OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Filament Power Supply (OEM P/N 1140-00154) is the dedicated low-voltage, high-current source that energises the ion source filament inside Applied Materials (AMAT) Quantum and xR-class ion implantation systems. In a thermionic ion source, a refractory filament, typically tungsten, is driven to incandescence so that it emits a copious stream of electrons. Those electrons are accelerated into the arc chamber, where they collide with the feed gas (for example BF₃, PH₃ or AsH₃) and strike the arc discharge that produces the dopant ion beam. None of that beam current exists until the filament is hot, and the filament cannot get hot without a stable, well-regulated supply behind it. The 1140-00154 is that supply.
Electrically, a filament supply is an unusual beast. It must deliver tens to well over a hundred amperes into a load measured in fractions of an ohm, while the filament voltage may sit at only a few volts. At the same time the entire supply usually floats at the source extraction potential, tens of kilovolts above ground, so its output stage, regulation electronics and feedback path all have to operate referenced to a high-voltage deck. This combination of very high current, very low impedance and high common-mode voltage makes the filament power supply one of the more demanding power assemblies in the whole implanter.
Because filament condition drives beam current, beam stability and source lifetime, the behaviour of the 1140-00154 has a direct bearing on dose accuracy, source-housing uptime and the consistency of every implanted wafer. ESCT Fab Support stocks the ES3033-126 as a fully tested, form-, fit- and function-verified equivalent so that fabs running AMAT implant tools can restore source heating without waiting on extended OEM lead times.
Within the source subsystem, the filament power supply sits between the high-voltage deck distribution and the source filament feedthroughs. It accepts a command from the source controller, regulates the current it pushes into the filament, and reports back measured current and voltage so the control loop can manage emission. Its principal functions include:
The defining characteristic of the 1140-00154 is its ability to source very large currents into a near-short-circuit load while holding regulation tight. Key electrical attributes include:
Because the output floats at extraction potential, isolation integrity and clean feedback are as important as raw output capability:
The filament supply is upstream of beam generation, so its health propagates straight through to wafer-level results. A degraded or unstable 1140-00154 can manifest as:
Years of sustained high-current duty stress the output semiconductors, solder joints and high-current connections. Power devices can fail short or open, bus-bar and terminal joints can fatigue and develop resistive hot-spots, and cooling degradation can push junctions past their thermal limits, any of which causes loss of output or erratic regulation.
Source arcing and high-voltage breakdown inject fast transients into the floating supply. Repeated events can degrade isolation barriers, puncture insulation, damage sense and control circuitry, and erode connector contacts, eventually compromising the supply’s ability to hold off the deck voltage or report accurate telemetry.
Ageing reference, sense and control components cause the current setpoint to drift or the loop to become unstable. The result is filament current that no longer tracks the commanded value, intermittent fault trips, or oscillation that the operator sees as a restless, unrepeatable beam.
Because this supply operates on the high-voltage source deck, replacement must follow your site’s lockout/tagout and high-voltage safety procedures and be carried out only by trained service personnel. A typical sequence is:
The filament supply is a single point of failure for beam generation, so keeping a tested spare on the shelf is sound risk management for any fab running an AMAT implant fleet. Sourcing the ES3033-126 through ESCT Fab Support offers:
It delivers regulated, high-current, low-voltage power to the ion source filament, heating it to thermionic emission temperature so it releases the electrons that strike and sustain the arc discharge. Without it, the source produces no beam.
No. The ES3033-126 is supplied as a new, OEM-compatible replacement that has been verified to the form, fit and function of AMAT P/N 1140-00154. It is not an original Applied Materials part and carries no implication of OEM endorsement; the OEM reference is given solely for cross-identification.
The ion source sits on the extraction deck, which is held at tens of kilovolts to accelerate ions out of the arc chamber. Anything connected directly to the filament, including this supply, must operate referenced to that same potential, which is why isolation and creepage design are so important.
A failed filament typically reads as an open circuit at a sensible commanded current, whereas a failing supply shows symptoms such as inability to reach setpoint, current that does not track command, repeated fault trips, or unstable, oscillating output even with a known-good filament fitted. Comparing telemetry against the command is the quickest discriminator.
Installation must be performed by service personnel trained in high-voltage and ion-source work, following your site’s lockout/tagout and safety procedures. The supply lives on an energised high-voltage deck, so verifying a zero-energy state and discharging stored charge comes before contact.
The ES3033-126 is intended as a direct replacement wherever OEM P/N 1140-00154 is specified on AMAT Quantum / xR-class implanters. Confirm the OEM part number on your existing unit before ordering, and our team can help cross-reference against your tool configuration.
The Filament Power Supply (OEM P/N 1140-00154 / ESCT P/N ES3033-126) is the high-current, high-voltage-floating supply that heats the ion source filament in AMAT Quantum and xR-class ion implanters. Its stability governs beam current, dose uniformity and source lifetime, while its failure modes, output-stage breakdown, arc-induced isolation damage and regulation drift, can quietly erode yield long before they trip the tool. ESCT Fab Support supplies a tested, form-, fit- and function-verified equivalent that lets fabs restore reliable source heating quickly and at lower cost than the OEM route, making it a sensible spare to hold against unplanned implant downtime.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 1140-00154. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
We use cookies We use analytics cookies to see how visitors use this site, so we can improve it. They are set only if you accept. Read our Cookie Policy.
