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The Magnet Power Supply (AMAT OEM P/N 0090-90353) is the regulated high-current DC source that energises the electromagnet coils in an Applied Materials ion implanter beamline. On Quantum and xR-class implanters, the analysing (mass-resolving) magnet bends the extracted ion beam through a fixed radius so only ions of the desired mass-to-charge ratio reach the resolving aperture. That field is set by the current this supply delivers to the windings, making the unit a primary determinant of beam purity and dose accuracy.
Physically, it is a rack- or cabinet-mounted assembly that converts facility three-phase AC into a controlled DC output sourcing tens to hundreds of amperes into a low-resistance, highly inductive load. As a closed-loop current regulator, it trims the output to hold the set-point despite coil heating, line variation and load drift.
Because magnetic rigidity depends directly on field strength, small drifts in coil current shift the beam at the aperture and degrade species selection. The supply therefore sits at the heart of beam tuning and dose integrity, and a stable unit gives repeatable results across wafers and lots.
Within the beamline, the supply is the interface between facility power and the magnet coil, translating a field demand from the control system into regulated current. Its core responsibilities include:
The defining characteristic of a magnet supply is its current regulation. The coil resistance rises as the windings warm, so an unregulated source would let current, and field, drift. This unit holds a flat output through a precision feedback loop.
Delivering large DC currents into a low-resistance load dissipates substantial heat, so the supply depends on solid power semiconductors and effective cooling.
Because the analysing magnet field isolates the wanted species, the stability of this supply propagates into wafer-level results. A degraded unit appears as:
The rectifier and regulating semiconductors endure continuous high current and thermal cycling. Junction fatigue, solder-joint degradation or a cooling shortfall can cause a device to fail short or open, producing loss of output or an over-current trip on beam demand.
Ageing reference components, a drifting transducer, or degraded feedback circuitry let the current wander from its set-point. The symptom is subtle, the supply still runs, but the field is no longer where the readback claims, so the beam tune walks off and dose repeatability suffers before any hard fault.
Clogged filters, failing fans, restricted coolant flow or dried-out capacitors raise internal temperatures and increase ripple. This often shows first as intermittent over-temperature trips, added noise on the magnet current, or shutdowns under high output.
Replacement should be carried out by a qualified technician following the AMAT service documentation. As this is a high-current, high-stored-energy assembly driving an inductive load, lock-out and discharge steps are critical. A typical sequence is:
A magnet supply failure idles the entire beamline, so a verified shelf spare is a high-value decision. ESCT Fab Support helps implant teams keep these long-lead, high-cost assemblies available:
It supplies regulated high-current DC to the analysing magnet coils. That current sets the field that bends the beam and selects the desired species at the aperture, so it directly governs beam purity and dose stability.
No. It is supplied by ESCT Fab Support as a new, OEM-compatible part cross-referenced to AMAT P/N 0090-90353 and verified to match in form, fit and function. It is not an original AMAT OEM unit.
It is intended for AMAT Quantum and xR-class implanters where it drives the analysing magnet. Because configurations vary by tool revision, confirm compatibility before ordering.
Typical supply-side symptoms are readback that disagrees with demand, over-current or over-temperature trips, an unstable beam tune, and increased ripple. Confirming the coil resistance and insulation are within spec helps separate a supply fault from a magnet one.
This is a high-current assembly driving a large inductance with substantial stored energy. Lock out the AC feed, allow the DC bus and filter capacitors to discharge, and follow the AMAT procedure. The inductive load can generate hazardous voltages if disconnected while energised.
Yes. A magnet supply fault stops the beamline entirely and these units can carry long lead times, so a verified spare protects tool availability.
The Magnet Power Supply (AMAT OEM P/N 0090-90353, ESCT P/N ES3033-139) is the regulated high-current DC source that energises the analysing magnet on AMAT Quantum and xR-class implanters. By holding coil current, and therefore the bending field, at its set-point, it determines species selection, beam stability and dose repeatability. Its main risks are power-semiconductor failure, regulation drift and thermal or capacitor degradation. A verified, form-fit-function replacement from ESCT Fab Support keeps this critical asset available and protects implant yield and uptime.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0090-90353. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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