OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The Arc Power Supply is the regulated discharge supply that sustains the plasma inside the ion source of an Applied Materials (AMAT) ion implanter. In a hot-cathode or indirectly heated cathode (IHC) source, the arc supply establishes and maintains the electrical discharge between the cathode and the surrounding arc chamber wall (the anode). It is this arc discharge that ionises the feed gas, dopant vapour, or sublimated solid source material to produce the dense, stable plasma from which the extraction optics pull the ion beam. Without a clean, well-regulated arc, there is no beam to scan across the wafer.
Within the AMAT Quantum and xR-class architecture, the Arc Power Supply sits in the source-subsystem power rack and works in concert with the filament (or cathode-heater) supply, the source-bias/extraction supplies, and the gas and vapour delivery hardware. It typically delivers a current-regulated or voltage-clamped output in the range of tens of volts at currents up to several amps, riding on the high source potential, and must respond to the highly dynamic, sometimes capricious electrical load that a glow-to-arc plasma transition represents. Because the arc directly governs ion density, it is one of the most influential single power modules in the entire beamline.
As a high-duty, electrically stressed module operating adjacent to high voltage and aggressive process chemistries, the Arc Power Supply is a recognised consumable-adjacent spare. Keeping a verified replacement on the shelf protects against the kind of unplanned source-rack downtime that can idle an implant tool for days while a single supply is sourced, repaired, or swapped.
The arc supply is responsible for igniting and then holding a stable discharge under a load that changes continuously with gas pressure, cathode temperature, and recipe transitions. Its core duties include:
An arc supply is only useful if it can hold its set point through a load that behaves like a partial short one moment and an open circuit the next. Two performance dimensions dominate.
Stable beam current depends on tight regulation of the arc output and on the supply’s ability to recover from glitches without dropping the plasma. Key electrical characteristics include:
Because the arc supply floats near source potential and sits in an electrically noisy rack, its insulation and immunity matter as much as its raw output:
Because the arc discharge sets the very density of the plasma being extracted, the condition of the Arc Power Supply propagates directly into the implant result. A degraded or marginal unit can show up as:
The relentless cycle of arcing, current-limiting, and re-striking fatigues the power semiconductors, snubbers, and output filtering. Over time this manifests as degraded regulation, audible or thermal hot spots, or an outright output-stage failure that leaves the source unable to ignite.
Operating near source potential in a rack subject to repeated arc events stresses insulation, standoffs, and high-voltage connections. Surface contamination, tracking, or a cracked standoff can lead to flashover and intermittent faults that are difficult to diagnose because they appear only under full source bias.
Drift in the sense and regulation circuitry, failing electrolytic capacitors, or a degraded interlock and feedback connector can cause the supply to misreport arc conditions, refuse to enable, or regulate to the wrong set point even when the output hardware is otherwise healthy.
Replacement should be carried out only by trained service personnel following AMAT lockout/tagout and high-voltage safety procedures. The following sequence outlines a typical swap:
Source-rack power modules are exactly the kind of high-impact, hard-to-source spare that benefits from a planned inventory rather than a reactive scramble. ESCT Fab Support helps fabs and service teams keep these systems running by offering:
It powers and regulates the arc discharge inside the ion source. That discharge ionises the feed gas or dopant material to create the plasma from which the beam is extracted, so the arc supply directly governs how much beam current the source can deliver.
No. This is supplied as an OEM-compatible replacement cross-referenced to AMAT P/N 1140-00056 under ESCT P/N ES3033-132. It is verified to match the original in form, fit, and function, but it is not an original Applied Materials branded part.
Match the AMAT OEM part number 1140-00056 to the unit currently fitted in your tool. Because source-power configurations can vary between implanter builds, we recommend confirming your exact configuration with our team before ordering.
Typical symptoms include difficulty striking or holding the arc, beam-current drift or instability, frequent arc-glitch aborts, intermittent faults that only appear under full source bias, and the supply refusing to enable despite correct source conditions.
No. The module operates near high voltage in the source rack and must be replaced only by trained service personnel following AMAT lockout/tagout and high-voltage discharge procedures, with proper verification of arc strike and regulation before returning to production.
Yes, where practical. The arc supply is a high-impact module whose failure can idle the whole tool, and OEM lead times can be long. Holding a verified spare lets you swap and qualify quickly rather than waiting on a sourcing cycle.
The Arc Power Supply (AMAT P/N 1140-00056, ESCT P/N ES3033-132) is the discharge supply that ignites and regulates the plasma inside the ion source of AMAT Quantum and xR-class implanters. Its regulation, transient response, isolation, and feedback integrity translate directly into beam-current stability, dose accuracy, and tool availability. As a high-stress, high-consequence module, it is a prime candidate for buffer sparing, and ESCT Fab Support offers a verified, cost-effective alternative to minimise source-rack downtime and protect implant yield.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Applied Materials part number 1140-00056. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Applied Materials, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
