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The 0040-96830 Cathode, Button, Source, Tungsten, 3mm is the emissive heart of the ion source in Applied Materials ion implantation equipment. Heated to extreme temperature in operation, this small tungsten button emits the electrons that ionise the source gas, the very first step in creating the ion beam.
Few parts this small carry this much responsibility: source stability, beam current and tune-up behaviour all trace back to cathode condition, which is why it is among the most regularly renewed consumables in the implanter.
ESCT Fab Support supplies the 0040-96830 as a verified 2nd New OEM-compatible cathode for Applied Materials ion implanters, keeping this critical consumable available without OEM lead times.
It is a 3mm tungsten button cathode for the ion source of Applied Materials ion implantation equipment, the emissive element at the heart of ion generation.
Heated to extreme temperature, the cathode emits the electrons that ionise the source gas, creating the plasma from which the ion beam is extracted. Its condition directly sets source performance.
Electron emission requires sustained extreme temperature. Tungsten’s melting point, emission characteristics and low vapour pressure make it the material of choice for implanter cathodes.
Yes, one of the most frequently replaced parts in the source. It erodes with every beam hour and is renewed at each source rebuild.
Falling beam current, unstable or hard-to-tune beams, source arcing, shortened filament life and visible erosion of the button face at rebuild.
Yes. An unstable source produces unstable beam current, which challenges dose control and tool productivity.
Yes. Configuration and fitment should be confirmed against OEM part number 0040-96830 and your tool configuration before installation.
Yes. ESCT supports form, fit and functional verification aligned with OEM requirements before the part ships.
This product is supplied as a 2nd New OEM-compatible part, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.
The 0040-96830 3mm tungsten button cathode is the electron-emitting element that starts ion beam generation in Applied Materials implanters. Its condition sets source stability and beam current, making timely replacement fundamental to implanter productivity. Sourcing it from ESCT Fab Support gives you verified quality, reduced lead times, and expert technical support, keeping your equipment stable, efficient, and production-ready.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0040-96830. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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