Shoe Pick Up 200mm 1.5mm EDGE Semitron, Black

PART DETAILS

0041-35673
Shoe Pick Up 200mm 1.5mm EDGE Semitron, Black

OEM P/N: 

0041-35673

ESCT P/N: 

ES3033-086

PART TYPE:

N/A

OEM: 

AMAT
MORE INFO

Pick-up shoe, 200 mm, 1.5 mm edge, Semitron (OEM P/N 0041-35673), wafer-handling end-effector component for Applied Materials ion implanters

Static-dissipative Semitron pick-up shoe for AMAT PI9500/xR120 200 mm wafer handling, ESCT P/N ES3033-086

The Pick-Up Shoe is a wafer-handling end-effector component used on Applied Materials PI9500/xR120-class ion implantation platforms. Machined from black Semitron static-dissipative engineering plastic with a 1.5 mm edge feature, it contacts and supports the 200 mm wafer edge during transfer between cassettes, load locks and the implant station, providing secure, low-particle, ESD-safe handling.

In ion implantation, wafer handling must combine precise positioning with strict contamination and electrostatic control. Static-dissipative materials such as Semitron prevent charge build-up that could damage devices or attract particles, while a defined edge profile gives repeatable wafer pick-up and placement without slippage or front-side contact.

This item is supplied as a replacement component matched to the form, fit and function of OEM P/N 0041-35673.

Functional role of the pick-up shoe in AMAT implant handling

Within the wafer-handling path, the pick-up shoe provides:

  • Secure edge contact and support of the 200 mm wafer during transfer
  • Static-dissipative handling to prevent electrostatic charge build-up
  • A defined 1.5 mm edge profile for repeatable pick-up and placement
  • Low-particle, low-contamination wafer contact
  • Consistent positioning for reliable hand-off to the implant station

Material and mechanical performance

Static-dissipative material properties

Black Semitron offers controlled surface resistivity and clean handling characteristics:

  • Static-dissipative behaviour to protect devices from ESD events
  • Low particle generation and outgassing in vacuum handling
  • Dimensional stability for repeatable wafer contact

Edge geometry and wafer security

The 1.5 mm edge feature maintains a secure, repeatable grip:

  • Reliable edge support without front-side contact
  • Resistance to slippage during rapid transfer
  • Consistent wafer seating for accurate hand-off

Impact on tool performance and yield

Because it handles every wafer, a worn or damaged pick-up shoe can contribute to:

  • Wafer slippage, misplacement or transfer faults
  • Particle generation and contamination events
  • Electrostatic discharge risk to devices
  • Robot or handling alarms and unplanned downtime
  • Reduced throughput and handling reliability

Common wear and failure modes

Edge wear and loss of grip

Repeated wafer contact wears the 1.5 mm edge feature over time, reducing grip security and positional repeatability.

Particle generation

Surface wear or damage can generate particles, raising contamination risk in the handling path.

Loss of static-dissipative performance

Surface contamination or degradation can impair static-dissipative behaviour, increasing ESD risk to devices.

Installation and replacement guidance

Replacement should follow AMAT-approved handling, ESD and cleanroom procedures:

  • Power down and place the handler in a safe state before access
  • Use clean, powder-free handling to avoid contaminating the shoe
  • Inspect the mounting interface and adjacent end-effector hardware
  • Seat and secure the shoe to specified alignment
  • Verify wafer pick-up, placement and positional accuracy
  • Confirm fault-free handling before returning to production

Spare parts strategy for AMAT implant wafer-handling parts

Wafer-handling consumables wear with use, and OEM lead times create downtime risk. ESCT Fab Support provides:

  • Components matched to OEM form, fit and function
  • Inspection and dimensional verification before dispatch
  • Clean, ESD-aware handling and packaging
  • Reduced lead time and controlled cost
  • Technical support for AMAT implant wafer-handling maintenance

Frequently asked questions

1. What is the pick-up shoe used for?

It is a wafer-handling end-effector component on Applied Materials PI9500/xR120-class ion implanters that contacts and supports the 200 mm wafer edge during transfer, providing secure, static-dissipative, low-particle handling.

2. Is this an original OEM part?

It is supplied as a replacement component matched to the form, fit and function of OEM P/N 0041-35673. It is a compatible alternative and is not an original OEM-branded item.

3. Why is it made from Semitron?

Semitron is a static-dissipative engineering plastic that prevents electrostatic charge build-up while offering low particle generation and dimensional stability, important for clean, ESD-safe wafer handling.

4. What happens if the shoe is worn?

A worn shoe can cause wafer slippage, misplacement, particle generation and ESD risk, leading to handling faults and unplanned downtime.

5. Can ESCT verify the part before shipment?

Yes. Parts undergo dimensional and visual inspection against the OEM specification, with clean, ESD-aware handling and packaging prior to dispatch.

6. How quickly can ESCT supply this part?

Lead time depends on current inventory; an indicative lead time of around 1.5 months applies, with a focus on availability to support planned maintenance.

Summary

The 200 mm 1.5 mm-edge Semitron Pick-Up Shoe (OEM P/N 0041-35673) is a wafer-handling end-effector component for Applied Materials PI9500/xR120-class ion implanters. By combining secure edge support with static-dissipative, low-particle handling, it directly supports transfer reliability, contamination control and throughput. Sourcing through ESCT Fab Support provides inspected, OEM-matched parts with controlled cost and lead time.

Disclaimer: This part is supplied by ESCT Fab Support as an OEM-compatible replacement component, verified to the form, fit and function of Applied Materials part number 0041-35673. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.

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