OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Source Magnet Power Supply (Source MAG PSU), Applied Materials OEM part number 0090-91444, is the regulated direct-current supply that energises the source magnet coil within the ion source assembly of AMAT ion implantation platforms. In an implanter the ion source is where neutral feed gas is broken down into a dense plasma and positive ions are extracted toward the beamline. A magnetic field threaded through the arc chamber is used to confine that plasma, lengthen the path of the ionising electrons and so raise ionisation efficiency. The Source MAG PSU is the electrical heart of that field: it converts incoming AC mains or DC bus power into a stable, low-ripple current that flows through the magnet winding to generate a precise, repeatable flux density.
Physically the unit is a rack- or cabinet-mounted power supply module residing in the source terminal or gas-box power section of the implanter, where it sits alongside the arc supply, extraction supply and filament or indirectly-heated-cathode supplies. Because the source region floats at high extraction potential, the magnet supply and its control interface are designed to operate within that high-voltage island, isolated from the rest of the tool. The output current is closed-loop regulated and slaved to the recipe so that the magnet field tracks the species, beam energy and beam current the process engineer has called for.
Although it is rarely the part an operator thinks about, the Source MAG PSU directly governs source stability, beam current and the cleanliness of the extracted ion species. A drifting or noisy magnet supply translates immediately into beam-current instability, glitch rate and dose non-uniformity, which is why it is a part worth keeping on the shelf as a critical spare.
The Source MAG PSU sits at the junction of power electronics and process control. Its core duty is to deliver a precisely regulated current to the source magnet coil so that the confining magnetic field remains constant regardless of mains fluctuation, thermal drift or coil resistance change. In doing so it performs several distinct functions:
As a precision magnet drive supply, the value of the 0090-91444 lies not just in raw power but in the quality and stability of the current it delivers and the integrity of the control signals it exchanges with the tool.
The supply is built around a regulated power stage feeding an inductive magnet load. Tight current regulation and low output ripple both matter because the magnet field maps almost linearly onto plasma confinement; ripple or slow drift on the coil current shows up as beam-current noise and glitch activity at the wafer.
The supply communicates with the implanter source controller through setpoint, readback and interlock lines. Reliable isolation and clean protection logic are what keep an arc in the source terminal from cascading into the wider control system.
Because the magnet field controls how efficiently the source ionises and how stably it delivers beam, the condition of the Source MAG PSU propagates straight through to wafer-level results. A healthy supply is largely invisible; a degraded one is felt across the whole implant process:
Bulk and filter capacitors dry out, switching or pass devices fatigue, and solder joints crack under repeated thermal cycling. The result is rising ripple, regulation drift or intermittent dropout that surfaces as creeping beam-current instability long before the supply trips hard.
Sustained high magnet current makes the supply run warm. Clogged airflow paths, a failing fan or degraded heatsink interface push junction temperatures up, accelerating ageing and eventually forcing over-temperature shutdowns that drop the source mid-run.
Operating on a high-voltage island exposes the unit to arc transients. These can stress isolation barriers, corrupt setpoint or readback signals, and degrade high-current output connectors, producing erratic field control, false interlocks or open-circuit faults to the magnet coil.
Replacement should be carried out by a qualified service technician following the relevant Applied Materials service documentation, with the source terminal treated as a high-voltage hazard at all times. A typical sequence is as follows:
Source-region power supplies are high-consequence, single-point-of-failure items: when the magnet supply goes, the implanter stops. Holding a verified replacement such as ES3033-137 turns an unplanned multi-day outage into a planned swap. Sourcing through ESCT Fab Support offers several advantages:
It is the regulated DC power supply that drives the source magnet coil in the ion source. The current it delivers sets the strength of the magnetic field that confines the plasma in the arc chamber, which in turn governs ionisation efficiency and the stability of the extracted ion beam.
No. This item is supplied as an OEM-compatible replacement for Applied Materials part number 0090-91444. It is not an original AMAT-branded part, but it is verified to match the original to form, fit and function so that it can be fitted as a direct replacement.
Telltale signs are magnet-current readback that no longer matches the setpoint, rising ripple, intermittent over-temperature or open-coil faults, and beam-current instability that follows the magnet rather than the arc or extraction supplies. Comparing logged magnet current against the recipe value usually isolates the supply.
Replacement should only be performed by personnel trained on the implanter and on high-voltage safety. The source terminal carries lethal potentials and stored energy, so correct lockout, discharge verification and adherence to AMAT service procedures come before any work begins.
The 0090-91444 is used within AMAT ion source power configurations, but source terminals vary by tool generation and option set. We recommend confirming the part against your machine’s configuration and any associated connector or revision details before ordering; our team can help verify suitability.
The supply is offered under ESCT part number ES3033-137, cross-referenced to AMAT OEM part number 0090-91444. It is provided as the magnet power supply unit; any tool-side harnessing, mounting hardware or magnet coil is retained from your existing installation unless specified otherwise.
The Source Magnet Power Supply (AMAT OEM P/N 0090-91444, ESCT P/N ES3033-137) is a critical power-electronics module in the ion source region of Applied Materials Quantum and xR-class implanters. By delivering a stable, low-ripple, closed-loop current to the source magnet coil, it sets the plasma-confining field that underpins beam current, source stability and dose uniformity. When it drifts or fails, the consequences run straight to yield and uptime, making a verified replacement a sensible critical spare. Supplied form-fit-function verified and ready to fit, ES3033-137 helps fabs keep their implanters productive while managing the cost of supporting an ageing tool base.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0090-91444. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
