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The Source Extraction Assembly is the electromechanical structure that sits immediately downstream of the ion source arc chamber on Applied Materials (AMAT) Quantum and xR-class ion implanters. Its job is to convert the dense, near-stationary plasma generated inside the arc chamber into a collimated, high-current ion beam by applying a strong electrostatic field across a set of carefully aligned extraction electrodes. Without a properly functioning extraction assembly, the implanter cannot form a usable beam at all, which makes this component one of the most consequential items in the entire source subsystem.
Mechanically, the assembly comprises the extraction (or “puller”) electrode and suppression electrode, their mounting frame and insulators, the high-voltage feedthroughs, and the precision adjustment hardware that sets the electrode-to-source-aperture gap and beam-line alignment. Because the assembly operates inside a high-vacuum, high-voltage and high-thermal-load environment, directly adjacent to a plasma source running at tens of kilovolts, its electrodes, insulators and alignment surfaces are continuously stressed and eventually require rebuild. This part, P/N 0090-91192, is the repaired and reconditioned extraction assembly supplied to restore that beam-forming function.
ESCT supplies this assembly (ES3033-213) as a fully reconditioned unit so that fab and field-service teams can return an implanter source to full beam current and beam quality without waiting on long OEM lead times or carrying the cost of a brand-new assembly.
In an AMAT implanter source module, the extraction assembly performs the critical first stage of beam transport. It establishes the electric field geometry that draws ions from the plasma meniscus at the source aperture and shapes them into a defined beam before they enter the mass-analysis magnet and the rest of the beamline. The geometry, cleanliness and alignment of this assembly directly determine extracted current, beam emittance and source stability.
The extraction assembly must sustain extraction potentials of the order of tens of kilovolts across a small vacuum gap without arcing or excessive leakage. Reconditioning restores the dielectric integrity of the insulators, the surface finish of the electrodes and the cleanliness of the high-voltage feedthroughs so that the assembly can hold standoff voltage reliably during conditioning and production.
Extraction efficiency and beam stability depend on the electrode geometry being matched to the source operating point. A correctly rebuilt assembly restores the design gap and alignment so that extracted current responds predictably to source and extraction voltage, keeping dose rate and beam stability within process tolerances.
Because the extraction assembly defines the very first stage of beam formation, its condition propagates through every downstream metric on the implanter. A degraded assembly costs current, stability and uptime; a sound one underpins consistent dose and angle control.
The extraction and suppression electrodes are continuously bombarded by ions and sputtered source material. Over time the apertures erode and widen while conductive deposits build up on the surrounding surfaces, distorting the field geometry, shifting the perveance match and reducing usable beam current.
Sputtered metal films gradually coat the high-voltage insulators, creating conductive tracking paths that lower standoff voltage. The result is increasing glitch rates, leakage current and eventual flashover, which forces the extraction supply into fault and halts beam delivery until the assembly is cleaned or rebuilt.
Thermal cycling and repeated source changes can loosen mounting hardware and shift electrode alignment, allowing the extraction gap to drift from its set value. This misaligns the beam to the analyser entrance, degrades transmission and produces unstable, hard-to-tune source behaviour.
Replacing the source extraction assembly is a high-voltage, high-vacuum maintenance task that should be carried out by trained implant technicians following AMAT service procedures and the site’s lock-out/tag-out policy. The sequence below is a general guide and does not replace the OEM manual.
The extraction assembly is a high-wear, mission-critical item, so most fabs keep a serviceable spare on the shelf to swap during scheduled source preventive maintenance rather than risk extended downtime. ESCT supports that strategy with reconditioned assemblies that restore form, fit and function at a lower cost and shorter lead time than new OEM supply.
It applies the high-voltage field that pulls ions out of the arc-chamber plasma and shapes them into a beam, forming the very first stage of beam transport on the implanter. Its geometry and alignment set the extracted current, beam quality and source stability.
No. This is not an original Applied Materials part. It is supplied by ESCT as a refurbished and reconditioned assembly that has been verified to the form, fit and function of OEM P/N 0090-91192, intended as a compatible replacement for the corresponding AMAT source extraction assembly.
Typical indicators include a steady loss of extractable beam current, rising glitch or arc-down rates, increased extraction leakage current, longer conditioning times and a source that becomes difficult to tune. These usually point to electrode erosion or insulator tracking that a rebuild addresses.
In-situ cleaning can recover some performance, but eroded electrode apertures and aged insulators cannot be restored by cleaning alone. A reconditioned assembly returns the unit to specified geometry and dielectric integrity, and swapping a ready spare minimises tool-down time compared with bench-rebuilding the removed unit.
Yes. After installation the assembly should be high-voltage conditioned and the source re-baselined, with extracted current, suppression voltage and beam alignment verified against the tool’s reference values before returning to production.
It is built to match the form, fit and function of AMAT P/N 0090-91192. As source modules can vary by tool revision, we recommend confirming your existing assembly part number and source configuration with ESCT before ordering so the correct variant is supplied.
The Source Extraction Assembly (AMAT P/N 0090-91192, ESCT P/N ES3033-213) is the high-voltage beam-forming structure that draws ions from the arc-chamber plasma and shapes them into the implanter’s primary beam. Its electrode geometry, insulator integrity and alignment govern extracted current, beam quality and source stability, and it is subject to predictable erosion, deposition and high-voltage degradation over service life. Supplied by ESCT as a reconditioned, function-verified unit, it offers fabs a cost-effective, readily available route to restoring full source performance while supporting a solid rotable-spare strategy.
Disclaimer: This part is supplied by ESCT Fab Support as a reconditioned, OEM-compatible component, verified to the form, fit and function of Applied Materials part number 0090-91192. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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