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The 853-017086-002 ESC Power Supply generates the precisely controlled high-voltage DC output that drives the electrostatic chuck (ESC) in Lam Research etch equipment. The chuck’s clamping force (and with it the wafer’s flatness, thermal contact and stability during processing) depends directly on this supply’s output quality.
ESCT Fab Support supplies the 853-017086-002 as a verified 2nd New OEM-compatible ESC power supply for Lam Research systems, with repair support for legacy chucking electronics.
It is the high-voltage DC power supply that drives the electrostatic chuck (ESC) in Lam Research etch systems, generating the clamping voltage that holds the wafer flat during processing.
Stable clamping voltage keeps the wafer flat and thermally coupled to the chuck. Unstable clamping degrades temperature control and can cause wafer movement, backside helium leaks or de-chucking problems.
Clamping faults, wafer sticking or de-chuck errors, backside helium flow excursions, drifting or noisy clamp voltage, and chucking-related alarms.
Yes. Poor clamping degrades wafer temperature uniformity, which shows up as etch non-uniformity; intermittent clamping can scrap wafers outright.
Through clamp-voltage monitoring, helium backside pressure trends, de-chuck behaviour and the tool’s chucking diagnostics.
Yes. Configuration and fitment should be confirmed against OEM part number 853-017086-002 and your tool configuration before installation.
Yes. ESCT supports form, fit and functional verification aligned with OEM requirements before the part ships.
This product is supplied as a 2nd New OEM-compatible part, verified to meet form, fit, and functional requirements aligned with the relevant part number. It is not an original OEM manufacturer part.
The 853-017086-002 ESC Power Supply provides the stable clamping voltage that holds and thermally couples the wafer on Lam Research etch chucks. Its health governs clamping reliability, temperature uniformity and wafer safety. Sourcing it from ESCT Fab Support gives you verified quality, reduced lead times, and expert technical support, keeping your equipment stable, efficient, and production-ready.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Lam Research part number 853-017086-002. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Lam Research, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
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