OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Arc Power Supply, AMAT OEM P/N 0090-91649, is a dedicated source power module used within Applied Materials ion implantation platforms to strike and sustain the plasma discharge inside the ion source. In an implanter, the ion source is where neutral feed gas (typically boron trifluoride, phosphine, arsine or similar dopant species) is broken down into a glowing plasma so that ions can be extracted, mass-analysed and accelerated toward the wafer. The arc supply is the electrical workhorse that energises that discharge, driving current between the source cathode (or filament) and the arc chamber walls so that ionisation can begin and remain stable.
Functionally, this unit sits in the source power rack alongside the filament/cathode supply, the extraction supply and the source magnet supply. It is one of the most heavily duty-cycled power converters in the entire tool because the arc discharge is the foundation of beam current: every milliamp of dose ultimately originates from the plasma the arc supply maintains. The module is referenced to a high-voltage extraction potential, so it is engineered to float at elevated potential while still delivering tightly regulated low-voltage, high-current output into a chaotic, non-linear plasma load.
Because the arc discharge directly governs beam current stability, source life and ultimately dose uniformity across the wafer, a degraded or unstable arc supply is felt immediately in implant results. ESCT supplies the Arc Power Supply (ES3033-135) as a form-, fit- and function-verified replacement for fabs that need to restore source power performance without the cost and lead time of sole-source OEM procurement.
The arc supply does far more than simply pass current into the source. It must ignite the discharge, transition smoothly into a regulated operating mode, and then hold the plasma steady against constantly shifting impedance as gas flow, filament emission and chamber condition vary. Its core responsibilities include the following.
As a high-current power converter that operates at a floating potential and feeds a non-linear plasma, the arc supply must combine raw power-handling capability with precise, low-noise regulation. Its performance is best understood in two domains: power conversion and control/signal integrity.
The output stage is built to source substantial DC current at relatively modest voltage, with rapid transient response so the discharge does not extinguish during load swings or recover with overshoot that stresses the source.
Because the unit floats at extraction potential, its control and feedback path must cross a high-voltage isolation barrier cleanly while preserving setpoint accuracy and readback fidelity.
Because the arc discharge is the origin of beam current, the condition of this supply propagates directly into implant quality and fab productivity. A healthy, well-regulated arc supply underpins the following outcomes.
The arc supply endures one of the harshest electrical environments in the tool: continuous high current, repetitive arc-out transients and operation at floating high potential. Failures tend to cluster around a few recurring mechanisms.
Bulk electrolytic capacitors dry out and lose capacitance over thousands of hours of high-ripple duty, while switching and rectifier devices fatigue under repeated spark-induced surges. The result is rising output ripple, sluggish transient response and eventually an inability to source rated arc current, symptoms that show up as drifting or noisy beam current.
Drift in the current-sense path, ageing reference components or a failing feedback amplifier can cause the supply to regulate to the wrong setpoint, hunt around the target value, or recover from arc-outs with overshoot. This manifests as unstable plasma, erratic dose readings and repeated glitch faults that frustrate beam tuning.
Blocked airflow, failing fans or degraded heatsink interfaces drive over-temperature trips, while contamination and humidity at the floating high-voltage barrier can lead to tracking, flashover or isolation breakdown. High-current output terminals and harness connectors also loosen or oxidise, producing intermittent arcs, voltage drops and nuisance interlocks.
Replacement should always be performed by qualified personnel following Applied Materials service procedures and the site’s lockout/tagout and high-voltage safety policies. Because this supply floats at extraction potential, so energy-isolation discipline is required. A typical replacement sequence follows these steps.
Source power supplies are classic single-point-of-failure items: when the arc supply fails, the implanter cannot make beam, and the lot stops. Holding a verified replacement on the shelf protects throughput on dose-critical steps. ESCT supports that strategy with the following advantages.
It provides the high-current arc discharge power that ignites and sustains the plasma inside the ion source. That plasma is what ionises the dopant feed gas so ions can be extracted to form the beam, making this supply fundamental to beam current and dose.
No. This is not an original Applied Materials OEM part. It is supplied as an OEM-compatible replacement that has been verified to match the form, fit and function of AMAT P/N 0090-91649, referenced under ESCT P/N ES3033-135.
Typical warning signs include unstable or drifting beam current, difficulty striking or holding the arc, repeated glitch and source trips, over-temperature faults, and noisy or out-of-tolerance current readback. These often appear gradually as capacitors and switching devices age.
The arc output is referenced to the source body, which sits at the extraction potential rather than at ground. The supply is therefore designed to float at that potential, with isolated control and feedback. This is why isolation integrity and high-voltage safety discipline are critical during service.
Installation should be carried out by technicians trained on AMAT implanters and high-voltage source power, following the tool’s service documentation and site safety procedures. The module operates at hazardous potentials, so proper energy isolation and verification are mandatory.
Because the arc supply is a single-point-of-failure item that halts beam production when it fails, many fabs hold at least one verified spare per implanter family. Ordering by ESCT P/N ES3033-135 keeps a consistent, traceable replacement available when needed.
The Arc Power Supply (AMAT P/N 0090-91649, ESCT P/N ES3033-135) is the source power module that strikes and sustains the plasma discharge at the heart of an AMAT ion implanter. By delivering regulated, high-current arc power while floating at extraction potential, it directly governs beam current stability, source life and dose control. Ageing capacitors, control-loop drift, thermal stress and isolation breakdown are its principal failure mechanisms, and because it is a single-point-of-failure item, a verified spare is cheap insurance for any dose-critical implant operation. ESCT offers a form-, fit- and function-verified replacement to restore source power performance quickly and economically.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 0090-91649. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
We use cookies We use analytics cookies to see how visitors use this site, so we can improve it. They are set only if you accept. Read our Cookie Policy.
