0090-90164
PreAccel Power Supply

PreAccel power supply (OEM P/N 0090-90164), high-voltage pre-acceleration bias supply for AMAT ion implantation systems

ESCT P/N ES3033-112, pre-acceleration electrode power supply for Applied Materials Quantum and xR-class beamlines

The PreAccel Power Supply (Applied Materials OEM P/N 0090-90164) is a high-voltage power module that energises the pre-acceleration stage of the beamline in AMAT Quantum and xR-class ion implantation systems. In an implanter, ions are drawn from the source by extraction optics and must then be accelerated, shaped and transported towards the mass-analysis magnet at a precisely controlled potential. The pre-acceleration (“PreAccel”) electrode sits immediately downstream of extraction and applies the first deliberate energy increment to the freshly extracted beam, setting the entry conditions for analysis and downstream transport. This supply is the regulated voltage source behind that electrode.

Because beam energy, focus and trajectory all depend on the stability of this potential, the PreAccel Power Supply is a quietly critical element of the implanter’s electrical architecture. It must hold a steady output against a load that is not a fixed resistor but a live, sometimes unstable ion beam, complete with intermittent arcs, glitches and varying space-charge conditions. A drifting or noisy pre-acceleration potential translates directly into beam-energy error, defocusing and dose non-uniformity at the wafer.

ESCT Fab Support supplies this module (ESCT P/N ES3033-112) as a form-, fit- and function-matched alternative for fabs maintaining ageing AMAT implant fleets, where original modules are increasingly difficult to source on a sensible lead time. The sections below describe what the supply does, how it is built electrically, how it fails, and how to replace it cleanly.

Functional role of the PreAccel power supply in AMAT implanter platforms

Within the high-voltage cage and beamline control hierarchy, the PreAccel Power Supply provides a regulated, command-referenced potential to the pre-acceleration electrode and reports its status back to the implanter’s control system. Its principal functions are as follows:

• Generating and regulating the high-voltage bias applied to the pre-acceleration electrode that follows the extraction stage.
• Holding output to the commanded set-point so that beam energy entering the mass-analysis magnet remains repeatable wafer to wafer.
• Tracking the analogue or digital programming reference supplied by the beamline controller and converting it to a stable HV output.
• Tolerating and recovering from beam glitches and electrode arcs without latching into a fault or damaging downstream electronics.
• Returning voltage and current monitor signals, plus interlock and fault status, to the control system for closed-loop tuning and safety.
• Maintaining isolation between primary supply, control reference and the high-voltage output to protect operators and instrumentation.

Electrical and signal performance

Regulation and output stability

The module’s value lies in how tightly it holds output under a difficult load. Key electrical performance characteristics include:

• Low line and load regulation so that mains variation and beam-current swings do not shift the pre-acceleration potential.
• Low output ripple and noise, since high-frequency content on the electrode bias modulates beam energy and broadens the implant profile.
• Accurate set-point tracking with minimal offset between the programming reference and the delivered output.
• Stable behaviour during ramp, so the beam can be tuned without overshoot that trips downstream interlocks.

Arc handling and protection

A pre-acceleration supply lives with arcing as a normal operating condition rather than an exception, so its protection circuitry is integral to its design:

• Current limiting and fast crowbar or fold-back action to contain electrode arcs and protect the output stage.
• Energy-limiting in the HV section so a flashover does not dump damaging charge into the electrode or feedthrough.
• Rapid, automatic recovery to set-point after a glitch so beam tuning is not lost on every arc.
• Generous isolation and creepage in the high-voltage potting and feedthrough to prevent tracking and partial discharge.

Impact on tool performance and yield

Because pre-acceleration sets the energy and focus conditions for the beam before analysis, the health of this supply propagates through the entire implant result. A degraded module shows up as the following:

• Beam-energy error that pushes implant depth and junction profiles outside specification.
• Defocusing and beam-position drift that degrade dose uniformity across the wafer.
• Increased glitch and re-tune frequency, eroding beam-on time and throughput.
• Unplanned interlock trips and aborted runs that consume scheduled production hours.
• Marginal, intermittent faults that are difficult to diagnose and can be misattributed to the source or extraction optics.

Common failure modes

High-voltage insulation breakdown

Repeated arcing and thermal cycling stress the potting compound, transformer insulation and HV feedthrough. Over time this produces tracking paths, partial discharge and eventual flashover, seen as erratic output, audible discharge or a supply that will not hold its commanded voltage.

