660-098040-001
MAGNETEC POWER SUPPLY

Magnetec power supply (OEM P/N 660-098040-001), magnetic coil DC power supply module for LAM plasma process systems

ESCT P/N ES2022-108, regulated DC supply for magnetic confinement and magnetron drive in LAM etch and plasma tools

The Magnetec Power Supply is a regulated direct-current power module used within LAM plasma process platforms to energise the magnetic-field hardware that shapes and confines the plasma during etch and related processing. Carrying OEM P/N 660-098040-001 and stocked by ESCT Fab Support as ES2022-108, it converts the tool’s incoming AC distribution into a precisely controlled, low-ripple DC output that feeds electromagnet coils or magnetron drive circuitry. Because plasma uniformity in a magnetically assisted reactor is directly tied to the stability of the coil current, this supply is one of the quieter but more consequential electronic assemblies in the system.

Physically, the unit is a self-contained power assembly built around a transformer or switching front end, a rectification and filtering stage, current-regulating control electronics, and protection circuitry. It mounts in the tool’s electronics bay or power cabinet and is wired into the system’s interlock and control network so that the host controller can command set-points, monitor feedback, and shut the output down on a fault. The “Magnetec” designation reflects its role in driving magnetic elements rather than supplying general logic or heater power.

When the supply degrades, the symptoms rarely present as an outright tool crash. Instead, fabs see drift in etch rate, centre-to-edge non-uniformity, or intermittent magnetic-field faults that are easy to misattribute to the chamber. Understanding what this module does, and how it fails, helps engineers diagnose problems quickly and keep a critical spare on the shelf.

Functional role of the Magnetec power supply in LAM plasma platforms

The supply sits between the tool’s facility power and the magnetic hardware, acting as the regulated current source that determines field strength and stability. Its core responsibilities include:

• Converting incoming AC into a stable, regulated DC output suited to driving inductive coil loads.
• Maintaining commanded coil current within tight tolerance so the magnetic field, and therefore plasma confinement, stays uniform.
• Responding to set-point changes from the host controller as the process recipe steps through different conditions.
• Providing current and voltage feedback to the control system for closed-loop regulation and logging.
• Enforcing protection limits (over-current, over-temperature, and output fault shutdown) to safeguard the coils and downstream hardware.
• Integrating with the tool’s interlock chain so the output is inhibited when safety or process conditions are not met.

Electrical and signal performance

For a magnetic-drive supply, performance is judged less by raw output capacity and more by how cleanly and repeatably it holds current into an inductive load. Two areas matter most.

Output regulation and ripple

The supply must hold its commanded output against line variation, load change, and thermal drift while keeping ripple and noise low. Excess ripple on the coil current modulates the magnetic field, which can translate into measurable variation in plasma behaviour across the wafer.

• Tight line and load regulation so field strength stays constant during processing.
• Low output ripple to avoid imprinting field fluctuations onto the plasma.
• Stable thermal behaviour so output does not drift as the cabinet warms.
• Accurate feedback signalling that matches actual delivered current.

Control, sequencing and protection

Because the coil load is inductive, the supply’s control loop and protection must manage current ramps gracefully and react to faults without damaging the output stage or the magnetic hardware.

• Controlled ramp-up and ramp-down of coil current to avoid voltage transients.
• Reliable handshake with the host controller for enable, set-point, and status.
• Fast over-current and over-temperature protection that trips cleanly.
• Predictable fault reporting so the tool can flag the correct alarm.

Impact on tool performance and yield

Because the magnetic field directly influences plasma density and distribution, the condition of this supply propagates straight into process results:

• Output drift shifts etch rate and depth, eroding process-control margins.
• Ripple or instability degrades centre-to-edge uniformity across the wafer.
• Intermittent faults cause unplanned aborts and wafers at risk of scrap.
• Repeated nuisance trips reduce tool availability and throughput.
• Misdiagnosed field problems consume engineering time chasing the chamber instead of the supply.

