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The Source Magnet Power Supply, designated AMAT OEM part number 9090-00046 and supplied by ESCT Fab Support under part number ES3033-136, is the regulated direct-current power source that energises the magnet coil associated with the ion source on Applied Materials Quantum and xR-class ion implanters. In these tools the source produces a plasma from which a defined ion species is extracted; a steady magnetic field is used within the source region to confine the arc-discharge plasma, improve ionisation efficiency and stabilise the discharge. The Source MAG PSU is the unit that converts incoming line or bus power into the precise, low-ripple coil current that establishes that field.
Although it is one of several power supplies clustered around the source and extraction terminal, the magnet supply has an outsized influence on beam stability. The strength and steadiness of the source magnetic field directly affect the density and spatial distribution of the plasma, and therefore the extracted ion current presented to the analyser and beamline. Drift, ripple or dropout in this supply translates almost immediately into beam-current instability and dose non-uniformity at the wafer.
Because the source sits on a high-voltage extraction terminal and operates in a corrosive environment of dopant gases and tungsten deposits, the magnet supply must deliver tightly regulated current while tolerating electrical noise, terminal-referenced operation and the thermal load of continuous high-current duty. A failing or out-of-specification Source MAG PSU is a common, and frequently mis-diagnosed, root cause of intermittent beam faults on these platforms.
Within the source and terminal control architecture, the Source MAG PSU performs a focused set of duties that together determine how reliably the implanter can strike and hold a usable beam:
As a current-mode magnet supply, the value of the 9090-00046 lies in the quality and stability of the current it pushes through an inductive coil, and in the integrity of the feedback it returns to the control system. Two performance dimensions dominate.
The magnetic field seen by the plasma is proportional to coil current, so the supply must hold its output to a tight tolerance over hours of operation and across thermal swings.
Driving an inductor at high current demands solid power semiconductors, energy management and full fault handling.
Because the magnet supply sits upstream of every downstream beam-tuning operation, its condition propagates directly into productivity and wafer-level results:
Ageing electrolytic filter capacitors, degraded current-sense components and drifting voltage references gradually erode regulation. The field wanders or develops ripple, producing a beam that will not settle and that the tool repeatedly tries to re-tune.
Continuous high-current operation stresses the power semiconductors, rectifiers and their thermal management. Failed devices, fatigued solder joints, clogged airflow or a failing cooling fan can cause over-temperature trips, hard shutdowns or, in the worst case, an open output.
Loss of setpoint tracking, spurious fault flags or a supply that reports current it is not delivering usually point to control-loop, feedback or isolation problems. Corroded terminals, loose high-current lugs and damaged interface wiring at the terminal add intermittent, hard-to-trace faults.
Replacement should be performed by a qualified implant technician following the relevant AMAT service procedures and site safety rules. The source operates at high voltage and the magnet coil stores substantial inductive energy, so lockout and discharge steps are mandatory.
Source-region power supplies are classic single-points-of-failure: comparatively low cost against the tool, yet capable of idling a high-value implanter for days if no spare is on hand. Holding a verified Source MAG PSU locally removes that exposure.
It supplies regulated DC current to the magnet coil associated with the ion source, generating the magnetic field that confines and stabilises the arc-discharge plasma so a steady, well-ionised beam can be extracted.
No. This is not an original OEM part. It is supplied as an OEM-compatible unit that has been verified to the form, fit and function of AMAT P/N 9090-00046, so it installs and operates as a direct replacement without modification to the tool.
Typical indicators are a beam that will not hold setpoint, ripple-driven current instability, repeated source-strike failures or magnet over-current and over-temperature trips. Confirm by checking the supply’s output against its setpoint and comparing returned current feedback with the actual coil current before replacement.
After installation you should verify the supply reaches and holds its programmed setpoint, confirm the controller reads correct current feedback, then strike the source and re-tune a reference beam to confirm stability and dose uniformity before production use.
Repair is sometimes viable, but board-level work on a high-current, high-voltage-referenced supply is time-consuming and the tool stays down throughout. Swapping in a verified replacement restores production quickly, and the original can be repaired off-line as a future spare if desired.
The unit is matched to AMAT P/N 9090-00046 for the Quantum and xR-class implanter families. As source and terminal configurations vary, we recommend confirming your tool’s existing part number and connection arrangement with ESCT so we can verify compatibility before despatch.
The Source Magnet Power Supply (AMAT P/N 9090-00046, ESCT P/N ES3033-136) is the regulated DC supply that energises the ion-source confinement magnet on AMAT Quantum and xR-class ion implanters. Its current stability sets the source magnetic field, and therefore the density of the plasma and the steadiness of the extracted beam. Drift, ripple, power-stage failure or feedback faults in this supply present as beam instability, dose excursions and aborted runs, making it a high-value spare to hold. ESCT supplies a form-, fit- and function-verified replacement to restore beam stability quickly and minimise costly implanter downtime.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 9090-00046. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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