditions, reactive chemistries, and process-induced wear, erosion, dimensional drift, contamination buildup, or surface degradation can contribute to process instability, aperture misalignment, particle risk, or increased maintenance frequency. The 0020-85165 is engineered to support durable performance under demanding fab conditions.
The 0020-85165 functions as a critical aperture support and process-conditioning component.
Core functions include:
In many Applied Materials platforms, this holder may operate alongside related hardware such as 0020-85164, 0020-85166, 0200-01042, 0190-09362, and 0021-11492, supporting broader chamber and subsystem stability.
The holder supports controlled aperture positioning and process definition.
Key performance characteristics include:
Stable process definition is critical to repeatable process outcomes.
Material behavior is central to component performance.
Performance attributes may include:
Material stability helps preserve subsystem consistency over time.
Designed for demanding semiconductor production conditions.
Durability characteristics may include:
Reliable component condition helps support yield and uptime.
The 0020-85165 may operate alongside related components including:
Together these components support broader process stability and chamber reliability.
The 0020-85165 can directly influence process consistency and equipment availability.
Potential impacts of wear or degradation include:
Replacing a degraded graphite holder can restore subsystem stability and improve maintenance readiness.
Process exposure may gradually affect holder condition.
Indicators include:
Component condition may influence cleanliness and process stability.
Symptoms may include:
Long-term duty may contribute to structural wear.
Indicators include:
Wear in the 0020-85165 may also increase stress on associated hardware such as 0020-85164 or 0020-85166, particularly in tightly integrated chamber assemblies.
To support best performance:
The 0020-85165 Holder, Graphite, Pre Defining Aperture is an Applied Materials OEM part.
Key considerations:
Maintaining strategic inventory of the 0020-85165 and related components such as 0020-85164, 0020-85166, and 0200-01042 can reduce downtime exposure and improve maintenance readiness.
It supports and positions the pre-defining aperture within the subsystem, helping maintain controlled geometry, process definition, and stable chamber performance.
It generally refers to an aperture involved in defining or conditioning a beam, flow path, or process zone geometry prior to downstream process interaction, depending on tool architecture.
Because holder stability helps maintain aperture positioning, which can influence process consistency, alignment, and repeatable subsystem performance.
Graphite is often used for its thermal stability, process compatibility, and suitability in demanding semiconductor environments.
Common indicators include:
Yes. Degraded geometry or positioning stability may contribute to process variation or subsystem instability.
Yes. Surface degradation or wear may increase particle risk depending on process conditions.
Yes. Performance degradation may contribute to maintenance interventions, subsystem instability, or unplanned downtime.
Issues may be identified through PM inspections, geometry checks, particle excursions, process trend analysis, or subsystem performance drift.
Yes. Alignment and subsystem verification should be performed after replacement before returning equipment to service.
Yes. Small geometry changes can sometimes influence subsystem performance before major wear is obvious.
Incorrect hardware may affect fit, alignment, aperture positioning, or process performance.
Yes. Dimensional, material, and subsystem compatibility should be confirmed against OEM requirements.
Yes. ESCT supports functional and compatibility verification aligned with OEM requirements.
Depending on availability, associated holders, apertures, and related chamber hardware may also be supported.
This product is supplied as a 2nd New OEM-compatible assembly, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.
The 0020-85165 Holder, Graphite, Pre Defining Aperture is a critical process component supporting aperture stability, process definition control, and subsystem reliability in Applied Materials systems.
Its condition can directly influence process repeatability, contamination control, and equipment uptime.
Sourcing through ESCT Fab Support provides verified quality, faster availability, and semiconductor-focused expertise to help maintain reliable, production-ready subsystem performance.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0020-85165. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