Common failure modes

Output stage and filter degradation

Electrolytic capacitors, power semiconductors, and filtering components age under heat and ripple current. As they degrade, output ripple rises and regulation loosens, producing subtle field instability before any hard fault appears.

Thermal and connection faults

High coil currents stress connectors, terminals, and solder joints. Loose or oxidised connections raise resistance, generate localised heat, and can cause intermittent dropouts or over-temperature trips that come and go with thermal cycling.

Control and feedback errors

Drift in the control electronics or feedback sensing causes the delivered current to diverge from the commanded value. The tool may still report a healthy set-point while the actual magnetic field is wrong, leading to silent process excursions.

Installation and replacement guidance

Replacement should follow the tool OEM’s documented service procedure and be performed by qualified personnel. A typical sequence is:

• Place the tool in a safe service state and lock out and tag out all electrical sources.
• Confirm the cabinet is fully de-energised and allow any stored charge to dissipate before touching wiring.
• Label and photograph all power, coil, and signal connections before disconnecting.
• Remove the failed supply, noting mounting orientation and any shims or thermal interfaces.
• Fit the replacement, secure mountings, and reconnect power, coil, and control leads to the documented torque and pinout.
• Restore power, verify output regulation, ripple, and feedback against specification, and confirm interlocks trip correctly.
• Run process qualification or uniformity checks before returning the tool to production.

Spare parts strategy for LAM plasma tools

Magnetic-drive power supplies are low-volume, high-impact spares: a fab may hold only one or two across a fleet, yet a failure can idle a production tool. Sourcing through ESCT Fab Support offers practical advantages:

• Parts verified to the original form, fit, and function for confident drop-in replacement.
• A defined lead time of approximately 3 weeks to support planned maintenance and spares replenishment.
• A cross-referenced ESCT P/N (ES2022-108) tied to the OEM P/N for clear, repeatable ordering.
• A cost-effective alternative to OEM list pricing without compromising on functional equivalence.
• Support for fleet standardisation so identical spares can be stocked across matching tools.

Frequently asked questions

What does the Magnetec power supply actually do?

It is a regulated DC power module that drives the magnetic coil or magnetron hardware in LAM plasma process tools, supplying stable current so the magnetic field that confines and shapes the plasma stays uniform and repeatable.

Is this an original OEM part?

No. This is supplied as a new, OEM-compatible part. It is not an original LAM part and is not sold as one. It is verified to match the original component in form, fit, and function and cross-references to OEM P/N 660-098040-001.

How do I know if my existing supply has failed?

Typical signs include rising output ripple, drift in coil current versus set-point, intermittent magnetic-field faults, unexplained process non-uniformity, or over-temperature trips. Many failures begin as subtle process drift rather than a hard fault.

What is the lead time?

The current lead time is approximately 3 weeks. We recommend holding this assembly as a critical spare given its impact on tool availability and process uniformity.

Can it be fitted by our own technicians?

Yes, provided the work is carried out by qualified personnel following the tool OEM’s service procedure, with proper lockout/tagout and verification of output, feedback, and interlocks before the tool is returned to production.

Does it require recalibration after installation?

After fitting, verify output regulation, ripple, and feedback against specification and confirm the magnetic field behaves correctly through the tool’s control system. Run the relevant process qualification or uniformity checks before resuming production.

Summary

The Magnetec Power Supply (OEM P/N 660-098040-001, ESCT P/N ES2022-108) is the regulated DC source that drives the magnetic hardware in LAM plasma process tools, and its stability translates directly into plasma uniformity, etch control, and yield. Failures often emerge as gradual drift, ripple, or intermittent field faults rather than dramatic shutdowns, which makes a verified spare on the shelf a sound investment. ESCT Fab Support provides this assembly verified to form, fit, and function, with a defined lead time of around 3 weeks to support both reactive repairs and planned maintenance.

Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Lam Research part number 660-098040-001. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Lam Research, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.

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