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The 3500-90027 Lock Nut, Scan Drive Shaft Ball Screw, Upper is a precision threaded locking fastener used in the end-station scan mechanism of Applied Materials ion implantation equipment. Fitted at the upper end of the scan drive shaft ball screw, it clamps the screw’s support components in place and preserves bearing preload so the scan axis can move the wafer with smooth, repeatable motion.
Although it is a small mechanical component, the lock nut carries out a role that directly protects scan accuracy. Reciprocating scan motion continually reverses load direction through the ball screw, and it is the lock nut’s clamping force that prevents those reversals from gradually loosening the assembly.
In the scan drive, a ball screw converts rotary motion from the drive motor into controlled linear travel of the scan arm. The upper lock nut performs several functions at the top of that shaft:
When each of these functions is performed correctly, the scan axis retains the stiffness and positional repeatability the implant process depends on.
The 3500-90027 is manufactured to precision thread and flatness tolerances so that clamping force is applied squarely to the bearing stack. Key characteristics of this class of locking fastener include:
Correct installation torque matters as much as the component itself: under-torquing leaves residual play, while over-torquing can distort the bearing seat or damage threads.
Ion implantation uniformity depends on the wafer moving through the beam at a tightly controlled velocity. Any mechanical play at the ball screw support translates into small deviations in scan position and speed. Over time, a loosening lock nut can contribute to dose non-uniformity, positioning faults and accelerated wear of the ball screw and bearings, problems that first appear as subtle process drift rather than an obvious mechanical failure.
Lock nut issues on the scan drive shaft typically present as:
Because these symptoms overlap with bearing and ball screw wear, the fastener should be checked whenever scan-axis mechanical problems are investigated.
ESCT Fab Support supplies the 3500-90027 lock nut as a verified 2nd New OEM-compatible part for Applied Materials equipment, helping fabs keep legacy scan drive assemblies serviceable without OEM lead times. Every part is checked for form, fit and functional compatibility with the referenced part number, and our engineers can help confirm the correct configuration for your tool before you order.
It is the locking nut that secures the upper end of the scan drive shaft ball screw in Applied Materials ion implantation equipment, holding the bearing and screw stack in position and preserving preload during scanning motion.
It sits at the upper end of the scan drive shaft ball screw within the end-station scan mechanism, clamping the ball screw support components against their seat.
The scan drive converts rotary motion into precisely controlled linear wafer motion. If the lock nut loses clamping force, preload on the ball screw support bearings relaxes, introducing play that degrades scan accuracy.
Common indicators include increased backlash in the scan axis, audible clicking or knocking during scan reversal, scan position faults, and uneven wear patterns on the ball screw and its support bearings.
Yes. Inconsistent scan velocity or positioning error caused by mechanical play can translate into dose non-uniformity across the wafer, so the fastener has a direct link to process quality.
Through mechanical inspection during preventive maintenance, backlash and torque checks on the scan axis, vibration or noise observations, and review of scan-axis motion faults.
Best practice is to inspect the nut and its locking feature whenever the ball screw or its bearings are serviced, and to replace it if the locking element shows wear or the nut has been repeatedly removed.
Yes. Thread specification, locking style and dimensional compatibility should be confirmed against the OEM part number 3500-90027 and your tool configuration before installation.
Yes. ESCT supports form, fit and functional verification aligned with OEM requirements before the part ships.
This product is supplied as a 2nd New OEM-compatible part, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.
The 3500-90027 Lock Nut, Scan Drive Shaft Ball Screw, Upper is a small but mechanically critical fastener in the Applied Materials scan drive assembly. By preserving ball screw preload and resisting loosening under reciprocating motion, it protects scan accuracy, implant uniformity and the service life of the surrounding drive components. Sourcing it from ESCT Fab Support gives you verified quality, reduced lead times, and expert technical support, keeping your equipment operational and production-ready.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 3500-90027. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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