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The Side Liner, Applied Materials part number 0020-86738, is a sacrificial shielding component installed along the lateral walls of an AMAT ion implanter source or beamline enclosure. In an implanter, energetic ions, neutrals, sputtered metal and deposition by-products travel through tightly defined apertures and chambers under high vacuum. The side liner forms a removable inner skin that intercepts this flux before it reaches the structural housing, protecting expensive machined assemblies and confining contamination to a part that is designed to be consumed and replaced.
Positioned to flank the ion path on the side walls of the source or extraction region, the liner sees a punishing combination of ion bombardment, thermal loading, sputter erosion and chemical attack from process gases such as boron trifluoride, phosphine, arsine and their dissociation products. Because it is the surface most directly exposed to off-axis ions and back-streamed material, it accumulates the deposits and damage that would otherwise foul the chamber itself. This makes the side liner one of the more frequently serviced items in the source and beamline preventive maintenance cycle.
Its apparent simplicity belies its importance. A liner that is correctly specified, cleanly machined and properly seated keeps the surrounding electric fields, gas conductance and thermal behaviour stable. A degraded, mis-fitted or contaminated liner can shift beam geometry, generate particles and seed electrical instability, so its condition has a direct bearing on implant uniformity and tool uptime.
The side liner is a passive but actively managed barrier. Its job is to absorb the consequences of high-energy operation so that the permanent hardware around it remains clean, dimensionally stable and electrically predictable across many production cycles.
As a consumable that lives directly in the ion flux, the side liner must be made from materials that survive sputtering, thermal cycling and aggressive chemistry without releasing contamination into the beam. High-purity graphite and refractory metals are the typical choices for liners of this class, selected for their sputter behaviour, vacuum compatibility and resistance to the dopant chemistries used in implantation.
Liner material is held to tight purity limits so that, as it slowly erodes, it does not introduce metallic or particulate contamination that could be implanted alongside the intended dopant. Low outgassing holds the deep vacuum the beamline requires, and a dense, fine-grained structure resists the micro-cracking and flaking that generate particles.
Sustained ion bombardment deposits substantial energy into the liner surface. The material must hold its form through repeated heating and cooling without warping, cracking or losing dimensional control over the apertures and clearances it defines. Predictable, even sputter erosion extends service life and keeps the surface geometry stable for as long as possible.
Although the side liner does not steer or measure the beam directly, its condition propagates through the entire implant process. A clean, well-fitted liner keeps the beamline stable and the wafers clean; a worn or contaminated one becomes a hidden source of defects and drift.
The side liner is engineered to wear, but the way it wears determines when it must be replaced. Recognising these modes during inspection helps maintenance teams pull a liner at the right time rather than reacting to a yield excursion.
Continuous ion impact slowly removes material from the exposed faces. Over time this thins the liner, rounds defining edges and can locally erode through, exposing the chamber wall the liner was meant to protect and shifting the local geometry the beam interacts with.
Sputtered metal and dopant residues accumulate as layers on the liner surface. As these films thicken and thermally cycle, they crack and flake, releasing particles into the beamline that can land on wafers or trigger arcing and electrical instability.
Repeated heating and cooling, combined with the embrittlement that comes from prolonged ion and chemical exposure, can crack or warp the liner. A distorted liner no longer seats correctly, may rub against adjacent hardware and can disturb the clearances and fields around it.
The side liner is replaced during scheduled source or beamline preventive maintenance, when the system is vented and the relevant assembly is opened. Cleanliness and careful handling are critical, as fingerprints, dust and handling damage can all become contamination once the tool returns to vacuum. The following sequence outlines the typical approach; always follow the AMAT service procedure and site safety rules for the specific tool.
Because liners are scheduled consumables, holding the right stock is a straightforward way to protect implanter availability. ESCT Fab Support supplies the side liner ES227-0083 as a form, fit and function compatible alternative to AMAT 0020-86738, helping fabs keep maintenance on schedule without long procurement waits.
It acts as a removable, sacrificial shield along the side walls of the source or beamline, intercepting ions, sputtered metal and process deposits so the permanent chamber hardware stays clean, dimensionally stable and electrically predictable.
No. This is supplied as a new, OEM-compatible part cross-referenced to AMAT P/N 0020-86738 under ESCT P/N ES227-0083. It is verified to form, fit and function but is not an original OEM-branded component.
Replacement interval depends on beam current, dopant chemistry and duty cycle. As a consumable in the ion flux it is typically inspected and changed during scheduled source or beamline preventive maintenance, with timing guided by observed erosion, deposit build-up and particle performance.
Watch for visible thinning or erosion-through, heavy deposit layers that are beginning to flake, cracking or distortion, and process symptoms such as rising particle counts, beam instability or arcing. Any of these indicate the liner is no longer protecting the chamber effectively.
As the liner slowly erodes, traces of its material can enter the beam. High-purity, low-outgassing construction means this does not introduce unwanted metallic or particulate contamination into the implant or degrade the vacuum the beamline depends on.
The typical lead time is around 2.5 weeks. Because the side liner is a planned consumable, many fabs hold it as buffer stock so that scheduled maintenance is never delayed waiting on a replacement.
The Side Liner (AMAT P/N 0020-86738, ESCT P/N ES227-0083) is a high-purity sacrificial shielding component for AMAT ion implanter source and beamline systems. Mounted along the side walls of the ion path, it absorbs ion bombardment, sputtered metal and process deposits to protect the structural chamber, maintain stable geometry and fields, and keep particle generation low. Built from high-purity, thermally stable material and managed as a scheduled consumable, it directly supports implant uniformity, wafer cleanliness and tool uptime. Sourced through ESCT Fab Support, it offers a verified, cost-effective way to keep preventive maintenance on schedule.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0020-86738. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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