OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Pre-Acceleration Power Set is the high-voltage supply assembly responsible for energising the pre-acceleration (or “pre-accel”) stage that sits immediately downstream of the ion source in Applied Materials (AMAT) Quantum and xR-class implanters. After ions are generated in the arc chamber and pulled clear of the source by the extraction optics, they must be raised to a defined intermediate energy before they enter the analyser magnet and the main acceleration column. This power set provides the regulated potential and current that establishes that first energy step, setting the boundary conditions for the entire beamline that follows.
Within the source terminal, the pre-accel supply is one of a stacked group of high-voltage modules referenced to the source platform potential. It must deliver a clean, well-regulated output into an inherently noisy environment, one populated by plasma transients, beam loading, and the occasional high-voltage spark-down. As a “SET”, the part is supplied as a matched assembly rather than a bare board: it typically combines the power conversion stage, regulation and feedback electronics, protective interlock circuitry and the connectorised harness needed to integrate with the source terminal controller.
Because the pre-acceleration energy directly influences beam transport efficiency, focus and ultimately implant dose uniformity, the stability of this supply is disproportionately important relative to its size. A drifting or unstable pre-accel rail propagates as energy contamination and angle error all the way to the wafer, which is why this assembly is a recognised spare-holding priority for fab engineering teams running AMAT implanters.
The pre-accel power set converts incoming prime or terminal power into a tightly regulated high-voltage output that defines the first energy increment imparted to the extracted ion beam. It operates as part of the source high-voltage stack and reports its status back to the terminal control electronics so that the beam can be tuned, interlocked and protected in real time.
The defining performance characteristic of this assembly is its ability to hold a stable output in the presence of plasma and beam-induced disturbances. Output regulation, ripple content and transient recovery all feed directly into beam energy purity, so the conversion and feedback stages are engineered for low noise and fast settling.
Operating at high potential inside a terminal that routinely arcs, the supply depends on solid insulation, creepage and clearance design together with active protection. Its survival of repeated spark events is as important as its steady-state accuracy.
Because the pre-acceleration stage sets the first energy reference for the beam, the condition of this power set is felt across the whole implant process. A healthy supply supports a stable, well-characterised beam; a degraded one undermines repeatability long before it fails outright.
Repeated source spark-downs and sustained high potential gradually degrade potting compounds, standoffs and creepage surfaces. Carbon tracking, partial discharge and eventual flashover are classic end-of-life signatures, often preceded by erratic output or audible arcing inside the terminal.
Switching devices, high-voltage rectifiers, transformers and bulk capacitors all accumulate thermal and electrical fatigue over thousands of operating hours. Capacitor dry-out, solder-joint cracking and semiconductor degradation manifest as rising ripple, regulation errors or sudden loss of output.
Faults in the regulation loop, readback path or connector harness produce some of the most disruptive symptoms: readings that no longer track the true output, supplies that will not enable, or intermittent dropouts driven by a marginal contact. These are frequently mistaken for source problems until the supply is swapped.
Replacement must be carried out by personnel trained in high-voltage and ion implanter safety, observing AMAT lock-out / tag-out procedures. The source terminal stores dangerous energy and must be fully de-energised and grounded before any work begins.
High-voltage source supplies are precisely the kind of single-point-of-failure item that justifies holding a qualified spare on the shelf. ESCT Fab Support offers the ES3033-121 pre-acceleration power set as a cost-effective, form-fit-function alternative to long OEM lead times, helping fabs protect implant uptime without overstocking.
It supplies the regulated high voltage that gives the extracted ion beam its first energy step in the source terminal, before the beam reaches the analyser magnet and main acceleration column. Its stability sets the baseline for beam energy purity and dose accuracy throughout the implant.
No. This is supplied as a new OEM-compatible assembly cross-referenced to AMAT OEM P/N 9090-00398 and ESCT P/N ES3033-121. It is verified to form, fit and function for the application but is not an original OEM part and is not sold as such.
It is intended for the source and extraction subsystem of Applied Materials Quantum and xR-class ion implantation systems that employ a pre-acceleration high-voltage stage. Confirm fitment against the OEM part number for your specific configuration.
Typical warning signs include unstable or drifting output, increased ripple, readback that disagrees with the true output, frequent interlock trips, slow recovery after spark-downs, or intermittent loss of beam. Audible arcing or visible tracking inside the terminal indicates insulation breakdown.
Installation should only be performed by technicians trained in ion implanter and high-voltage safety, following AMAT lock-out / tag-out and grounding procedures. The source terminal stores hazardous energy and must be fully discharged and grounded before any work is attempted.
A failed pre-accel supply takes the source terminal, and therefore the implanter, out of production. Because it is a single-point-of-failure item with potentially long replacement lead times, keeping a qualified spare on the shelf is a low-cost way to protect tool availability.
The Pre-Acceleration Power Set (AMAT OEM P/N 9090-00398, ESCT P/N ES3033-121) is the regulated high-voltage assembly that energises the pre-accel stage in the source terminal of AMAT Quantum and xR-class ion implanters. By establishing the beam’s first energy step with low ripple and stable regulation, it underpins energy purity, dose uniformity and tool uptime. Its exposure to high potential and repeated spark-downs makes it a known wear item and a sound spares-holding choice, and ESCT supplies a form-fit-function alternative to reduce cost and lead time.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 9090-00398. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
