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The Suppression Power Supply, Applied Materials OEM part number 1140-90115, is a dedicated high-voltage source that energises the suppression electrode within the ion source extraction assembly of AMAT Quantum and xR-class ion implanters. In an ion implantation system the extraction optics pull a positively charged ion beam out of the source arc chamber through a precisely shaped aperture. Behind the grounded extraction electrode sits a suppression electrode that is held at a strongly negative potential. This negative bias is what the 1140-90115 supply delivers and regulates.
The purpose of that negative bias is to create a localised potential barrier that prevents secondary electrons, generated downstream in the beamline and at the ground electrode, from streaming back into the high-voltage extraction gap. Without effective electron suppression, those backstreaming electrons would be accelerated into the source, distorting the extracted beam, loading the extraction supply, and corrupting the beam-current measurement on which dose control depends. The suppression supply therefore sits at the heart of beam formation, even though it carries only a small fraction of the total extraction current.
Because it operates floating at the source high-voltage reference and must hold a stable negative output under a noisy, arc-prone load, the suppression power supply is a precision high-voltage subassembly rather than a commodity bench supply. When it drifts or fails, beam transmission and dose repeatability suffer immediately, which is why a reliable, form-fit-function replacement such as ESCT P/N ES3033-142 is a valued line item in any implant spares inventory.
Within the extraction power electronics rack, the suppression supply works alongside the main extraction and arc supplies to define the electrostatic field geometry at the source aperture. Its job is narrow but critical: present a clean, stable negative voltage to the suppression electrode regardless of fluctuating beam load. Its principal functions include the following.
The defining performance metric of a suppression supply is the steadiness of its negative output under a dynamic load. As beam current and source conditions change, the supply must hold its setpoint with minimal droop or overshoot so that the suppression field, and therefore the extracted beam optics, stay constant.
A suppression supply spends its life connected to an electrode that arcs. Its electronics must therefore tolerate repeated flashover events, fold back safely under fault, and report status accurately to the host controller so that the implanter can interlock or retune as required.
Although the suppression supply handles modest power, its condition propagates directly into the metrics that matter on the implant floor. A degraded or unstable unit undermines beam quality and dose accuracy long before it fails outright.
Sustained operation at high negative potential stresses potting compounds, standoffs and cable terminations. Tracking, partial discharge and eventual insulation breakdown are classic end-of-life signatures, often appearing first as intermittent arcing or erratic output before a hard short develops.
Ageing of the regulation feedback path, reference components and high-voltage multiplier stages causes the output to drift off setpoint or develop excessive ripple. The suppression field then becomes inconsistent, manifesting as wandering beam current and dose that will not hold to specification.
Repeated electrode flashover injects energetic transients back into the supply. Over time this fatigues output devices, snubbers and protection circuitry, leading to frequent fault latching, failure to recover after arcs, or a complete loss of output following a particularly severe discharge.
The suppression supply is mounted in the implanter high-voltage power electronics enclosure and must be handled with full respect for stored-energy and high-voltage hazards. The following sequence summarises a safe, repeatable replacement; always defer to the relevant AMAT service documentation and your site safety procedures.
High-voltage extraction supplies are exactly the kind of low-frequency, high-impact failure that justifies holding a verified spare. ESCT Fab Support supplies ES3033-142 as a form-fit-function alternative to AMAT 1140-90115, giving implant teams a cost-effective route to fleet uptime without depending on a single OEM channel.
It applies a regulated negative bias to the suppression electrode in the ion source extraction optics. That negative potential blocks secondary and backstreaming electrons from re-entering the extraction gap, which keeps the extracted ion beam well formed and protects the main extraction supply from spurious electron loading.
No. ES3033-142 is supplied as a new, OEM-compatible replacement that is cross-referenced to AMAT OEM P/N 1140-90115 and verified to form, fit and function. It is not an original AMAT-branded part and is offered as an independent alternative for maintenance and repair.
Typical symptoms include unstable or drifting beam current, recurring extraction high-voltage faults, the supply failing to hold its setpoint, or repeated fault latching after source arcs. Confirm by checking the voltage and current readback against the expected suppression setpoint during a controlled beam-up.
Backstreaming electrons distort beam optics and corrupt the beam-current signal used for dose integration. Because implant dose directly sets device parameters such as threshold voltage and junction depth, an ineffective suppression field translates into uniformity and dose excursions that can reduce wafer yield.
Treat it as a high-voltage, stored-energy hazard. Disable and lock out the source and extraction high voltage, allow full capacitive discharge, and verify zero potential with an approved grounding stick before handling any terminal. Reconnect high-voltage leads cleanly and bring the supply up at a low setpoint before full extraction.
Yes, and it is a sensible choice. Extraction supplies fail infrequently but cause substantial downtime when they do, so a verified spare on the shelf shortens mean time to repair. ES3033-142 is suitable for stocking across single tools or multi-tool implant fleets running AMAT Quantum and xR-class platforms.
The Suppression Power Supply, AMAT OEM P/N 1140-90115, delivers the regulated negative bias that energises the suppression electrode in the ion source extraction optics of AMAT Quantum and xR-class implanters. By holding a clean, stable suppression field it blocks backstreaming electrons, protects the extraction supply, and preserves the beam-current and dose accuracy that govern wafer yield. ESCT P/N ES3033-142 provides a form-fit-function alternative that supports rapid repair and confident spares stocking across implant fleets, backed by ESCT technical support.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 1140-90115. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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