Output stage and component ageing

Switching devices, HV rectifiers, multiplier diodes and filter capacitors degrade under continuous duty and the electrical shock of glitches. Symptoms include rising ripple, sluggish or overshooting ramps, drift away from set-point and reduced ability to recover cleanly after an arc.

Control, feedback and interlock faults

The regulation loop relies on accurate voltage and current sensing and clean communication of status to the controller. Failing feedback dividers, drifting references or intermittent interlock and connector contacts cause the supply to report incorrect values, trip without genuine cause, or regulate to the wrong potential.

Installation and replacement guidance

Replacement involves live high-voltage hardware and must be carried out by qualified personnel following the system’s lockout and HV safety procedures. A typical sequence is as follows:

• Place the implanter in a safe state, disable the beam, and isolate and lock out the high-voltage and primary power feeds.
• Allow the HV cage to fully de-energise and positively ground the pre-acceleration electrode and supply output before contact.
• Label and disconnect the HV output lead, control and monitor harness, interlock connections and primary power to the module.
• Remove the mounting hardware and withdraw the supply, noting orientation, cable routing and any shielding or covers.
• Fit the ES3033-112 replacement, secure it, and reconnect all leads, checking HV terminations are clean, torqued and free of sharp edges.
• Restore power, remove grounds and locks, and verify output regulation, monitor read-back and interlock behaviour at low set-point before raising voltage.
• Re-tune the beam, confirm energy, focus and dose uniformity against process specification, and log the change.

Spare parts strategy for AMAT implant fleets

High-voltage modules such as the PreAccel supply are exactly the kind of low-volume, high-impact spare that disrupts production when a fab has no stocked alternative. ESCT Fab Support helps maintenance teams de-risk these parts:

• Form, fit and function matched to AMAT OEM P/N 0090-90164 for direct fitment in Quantum and xR-class beamlines.
• A practical alternative when original modules face long or uncertain lead times.
• Support for keeping a critical HV spare on the shelf to protect against unplanned downtime.
• Help with cross-referencing by AMAT OEM and ESCT part numbers to confirm the correct module.
• Backing across the source, beamline, vacuum, scan and control subsystems for fleet-wide maintenance.

Frequently asked questions

What does the PreAccel power supply actually do?

It supplies the regulated high-voltage bias to the pre-acceleration electrode that follows the ion source’s extraction stage, applying the first controlled energy increment to the extracted beam before it reaches the mass-analysis magnet.

Is this an original AMAT OEM part?

No. This module is supplied by ESCT Fab Support as a new, OEM-compatible part. It is verified to match the form, fit and function of AMAT OEM P/N 0090-90164, but it is not an original Applied Materials part and is not sold as one.

Which systems does it fit?

It is intended for AMAT Quantum and xR-class ion implantation systems that use this pre-acceleration supply. Confirm fitment against the OEM P/N 0090-90164 and ESCT P/N ES3033-112 for your specific configuration.

How do I know the supply is the cause of my beam problem?

Typical indicators include energy or focus drift, rising output ripple, frequent glitching and difficulty holding the commanded set-point, often alongside HV fault or interlock trips. Because these symptoms can mimic source or extraction issues, confirm by checking the supply’s monitor read-backs and recovery behaviour.

What precautions should we take during replacement?

Treat the module as live high-voltage hardware: isolate and lock out power, allow the HV cage to de-energise, and positively ground the electrode and output before touching any connection. Only qualified personnel should carry out the work.

Should I keep one as a spare?

Yes. As a low-volume, high-impact HV module, a stocked PreAccel supply prevents a single failure from idling an implanter while a replacement is sourced, which is particularly useful for ageing fleets where original parts are hard to obtain quickly.

Summary

The PreAccel Power Supply (AMAT OEM P/N 0090-90164, ESCT P/N ES3033-112) provides the regulated high-voltage bias behind the pre-acceleration electrode in AMAT Quantum and xR-class implanter beamlines. Its stability, low ripple and arc-handling directly determine beam energy, focus and dose uniformity, so its failure modes (insulation breakdown, output-stage ageing and control or feedback faults) have an outsized effect on yield and uptime. ESCT Fab Support offers it as a form-, fit- and function-matched module to keep these systems running where original supplies are difficult to source.

Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0090-90164. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.

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