OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Source Magnet Power Supply is the dedicated current-regulated DC supply that energises the source magnet on Applied Materials (AMAT) Quantum and xR-class ion implanters. In these tools, the ion source produces a plasma from a feed gas, and the extracted ions must be steered, confined and shaped before they travel down the beamline towards the wafer. The source magnet generates the magnetic field that supports this process, and the field strength is set entirely by the regulated current this supply delivers to the magnet coil. Without a stable, accurate magnet current the source cannot maintain a consistent plasma geometry, and the beam that follows it inherits every fluctuation.
Physically, the unit is a high-current, low-voltage power supply built to drive an inductive magnet load rather than a resistive one. It sits within the source power and gas-box section of the implanter, alongside the arc, filament, extraction and bias supplies that together bring the ion source to life. Because the magnet coil is an inductive element with appreciable resistance and substantial stored energy, the supply is engineered to ramp current smoothly, hold it against thermal drift, and clamp the inductive flyback safely whenever the field is reduced or the source is shut down.
For a fab running implant recipes to tight dose and angle tolerances, the magnet supply is one of those quiet components that is invisible when it works and impossible to ignore when it drifts. Beam current stability, source lifetime and even the angle distribution of the extracted ions all depend on the magnet field being exactly where the recipe expects it. That is why this part belongs in every well-managed implanter spares strategy.
The supply’s job is to convert the tool’s incoming AC or DC bus power into a precisely regulated current that holds the source magnet at the field strength the implant recipe demands. In an ion source, that field shapes and confines the arc plasma, influencing how efficiently ions are produced and how the beam is presented to the extraction optics. Its core functions include:
Because magnetic field is proportional to coil current, this supply operates as a current source rather than a voltage source. The control loop continuously measures the actual current through the magnet and adjusts its output to match the commanded setpoint, compensating for the rising resistance of the copper winding as it heats. A well-behaved unit holds its setpoint with low ripple and minimal long-term drift, which translates directly into a stable magnetic field and therefore a stable, repeatable ion beam. Tight regulation under varying thermal load is the single most important electrical characteristic of the part.
Driving an inductor is fundamentally different from driving a heater or a resistor. The magnet stores energy in its field, so the supply must include freewheeling and clamp circuitry to absorb that energy whenever current is commanded down, preventing damaging voltage spikes across the output devices. The power stage, whether a phase-controlled rectifier or a switch-mode topology, works with smoothing and filtering components to present clean DC to the coil while tolerating the back-EMF the load produces. Hard-wearing protection on the output is what keeps the supply, the coil and the wiring intact through years of ramp cycles.
The magnet field set by this supply directly shapes the plasma in the ion source, so any instability propagates straight into the beam and onto the wafer. A drifting or noisy magnet current undermines the very parameters implant recipes are written to control, with measurable consequences for productivity and yield:
The components that carry the magnet current (rectifiers or switching devices, output diodes and the associated clamp circuitry) endure the highest electrical and thermal stress in the unit. Repeated ramp cycles and the back-EMF of the inductive load gradually fatigue these parts, eventually producing reduced output, current that will not reach setpoint, or hard over-current trips when a device finally fails short.
Ageing of the current-sense reference, control-loop components and feedback path causes the supply to hold a slightly wrong current, so the magnet field no longer matches the commanded value. The symptom is often subtle: beams that need re-tuning more frequently, drift over a shift, or a setpoint that the operator can no longer trust. Left unaddressed, this quietly erodes process repeatability.
Cooling fans, heatsinks and electrolytic filter capacitors all age with hours and temperature. Dust-blocked airflow, dried-out capacitors and degraded thermal interfaces raise internal temperatures, increase output ripple and trigger over-temperature shutdowns. These wear-driven failures are the most common reason an otherwise healthy supply begins to misbehave and are a key argument for keeping a tested spare on the shelf.
Replacement should be carried out by a qualified service technician following AMAT procedures for the specific implanter, since the magnet supply sits among high-current source-power wiring. The following sequence outlines the general approach:
Source-power supplies are classic single-point-of-failure items: when the magnet supply is down, the source is down, and so is the tool. Holding a verified replacement turns a multi-day OEM lead-time event into a same-shift swap. ESCT Fab Support helps fabs manage exactly this risk:
It supplies a precisely regulated DC current to the source magnet coil in an AMAT ion implanter. That current sets the magnetic field that confines and shapes the plasma in the ion source, which in turn governs how the ion beam is produced and presented to the extraction optics.
No. This is not an original AMAT part. It is supplied as an OEM-compatible replacement that is cross-referenced to AMAT P/N 9090-00046 and verified to match the original in form, fit and function so it can serve as a direct replacement in the source-power section of the tool.
It is intended for AMAT Quantum and xR-class ion implantation systems that use this magnet supply in their source-power configuration. Because implanters are configured in many variants, we recommend confirming the part against your tool’s specific configuration before ordering, and our team can assist with that check.
Typical indicators include the magnet current failing to reach setpoint, over-current or over-temperature trips, increased beam instability requiring frequent re-tuning, and unexpected source faults. Drift that forces more frequent tuning over a shift is a common early warning that the regulation or filtering has degraded.
Magnetic field strength is set by coil current, and that field shapes the source plasma. Any ripple or drift in the current modulates the field and therefore the beam, affecting beam current, shape and uniformity. Stable, repeatable current is what keeps implant dose and angle within recipe tolerance.
Replacement should only be performed by qualified service personnel following AMAT procedures, because the unit handles high-current source-power wiring and an inductive load that stores energy. Proper lock-out/tag-out, verification that the coil has de-energised, correct connections and post-installation qualification all matter.
The Source Magnet Power Supply (AMAT P/N 9090-00046, ESCT P/N ES3033-146) is the current-regulated DC supply that energises the source magnet on AMAT Quantum and xR-class ion implanters. By holding a stable, accurate current through the magnet coil, it sets the magnetic field that confines the source plasma and underpins beam stability, dose control and source lifetime. Its main wear points are the power stage, the current-regulation electronics and the thermal and capacitor components, all of which make it a sensible item to hold as a tested spare. ESCT Fab Support offers this part verified to form, fit and function to keep ageing implanters running with minimal downtime.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 9090-00046. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
We use cookies We use analytics cookies to see how visitors use this site, so we can improve it. They are set only if you accept. Read our Cookie Policy.
