OEM P/N:
ESCT P/N:
PART TYPE:
OEM:
The ESC Power Supply (OEM P/N 853-025054-018) is the dedicated high-voltage direct-current source that energises the electrostatic chuck within LAM plasma etch and photoresist-strip process modules. In a modern semiconductor fab, the electrostatic chuck does the job that a mechanical clamp ring once performed, holding the wafer flat against the cathode by electrostatic attraction rather than by physical force. That attraction depends entirely on a precisely regulated, very high-impedance DC potential applied between the wafer and the embedded chuck electrodes. This power supply is the component that generates, controls and monitors that potential, making it one of the more critical electronic subassemblies in the chamber’s support electronics.
Physically, the unit is a self-contained, rack- or module-mounted assembly comprising a high-voltage DC converter, regulation and feedback circuitry, current-limit and arc-detection protection, and an interface to the tool’s host controller. It typically delivers bipolar or unipolar clamping voltages in the hundreds to low-thousands of volts range at very low standing current, while continuously reporting clamp voltage, leakage and fault status back to the system. Because the chuck behaves as a leaky capacitor across a thin dielectric, the supply must hold its setpoint accurately under changing plasma load, RF coupling and helium backside-pressure conditions.
When the ESC power supply drifts or fails, the symptoms are immediate and costly: wafers that will not clamp or de-chuck cleanly, backside helium leaks, thermal non-uniformity, and in the worst case wafer breakage or particle excursions. Keeping a verified replacement on the shelf is therefore a core element of any sound LAM spares strategy, and that is precisely the role this ESCT-supplied part is intended to fill.
Within the tool, the ESC power supply sits between the host controller and the electrostatic chuck, translating a commanded clamp setpoint into a stable, monitored high-voltage output. Its responsibilities extend well beyond simply applying a voltage; it actively manages the clamp throughout the entire wafer cycle.
As an active high-voltage subassembly, the value of this supply lies in the precision and stability of its output and in the integrity of its monitoring and protection circuits. Two areas in particular determine whether the chuck performs to specification.
The clamping potential must remain tightly regulated despite the dynamic load the plasma and RF environment present to the chuck. Stable regulation keeps clamp force constant, which in turn keeps the wafer thermally pinned to the chuck surface.
Beyond raw output, the supply must report accurately and protect aggressively. The fab relies on its feedback to confirm a wafer is held before committing process gases and RF power.
Because the clamp governs how the wafer is held and cooled, the condition of this supply propagates directly into etch results and wafer safety. A degraded unit rarely fails cleanly; it tends to erode performance in ways that are first seen as yield drift.
Sustained high potential stresses insulation, potting and connectors. Over time, partial discharge, surface contamination or moisture ingress can lead to creepage and eventual breakdown, producing unstable output, tripped faults or complete loss of clamp.
Ageing capacitors, reference components and feedback elements cause the setpoint to drift or the output to develop ripple and noise. The chuck then clamps inconsistently, helium cooling becomes erratic, and the process engineer sees creeping non-uniformity long before a hard fault appears.
Degraded voltage or leakage sensing, or a failing communication interface, can cause false clamp-confirmation, spurious fault trips or loss of host handshaking. These faults frequently strand wafers mid-cycle and are among the most disruptive because the tool cannot safely proceed.
Replacement should be performed only by qualified personnel following LAM service procedures for the specific platform. Because this is a high-voltage assembly, lock-out/tag-out and proper discharge of stored energy are mandatory before any work begins.
High-voltage support electronics like the ESC power supply are classic single-points-of-failure: inexpensive relative to the tool, yet capable of idling an entire process module when they fault. ESCT Fab Support helps fabs and equipment refurbishers keep these critical electronics available without the cost and delay of OEM channels.
It generates and regulates the high-voltage DC potential that powers the electrostatic chuck, holding the wafer flat against the cathode for clamping and helium backside cooling, while monitoring output and protecting against arcing and over-current.
No. It is supplied as a new, OEM-compatible part cross-referenced to LAM OEM P/N 853-025054-018. It is verified to form, fit and function but is not an original OEM-branded item.
The unit is cross-referenced to the LAM OEM part number and verified to form, fit and function. If you can confirm the OEM P/N or your module configuration, our technical team will help validate the application before you order.
The typical lead time is approximately three weeks. We recommend holding one as a spare given the high impact an ESC clamp fault has on tool availability.
Common indicators include wafers that will not clamp or de-chuck cleanly, backside helium leaks, intermittent clamp-confirmation faults, etch non-uniformity, and arcing or particle excursions traced to the chuck.
Because it is a high-voltage assembly, replacement should be carried out only by qualified service personnel following LAM procedures, with proper lock-out/tag-out and energy discharge, followed by a clamp qualification before returning to production.
The ESC Power Supply (OEM P/N 853-025054-018, ESCT P/N ES2022-039) is the regulated high-voltage DC source behind the electrostatic chuck in LAM etch and strip modules. By delivering stable clamp voltage, accurate sensing and reliable arc and over-current protection, it keeps wafers flat, cooled and safely held throughout each process cycle. Sourced through ESCT Fab Support and verified to form, fit and function, with a typical three-week lead time, it is a sensible critical spare for fabs and refurbishers seeking to protect tool availability and yield without OEM cost and delay.
Disclaimer: This part is supplied by ESCT Fab Support as a new, OEM-compatible second-source component, verified to the form, fit and function of Lam Research part number 853-025054-018. It is not an original OEM part and is not sold as one. It is not manufactured by, endorsed by, or affiliated with Lam Research, and all manufacturer names and part numbers are quoted for identification and compatibility purposes only.
Fill out the form below to request a quote for the part/s you require, making sure to include the OEM part number.
If the part you are looking for is not listed, get in touch and we will try to source it for you through our wide network of partners and suppliers.
We use cookies We use analytics cookies to see how visitors use this site, so we can improve it. They are set only if you accept. Read our Cookie Policy.
