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The 3060-90288 Bearing, Scan Arm V BELT Light Tension Roller is a precision rolling-element bearing used in the scan arm drive of Applied Materials ion implantation equipment. Mounted inside the light tension roller, it lets the roller rotate freely against the V-belt while maintaining steady belt tension, a quiet contribution to smooth, repeatable scan motion.
Belt-driven scan mechanisms depend on every roller in the belt path running true. When this bearing degrades, the effects propagate quickly: belt tension becomes inconsistent, vibration enters the drive, and both the belt and the scan motion suffer.
Together these functions support the constant scan velocity that ion implantation requires for uniform dose delivery across the wafer.
Bearings in this application are selected for smooth low-torque rotation, dimensional accuracy and clean operation:
The scan arm must carry the wafer through the beam at a tightly controlled velocity. A roller bearing that has developed roughness, play or drag introduces tension fluctuations and vibration into the belt drive. These can appear in the process as scan velocity variation and, ultimately, implant non-uniformity, while mechanically the failing bearing accelerates belt wear and risks an unplanned stop if the roller seizes.
Because a failing roller bearing and a failing belt produce overlapping symptoms, both should be inspected together during any scan-drive investigation.
ESCT Fab Support supplies the 3060-90288 bearing as a verified 2nd New OEM-compatible part for Applied Materials equipment. We help fabs keep legacy scan arm assemblies in production without OEM lead times, and our engineers can confirm fit and configuration against your tool before you order.
It is the rolling-element bearing inside the light tension roller that guides and tensions the V-belt on the scan arm drive of Applied Materials ion implantation equipment.
It is fitted within the light tension roller on the scan arm V-belt path, allowing the roller to spin freely while it holds the belt at the correct tension.
Consistent belt tension keeps the scan arm’s motion smooth and repeatable. If tension varies because a roller no longer turns freely, scan velocity can fluctuate and positioning accuracy suffers.
Common indicators include audible squealing or grinding, roughness or play when the roller is turned by hand, belt flutter or accelerated belt wear, and vibration in the scan mechanism.
Yes. Vibration and inconsistent scan motion caused by a degraded bearing can affect implant uniformity, and a seized roller can rapidly destroy the belt and interrupt production.
Yes. Worn rolling elements and degraded lubricant can shed particles and debris, which is undesirable anywhere within semiconductor processing equipment.
Through PM inspection of the belt path, manual rotation checks for roughness or play, noise and vibration observations, and inspection of belt wear patterns.
The belt should always be inspected at the same time. If it shows wear, glazing or damage from the failing roller, replacing both together avoids a repeat intervention.
Yes. Bearing dimensions and configuration should be confirmed against OEM part number 3060-90288 and your tool configuration before installation.
Yes. ESCT supports form, fit and functional verification aligned with OEM requirements before the part ships.
This product is supplied as a 2nd New OEM-compatible part, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.
The 3060-90288 Bearing, Scan Arm V BELT Light Tension Roller is a precision rolling-element bearing whose condition directly affects belt tension stability, scan motion smoothness and implant uniformity in Applied Materials ion implantation equipment. Replacing it promptly when wear appears protects the belt, the scan mechanism and the process itself. Sourcing it from ESCT Fab Support gives you verified quality, faster availability, and expert-level validation, keeping your equipment stable, repeatable, and production-ready.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 3060-90288. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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