OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Chassis, Wired Magnet Filter Assembly (AMAT OEM P/N 0090-90500) is a pre-wired electrical enclosure that houses and interconnects the filtering components feeding one of the electromagnet circuits within an Applied Materials ion implantation system. In an implanter, large electromagnets, the analysing magnet, the mass-resolving magnet and the various beam-steering and focusing coils, are driven by high-current direct-current (DC) supplies. The current delivered to these coils must be exceptionally clean and stable, because the magnetic field strength they produce is what bends, mass-selects and focuses the ion beam. The “MAG FILTER” chassis is the assembly that conditions that coil drive current, suppressing ripple and transient noise before it reaches the magnet.
As a “wired” (WRD) chassis, this part is supplied as a complete sub-assembly rather than a bare panel: the metal chassis is populated with its filter elements, chokes/inductors, smoothing and snubber capacitors, bleed resistors and the associated busbars or heavy-gauge harness, and pre-terminated to a defined connector and lug scheme. This integration is deliberate. Magnet filter wiring carries substantial current and operates at potentials that demand correct creepage, clamping and torque, so receiving the chassis fully wired removes a major source of build error during a field replacement.
Electrically, the chassis sits between the magnet power supply output and the magnet coil itself, forming part of the power-conditioning chain that determines how reproducibly the field tracks its current set-point. Mechanically, it is a serviceable line-replaceable unit (LRU) mounted within the implanter’s power cabinet or beamline electronics bay, where it shares its thermal and grounding environment with the inverters and supplies around it. Because a drift or fault in this filtering path translates directly into beam instability, the magnet filter chassis is a quietly critical link in the implant signal chain.
The assembly performs several interlocking jobs that together keep the magnet field clean, stable and safe to energise. Its functional responsibilities include:
The defining electrical metric for a magnet filter is how effectively it converts a switched, ripple-laden supply output into a near-pure DC current at the coil. The combination of series inductance and shunt capacitance forms a low-pass network whose corner frequency is set well below the regulator’s switching frequency. The cleaner the resulting current, the more faithfully the magnetic field follows the commanded value, which in turn governs how tightly the implant beam holds its mass selection and trajectory.
Because the assembly carries heavy DC current at elevated potential, its conductors, terminations and dielectric clearances are as important as its filter values. The busbars and harness must handle the rated current without excessive temperature rise, while creepage and clearance distances and the capacitor and choke insulation must withstand the working voltage with margin. A clean, low-impedance ground bond ties the chassis into the system shielding scheme to keep stray noise out of nearby control electronics.
A healthy magnet filter chassis is invisible in normal operation, but a degraded one announces itself through beam instability and erratic implant results. Because the field it conditions sets where the beam goes and which ion species is selected, its condition feeds straight into dose and placement accuracy. The practical consequences of a failing or marginal assembly include:
The filter capacitors are the most thermally stressed components in the chassis. Over years of ripple-current duty and cabinet heat, capacitance falls and equivalent series resistance rises, so smoothing weakens and ripple climbs. In severe cases a capacitor vents, bulges or shorts, producing a hard supply fault or visible damage. This is the classic age-related failure that gradually erodes field stability before any alarm is raised.
High-current joints loosen, oxidise or overheat under thermal cycling. A high-resistance lug or busbar connection develops a localised hot spot that discolours insulation, raises voltage drop and, if left unchecked, can scorch the harness. Because the “wired” chassis relies on dozens of correctly torqued terminations, connection integrity is a recurring inspection point and a common root cause of intermittent faults.
The series choke can suffer insulation breakdown or winding faults from sustained thermal and electrical stress, while a failed bleed resistor leaves the filter unable to discharge safely after shutdown. Contamination, moisture ingress or aged dielectric can lower creepage margins and lead to tracking or arcing. Any of these compromises both the assembly’s filtering and its safety behaviour during de-energisation.
Replacement is a qualified-engineer task because of the stored energy, high current and high voltage involved. Always work to Applied Materials’ documented lock-out/tag-out and discharge procedures for the specific platform. A typical sequence is:
Magnet filter chassis are exactly the kind of slow-ageing, high-impact assembly that benefits from a planned spares position rather than reactive ordering. Holding a verified unit on the shelf turns a potential multi-day outage into a managed swap. ESCT Fab Support helps fabs and refurbishers keep these platforms running by offering:
It is a pre-wired filter enclosure that conditions the DC current supplied to one of the implanter’s electromagnet coils, smoothing ripple and suppressing transients so the magnetic field, and therefore the ion beam’s mass selection and trajectory, stays stable and accurate.
No. This assembly is supplied as a new, OEM-compatible part. It is cross-referenced to Applied Materials OEM P/N 0090-90500 and verified to form, fit and function, but it is not an original AMAT-branded item and is not supplied by or affiliated with Applied Materials.
“Wired” means the chassis arrives fully populated and interconnected, chokes, capacitors, resistors, busbars and harness terminated to the defined scheme, rather than as a bare panel. This reduces build error and shortens the field replacement compared with assembling components individually.
Degradation raises field ripple and instability, which shows up as beam current jitter, drifting mass resolution, dose non-uniformity and longer beam-tune times. In worse cases a failed capacitor or connection can cause hard supply faults or trips. The net effect is reduced yield and tool availability.
Yes. The filter capacitors and the magnet coil store energy, so you must follow the platform’s lock-out/tag-out and discharge procedure and verify zero stored energy with a meter before disconnecting any conductor. This is a qualified-engineer task.
Match the AMAT OEM P/N 0090-90500 against your tool’s parts documentation for the magnet supply you are servicing, and contact ESCT Fab Support with your tool configuration. We can help verify applicability before despatch so you receive the correct conditioning assembly first time.
The Chassis, Wired Magnet Filter Assembly (AMAT OEM P/N 0090-90500, ESCT P/N ES3033-152) is a pre-wired power-conditioning enclosure that smooths and protects the DC current driving an electromagnet within an Applied Materials ion implantation system. By attenuating ripple, suppressing transients and providing safe discharge paths, it keeps the magnetic field stable enough to preserve mass resolution, beam position and implant accuracy. Its principal failure modes, capacitor ageing, high-current connection faults and choke or insulation breakdown, develop gradually and degrade yield before they trip an alarm, which makes it an ideal candidate for proactive spares holding. ESCT Fab Support supplies form-, fit- and function-verified units with technical support to keep long-lifecycle implanter fleets productive.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0090-90500. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
