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The Pick-Up Shoe is a wafer-handling end-effector component used on Applied Materials PI9500/xR120-class ion implantation platforms. Machined from black Semitron static-dissipative engineering plastic with a 1.5 mm edge feature, it contacts and supports the 200 mm wafer edge during transfer between cassettes, load locks and the implant station, providing secure, low-particle, ESD-safe handling.
In ion implantation, wafer handling must combine precise positioning with strict contamination and electrostatic control. Static-dissipative materials such as Semitron prevent charge build-up that could damage devices or attract particles, while a defined edge profile gives repeatable wafer pick-up and placement without slippage or front-side contact.
This item is supplied as a replacement component matched to the form, fit and function of OEM P/N 0041-35673.
Within the wafer-handling path, the pick-up shoe provides:
Black Semitron offers controlled surface resistivity and clean handling characteristics:
The 1.5 mm edge feature maintains a secure, repeatable grip:
Because it handles every wafer, a worn or damaged pick-up shoe can contribute to:
Repeated wafer contact wears the 1.5 mm edge feature over time, reducing grip security and positional repeatability.
Surface wear or damage can generate particles, raising contamination risk in the handling path.
Surface contamination or degradation can impair static-dissipative behaviour, increasing ESD risk to devices.
Replacement should follow AMAT-approved handling, ESD and cleanroom procedures:
Wafer-handling consumables wear with use, and OEM lead times create downtime risk. ESCT Fab Support provides:
It is a wafer-handling end-effector component on Applied Materials PI9500/xR120-class ion implanters that contacts and supports the 200 mm wafer edge during transfer, providing secure, static-dissipative, low-particle handling.
It is supplied as a replacement component matched to the form, fit and function of OEM P/N 0041-35673. It is a compatible alternative and is not an original OEM-branded item.
Semitron is a static-dissipative engineering plastic that prevents electrostatic charge build-up while offering low particle generation and dimensional stability, important for clean, ESD-safe wafer handling.
A worn shoe can cause wafer slippage, misplacement, particle generation and ESD risk, leading to handling faults and unplanned downtime.
Yes. Parts undergo dimensional and visual inspection against the OEM specification, with clean, ESD-aware handling and packaging prior to dispatch.
Lead time depends on current inventory; an indicative lead time of around 1.5 months applies, with a focus on availability to support planned maintenance.
The 200 mm 1.5 mm-edge Semitron Pick-Up Shoe (OEM P/N 0041-35673) is a wafer-handling end-effector component for Applied Materials PI9500/xR120-class ion implanters. By combining secure edge support with static-dissipative, low-particle handling, it directly supports transfer reliability, contamination control and throughput. Sourcing through ESCT Fab Support provides inspected, OEM-matched parts with controlled cost and lead time.
Disclaimer: This part is supplied by ESCT Fab Support as an OEM-compatible replacement component, verified to the form, fit and function of Applied Materials part number 0041-35673. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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