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The Graphite Beamstop, Single Position is a high-purity graphite beam-termination component used in the beamline of Applied Materials (AMAT) ion implanter systems. Designated by AMAT part number 0020-82832 and carrying the internal sub-assembly identifier 9AP95002, it is the machined graphite element that physically intercepts and absorbs an unwanted or non-implanting ion beam, dissipating the beam’s kinetic energy as heat while containing the resulting sputtered material and secondary electrons. In a tool family where a focused beam can carry tens of milliamperes at energies from a few keV to several hundred keV, the beamstop is the surface that takes the punishment so that the end-station, wafer and downstream optics do not.
The “single position” designation indicates that this beamstop occupies one fixed location in the beam path, typically used for beam setup, tuning, dose verification or a parked/blanked beam state, rather than being part of a multi-aperture or indexed array. It sits in the high-vacuum beamline downstream of the analyser magnet and resolving aperture, in the region where the beam is characterised before it is allowed to reach the wafer. Because it is fabricated from graphite rather than a metal, the component is deliberately chosen for its combination of low atomic number, high thermal tolerance and low sputter yield, all of which directly limit metallic contamination of the process environment.
Although it is a passive, non-electronic part, the beamstop’s condition has an outsized influence on beam metrology accuracy, vacuum cleanliness and particle performance. A degraded, eroded or contaminated beamstop quietly undermines dose repeatability and can become a particle source, which is why it is treated as a scheduled consumable on a well-run preventive maintenance programme.
Within the beamline, the single-position graphite beamstop performs several closely related jobs that together protect the tool and underpin reliable dosimetry:
The beamstop is machined from a high-purity, fine-grained graphite selected for its ability to survive direct ion bombardment. Graphite has no true melting point at vacuum pressures, it sublimes only at extreme temperatures, so it tolerates the intense, localised heating of a parked beam far better than most metals. Its high thermal conductivity helps spread the deposited heat across the body of the part, while its low coefficient of thermal expansion keeps the impact geometry stable through repeated heating and cooling cycles, preserving the reference position used during beam tuning.
Carbon’s low atomic number is the key reason graphite is preferred over metal for beam-termination duty. Low-Z material sputters less aggressively and, crucially, any material that is sputtered is carbon rather than a process-killing metal such as iron, chromium or nickel. This keeps the beamline and the wafer environment free of heavy-metal contamination that would degrade device performance. High vacuum compatibility, low outgassing once conditioned, further protects the pressure and cleanliness of the beamline.
Because the beamstop is the reference surface for beam setup and the guardian against stray beam strike, its condition feeds directly into the parameters that matter most to a fab:
Continuous, concentrated beam strike gradually sputters and erodes the impact zone, forming a crater or pit. As the surface recedes and roughens, the effective target geometry changes, secondary-electron and back-scatter behaviour shifts, and the beamstop can no longer serve as a clean, repeatable reference. Deep cratering is the most common end-of-life indicator.
Repeated rapid heating from beam strike followed by cooling imposes thermal-cycling stress on the graphite. Over time this can promote micro-cracking, edge chipping or, in severe cases, fracture, particularly if a high-current beam is parked on a small spot. Cracked or chipped graphite both compromises the absorbing surface and generates particles.
Sputtered material and process by-products can build up on and around the beamstop, eventually flaking away as the part ages. Loose graphite grains and redeposited films become a particle source that can travel through the beamline, contaminating the vacuum environment and ultimately threatening wafer-level defect performance.
Replacement should always follow the relevant AMAT service procedures and your site’s safety protocols. As a general guide, the sequence is:
Graphite beam-termination components are consumables: they wear predictably and benefit from being held on the shelf rather than ordered in a crisis. Sourcing them through ESCT Fab Support gives implant teams a practical way to keep beamlines running without overcommitting capital:
It is a passive graphite target that intercepts and absorbs the ion beam at a fixed single position in the beamline, used for setup, tuning, verification or a parked beam, dissipating the beam energy as heat while limiting sputtering, contamination and stray beam strike.
No. This is supplied as a new OEM-compatible part that is verified to the form, fit and function of AMAT P/N 0020-82832. It is not an original AMAT-branded OEM part, but it is intended as a direct functional replacement for the single-position graphite beamstop.
Graphite is a low atomic number material that withstands extreme localised heating without melting and sputters far less aggressively than metals. Any material it does shed is carbon rather than heavy metal, which protects the wafer environment from contamination.
Look for visible cratering or erosion at the impact zone, cracking or chipping, and signs of flaking or particle generation. Drift in beam-tuning behaviour or repeatability that traces back to the reference surface is also a strong indicator that the beamstop is at end of life.
Yes. Because the beamstop serves as a positional and current reference during tuning, the beam should be re-tuned and dose calibration re-verified against the new part before returning the tool to production.
The current lead time is approximately 2.5 weeks. As a known-wear consumable, it is well suited to being held in spares inventory so that scheduled maintenance is never held up waiting on delivery.
The Graphite Beamstop, Single Position (AMAT P/N 0020-82832, ESCT P/N ES227-0097) is a high-purity graphite beam-termination component for AMAT ion implanter beamlines. It absorbs the ion beam at a fixed position for setup, tuning and parked states, converting beam energy to heat while minimising sputtering, metallic contamination and stray beam strike. Its condition directly affects dose accuracy, particle performance and vacuum cleanliness, and because it wears predictably through erosion, thermal cracking and flaking, it is best managed as a stocked consumable. Sourced through ESCT Fab Support with a short, predictable lead time, it offers a cost-effective, function-verified way to keep beamlines productive.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0020-82832. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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